LIFTER AND TARGET OBJECT PROCESSING APPARATUS PROVIDED WITH LIFTER

Abstract

Each pin fixing portion is fitted in a through-hole formed in a lifter arm, and includes a flange portion, a movable portion, a screw portion, and a pin insertion hole. A pin is fixedly screwed into the pin insertion hole at a lower end. The movable portion is inserted with an allowance in the through-hole, and the flange portion is set in contact with an upper surface of the lifter arm. The screw portion projects downward from the through-hole. A lower support portion is screwed on the screw portion and set in contact with a lower surface of the lifter arm.

Description

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

FIGS. 1 and 2 are sectional views each showing one of pins and a lifter arm used in a conventional lifter;

FIG. 3 is a plan view showing pins and a lifter arm used in a conventional lifter;

FIG. 4 is sectional view showing a plasma processing apparatus of the microwave type provided with a lifter according to the present invention;

FIG. 5 is an exploded perspective view showing a substrate seat member and a support portion used in the plasma processing apparatus of the microwave type shown in FIG. 4;

FIG. 6 is a perspective view showing a lifter according to an embodiment of the present invention;

FIG. 7 is a perspective view of the lifter shown FIG. 6 in a state where the arms thereof are unfurled;

FIG. 8 is a perspective back view of the lifter shown FIG. 6;

FIG. 9 is a sectional view of the lifter shown FIG. 6 in a state where a pin is inserted into a pin insertion hole formed in a substrate seat member; and

FIG. 10 is a sectional view showing another lifter according to another embodiment of the present invention in a state where a pin is inserted into a pin insertion hole formed in a substrate seat member.

Claims

1. A lifter comprising: a plurality of pins inserted in a plurality of holes formed through a table for placing thereon a target object to be processed, the plurality of pins being configured to support;a lifter arm configured to support the plurality of pins; andpin fixing portions configured to respectively fix the pins to the lifter arm,such that the pins are moved up and down by the lifter arm and thereby caused to project and retreat relative to the holes of the table so as to move up and down the target object,wherein each of the pin fixing portions is inserted into a through-hole formed in the lifter arm, and comprisesa movable portion having a pin insertion hole formed therein to fix a corresponding one of the pins, the movable portion being inserted in the through-hole with a gap formed therebetween,a support portion connected to the movable portion on an upper side and having a diameter larger than that of the movable portion, the support portion being set in contact with an upper surface of the lifter arm while said one of the pins extending therethrough,an engage portion connected to the movable portion on a lower side and projecting downward from the through-hole, anda stopper portion engaged with engage portion and set in contact with a lower surface of the lifter arm,such that the pin fixing portion is allowed to move in a horizontal direction by the gap around the movable portion.

2. A lifter comprising: a plurality of pins inserted in a plurality of holes formed through a table for placing thereon a target object to be processed, the plurality of pins being configured to support;a lifter arm configured to support and move up and down the plurality of pins; andpin fixing portions configured to respectively fix the pins to the lifter arm,such that the pins are moved up and down by the lifter arm and thereby caused to project and retreat relative to the holes of the table so as to move up and down the target object,wherein each of the pin fixing portions is inserted into a screw hole formed in the lifter arm and having a screw on an inner wall, and comprisesa movable portion having a pin insertion hole formed therein to fix a corresponding one of the pins, the movable portion being inserted in the screw hole with a gap formed therebetween,a support portion connected to the movable portion on an upper side and having a diameter larger than that of the movable portion, the support portion being set in contact with an upper surface of the lifter arm while said one of the pins extending therethrough, anda stopper portion connected to the movable portion on a lower side and having a male screw formed on an outer surface to be screwed into the screw hole, the stopper portion supporting the movable portion from below while the male screw being screwed into the screw hole and projecting downward from the screw hole,such that the pin fixing portion is allowed to move in a horizontal direction by the gap around the movable portion.

3. A processing apparatus comprising: a chamber configured to accommodate a target object;a table configured to place thereon the target object inside the chamber;a process mechanism configured to perform a predetermined process on the target object inside the chamber;a lifter configured to move up and down the target object above the table; anda driving mechanism for driving the lifter,wherein the lifter comprises a plurality of pins configured to support and move up and down the target object above the table, a lifter arm configured to support and move up and down the plurality of pins, and pin fixing portions configured to respectively fix the pins to the lifter arm,the table has a plurality of holes formed therethrough in which the pins are inserted, such that the pins are moved up and down by the lifter arm and thereby caused to project and retreat relative to the holes so as to move up and down the target object, andeach of the pin fixing portions is inserted into a through-hole formed in the lifter arm, and comprisesa movable portion having a pin insertion hole formed therein to fix a corresponding one of the pins, the movable portion being inserted in the through-hole with a gap formed therebetween,a support portion connected to the movable portion on an upper side and having a diameter larger than that of the movable portion, the support portion being set in contact with an upper surface of the lifter arm while said one of the pins extending therethrough,an engage portion connected to the movable portion on a lower side and projecting downward from the through-hole, anda contact portion engaged with engage portion and set in contact with a lower surface of the lifter arm,such that the pin fixing portion is allowed to move in a horizontal direction by the gap around the movable portion.

