Jun Yamashita

Person

Amagasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing device having opening enabling gas to communicate betwee...
- Patent number 11,251,025
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Jun Yamashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for processing gas, and storage medium
- Patent number 10,410,876
- Issue date Sep 10, 2019
- Tokyo Electron Limited
- Jun Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave heating apparatus and processing method
- Patent number 9,204,500
- Issue date Dec 1, 2015
- Tokyo Electron Limited
- Taro Ikeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus
- Patent number 8,882,962
- Issue date Nov 11, 2014
- Tokyo Electron Limited
- Jun Yamashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,852,389
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Taichi Monden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 8,377,254
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- Jun Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,267,040
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liner for plasma processing apparatus
- Patent number D658691
- Issue date May 1, 2012
- Tokyo Electron Limited
- Kouki Suzuki
- D15 - Machines not elsewhere specified
Information Patent Grant
Liner for plasma processing apparatus
- Patent number D658693
- Issue date May 1, 2012
- Tokyo Electron Limited
- Kouki Suzuki
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate supporting mechanism and substrate processing apparatus
- Patent number 7,981,218
- Issue date Jul 19, 2011
- Tokyo Electron Limited
- Jun Yamashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and lid opening/closing mechanism
- Patent number 7,707,965
- Issue date May 4, 2010
- Tokyo Electron Limited
- Jun Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing apparatus for semiconductor element pro...
- Patent number 7,547,860
- Issue date Jun 16, 2009
- Tokyo Electron Limited
- Sumi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cover for a heater stage of a plasma processing apparatus
- Patent number D582949
- Issue date Dec 16, 2008
- Tokyo Electron Limited
- Jun Yamashita
- D15 - Machines not elsewhere specified
Information Patent Grant
Microwave introducing antenna for a plasma processing apparatus
- Patent number D572707
- Issue date Jul 8, 2008
- Tokyo Electron Limited
- Jun Yamashita
- D14 - Recording, communication, or information retrieval equipment
Information Patent Grant
Microwave introducing antenna for a plasma processing apparatus
- Patent number D563951
- Issue date Mar 11, 2008
- Tokyo Electron Limited
- Jun Yamashita
- D14 - Recording, communication, or information retrieval equipment
Information Patent Grant
Microwave introducing antenna for a plasma processing apparatus
- Patent number D563949
- Issue date Mar 11, 2008
- Tokyo Electron Limited
- Jun Yamashita
- D14 - Recording, communication, or information retrieval equipment
Information Patent Grant
Microwave introducing antenna for a plasma processing apparatus
- Patent number D563950
- Issue date Mar 11, 2008
- Tokyo Electron Limited
- Jun Yamashita
- D14 - Recording, communication, or information retrieval equipment

