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Kaohsiung, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Closed loop concentration control system for chemical mechanical po...
Patent number
6,721,628
Issue date
Apr 13, 2004
United Microelectronics Corp.
Chien-Hsin Lai
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier head for chemical mechanical polishing
Patent number
6,569,771
Issue date
May 27, 2003
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Auxiliary gasline-heating unit in chemical vapor deposition
Patent number
6,352,244
Issue date
Mar 5, 2002
United Microelectronics, Corp.
Juen-Kuen Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical mechanical polishing apparatus
Patent number
6,341,995
Issue date
Jan 29, 2002
United Microelectronics Corp.
Chien-Hsin Lai
B24 - GRINDING POLISHING
Information
Patent Grant
Auxiliary gasline-heating unit in chemical vapor deposition
Patent number
6,322,057
Issue date
Nov 27, 2001
United Microelectronics Corp.
Juen-Kuen Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical-mechanical polish machines and fabrication process using t...
Patent number
6,293,850
Issue date
Sep 25, 2001
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polish machines and fabrication process using t...
Patent number
6,241,582
Issue date
Jun 5, 2001
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-mechanical polish machines and fabrication process using t...
Patent number
6,234,876
Issue date
May 22, 2001
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Method to maintain consistent thickness of thin film deposited by c...
Patent number
6,228,420
Issue date
May 8, 2001
United Microelectronics Corp.
Juen-Kuen Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer polishing head
Patent number
6,220,930
Issue date
Apr 24, 2001
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Method for increasing working life of retaining ring in chemical-me...
Patent number
6,206,758
Issue date
Mar 27, 2001
United Microelectronics Corp.
Chien-Hsin Lai
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-mechanical polish machines and fabrication process using t...
Patent number
6,183,350
Issue date
Feb 6, 2001
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Cleaning system with automatically controlled brush pressure
Patent number
6,119,294
Issue date
Sep 19, 2000
United Microelectronics Corp.
Chien-Hsin Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical-mechanical polishing pad
Patent number
6,120,366
Issue date
Sep 19, 2000
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing machine
Patent number
6,096,162
Issue date
Aug 1, 2000
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Retainer ring design for polishing head of chemical-mechanical poli...
Patent number
6,062,963
Issue date
May 16, 2000
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Device for filtering slurry
Patent number
6,051,139
Issue date
Apr 18, 2000
United Microelectronics Corp.
Juen-Kuen Lin
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING
Publication number
20030079836
Publication date
May 1, 2003
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Application
Auxiliary gasline-heating unit in chemical vapor deposition
Publication number
20010042930
Publication date
Nov 22, 2001
Juen-Kuen Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Wafer polishing head
Publication number
20010000770
Publication date
May 3, 2001
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING