Number | Name | Date | Kind |
---|---|---|---|
4061829 | Taylor | Dec 1977 | |
4068018 | Hashimoto | Jan 1978 | |
4096290 | Fredericks | Jun 1978 | |
4125672 | Kakuchi | Nov 1978 | |
4130424 | Feit | Dec 1978 | |
4133907 | Brewer | Jan 1979 |
Entry |
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G. N. Taylor, "Sensitive Chlorine-Containing Resists for X-ray Lithography," Poly. Eng. and Sci., Jun. 1977, vol. 17, No. 6, pp. 420-429. |
L. F. Thompson, "Lithography and Radiation Chem. of Epoxy Containing Negative Electron Resists," Poly. Eng. and Sci., 14, pp. 529-533, (Jul. 1974). |
Sonja Krause, "Polymer Compatibility," J. Macromol. Sci.-Revs. in Macromol. Chem., C7 (2), pp. 251, 292-309, (1972). |