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING DEVICE AND MEMBER HAVING DIFFUSION PATH
- Publication number 20190122868
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Jun YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Processing Gas, and Storage Medium
- Publication number 20170372914
- Publication date Dec 28, 2017
- TOKYO ELECTRON LIMITED
- Jun YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE HEATING APPARATUS AND PROCESSING METHOD
- Publication number 20150129586
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE HEATING APPARATUS AND PROCESSING METHOD
- Publication number 20150090708
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Sumi Tanaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROWAVE HEATING APPARATUS AND HEATING METHOD
- Publication number 20140367377
- Publication date Dec 18, 2014
- TOKYO ELECTRON LIMITED
- Taichi MONDEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PROCESSING METHOD AND MICROWAVE PROCESSING APPARATUS
- Publication number 20140042153
- Publication date Feb 13, 2014
- TOKYO ELECTRON LIMITED
- Kouji Shimomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE HEATING APPARATUS AND PROCESSING METHOD
- Publication number 20130168390
- Publication date Jul 4, 2013
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20120067845
- Publication date Mar 22, 2012
- TOKYO ELECTRON LIMITED
- Taichi Monden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PERFORMING PLASMA PROCESS
- Publication number 20110253311
- Publication date Oct 20, 2011
- TOKYO ELECTRON LIMITED
- Sunao MURAOKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING TABLE
- Publication number 20110222038
- Publication date Sep 15, 2011
- TOKYO ELECTRON LIMITED
- Jun Yamashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20110174441
- Publication date Jul 21, 2011
- TOKYO ELECTRON LIMITED
- Jun YAMASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20110024048
- Publication date Feb 3, 2011
- TOKYO ELECTRON LIMITED
- Hideo Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20100291319
- Publication date Nov 18, 2010
- TOKYO ELECTRON LIMITED
- Jun Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND GAS EXHAUST METHOD
- Publication number 20100239756
- Publication date Sep 23, 2010
- TOKYO ELECTRON LIMITED
- Jun Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20100012275
- Publication date Jan 21, 2010
- TOKYO ELECTRON LIMITED
- Jun Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT APPARATUS, AND SUBSTRATE HEATING MECHANISM TO BE U...
- Publication number 20090065486
- Publication date Mar 12, 2009
- TOKYO ELECTRON LIMITED
- Jun Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20090065146
- Publication date Mar 12, 2009
- TOKYO ELECTRON LIMITED
- Jun Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PLACING TABLE USED FOR SA...
- Publication number 20090041568
- Publication date Feb 12, 2009
- TOKYO ELECTRON LIMITED
- Sunao Muraoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD
- Publication number 20090029564
- Publication date Jan 29, 2009
- TOKYO ELECTRON LIMITED
- Jun Yamashita
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE SUPPORTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20080066682
- Publication date Mar 20, 2008
- TOKYO ELECTRON LIMITED
- Jun Yamashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Processing Apparatus and Plasma Processing Method
- Publication number 20070264441
- Publication date Nov 15, 2007
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND LID OPENING/CLOSING MECHANISM
- Publication number 20070238307
- Publication date Oct 11, 2007
- TOKYO ELECTRON LIMITED
- Jun Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFTER AND TARGET OBJECT PROCESSING APPARATUS PROVIDED WITH LIFTER
- Publication number 20070212200
- Publication date Sep 13, 2007
- TOKYO ELECTRON LIMITED
- Atsushi Ueda
- H01 - BASIC ELECTRIC ELEMENTS

Jun Yamashita

Person

Patents Grantslast 30 patents

Processing device having opening enabling gas to communicate betwee...

Apparatus and method for processing gas, and storage medium

Microwave heating apparatus and processing method

Plasma processing apparatus

Plasma processing apparatus and plasma processing method

Plasma processing apparatus

Plasma processing apparatus and plasma processing method

Liner for plasma processing apparatus

Liner for plasma processing apparatus

Substrate supporting mechanism and substrate processing apparatus

Processing apparatus and lid opening/closing mechanism

Microwave plasma processing apparatus for semiconductor element pro...

Cover for a heater stage of a plasma processing apparatus

Microwave introducing antenna for a plasma processing apparatus

Microwave introducing antenna for a plasma processing apparatus

Microwave introducing antenna for a plasma processing apparatus

Microwave introducing antenna for a plasma processing apparatus

Patents Applicationslast 30 patents

PROCESSING DEVICE AND MEMBER HAVING DIFFUSION PATH

Apparatus and Method for Processing Gas, and Storage Medium

MICROWAVE HEATING APPARATUS AND PROCESSING METHOD

MICROWAVE HEATING APPARATUS AND PROCESSING METHOD

MICROWAVE HEATING APPARATUS AND HEATING METHOD

MICROWAVE PROCESSING METHOD AND MICROWAVE PROCESSING APPARATUS

MICROWAVE HEATING APPARATUS AND PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS FOR PERFORMING PLASMA PROCESS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING TABLE

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND GAS EXHAUST METHOD

PLASMA PROCESSING APPARATUS

PLASMA TREATMENT APPARATUS, AND SUBSTRATE HEATING MECHANISM TO BE U...

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PLACING TABLE USED FOR SA...

PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD

SUBSTRATE SUPPORTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS

Plasma Processing Apparatus and Plasma Processing Method

PROCESSING APPARATUS AND LID OPENING/CLOSING MECHANISM

LIFTER AND TARGET OBJECT PROCESSING APPARATUS PROVIDED WITH LIFTER