4. A processing apparatus comprising: a chamber configured to accommodate a target object;a table configured to place thereon the target object inside the chamber;a process mechanism configured to perform a predetermined process on the target object inside the chamber:a lifter configured to move up and down the target object above the table; anda driving mechanism for driving the lifter,wherein the lifter comprises a plurality of pins configured to support and move up and down the target object above the table, a lifter arm configured to support and move up and down the plurality of pins, and pin fixing portions configured to respectively fix the pins to the lifter arm,the table has a plurality of holes formed therethrough in which the pins are inserted, such that the pins are moved up and down by the lifter arm and thereby caused to project and retreat relative to the holes so as to move up and down the target object, andeach of the pin fixing portions is inserted into a screw hole formed in the lifter arm and having a screw on an inner wall, and comprisesa movable portion having a pin insertion hole formed therein to fix a corresponding one of the pins, the movable portion being inserted in the screw hole with a gap formed therebetween,a support portion connected to the movable portion on an upper side and having a diameter larger than that of the movable portion, the support portion being set in contact with an upper surface of the lifter arm while said one of the pins extending therethrough, anda stopper portion connected to the movable portion on a lower side and having a male screw formed on an outer surface to be screwed into the screw hole, the stopper portion supporting the movable portion from below while the male screw being screwed into the screw hole and projecting downward from the screw hole,such that the pin fixing portion is allowed to move in a horizontal direction by the gap around the movable portion.

5. A lifter comprising: a plurality of pins inserted in a plurality of holes formed through a table for placing thereon a target object to be processed, the plurality of pins being configured to support;a lifter arm configured to support the plurality of pins;a support portion configured to horizontally support the lifter arm; andan elevating section coupled to the support portion and configured to move up and down while horizontally supporting the lifter arm so as to move up and down the lifter arm,such that the pins are supported and moved up and down by the lifter arm and thereby caused to project and retreat relative to the holes of the table so as to move up and down the target object,wherein the lifter arm comprises a pair of arm parts,the support portion comprises a pair of support plates configured to respectively and horizontally support the arm parts,the elevating section comprises a pair of elevating shafts respectively coupled to the support plates and configured to move up and down while respectively and horizontally supporting the arm parts so as to move up and down the arm parts, andthe arm parts are operated to move up and down in set positions where the arm parts are close to each other, and the arm parts are separable from each other by rotating the elevating shafts or rotating the support plates relative to the elevating shafts from the set positions.

6. The lifter according to claim 5, wherein the arm parts respectively extend from ends of the support plates in a direction perpendicular to a longitudinal direction of the support plates, and other ends of the support plates are respectively fixed to upper ends of the elevating shafts by fixing screws extending therethrough, the lifter further comprises a coupling plate configured to couple the support plates to each other in a state where ends of the support plates are set to abut on each other, andcoupling by the coupling plate is unlocked, and the fixing screws are loosened, so that the support plates are set to be rotatable relative to the elevating shafts, when the arm parts are separated from each other.

7. The lifter according to claim 5 comprising pin fixing portions configured to respectively fix the pins to the lifter arm, each of the pin fixing portions being inserted into a through-hole formed in the lifter arm, and comprisinga movable portion having a pin insertion hole formed therein to fix a corresponding one of the pins, the movable portion being inserted in the through-hole with a gap formed therebetween,a support portion connected to the movable portion on an upper side and having a diameter larger than that of the movable portion, the support portion being set in contact with an upper surface of the lifter arm while said one of the pins extending therethrough,an engage portion connected to the movable portion on a lower side and projecting downward from the through-hole, anda contact portion engaged with engage portion and set in contact with a lower surface of the lifter arm,such that the pin fixing portion is allowed to move in a horizontal direction by the gap around the movable portion.

8. A lifter according to claim 5, further comprising pin fixing portions configured to respectively fix the pins to the lifter arm, such that the pins are moved up and down by the lifter arm and thereby caused to project and retreat relative to the holes of the table so as to move up and down the target object,wherein each of the pin fixing portions being inserted into a screw hole formed in the lifter arm and having a screw on an inner wall, and comprisinga movable portion having a pin insertion hole formed therein to fix a corresponding one of the pins, the movable portion being inserted in the screw hole with a gap formed therebetween,a support portion connected to the movable portion on an upper side and having a diameter larger than that of the movable portion, the support portion being set in contact with an upper surface of the lifter arm while said one of the pins extending therethrough, anda stopper portion connected to the movable portion on a lower side and having a male screw formed on an outer surface to be screwed into the screw hole, the stopper portion supporting the movable portion from below while the male screw being screwed into the screw hole and projecting downward from the screw hole,such that the pin fixing portion is allowed to move in a horizontal direction by the gap around the movable portion.

9. A processing apparatus comprising: a chamber configured to accommodate a target object;a table configured to place thereon the target object inside the chamber;a process mechanism configured to perform a predetermined process on the target object inside the chamber;a lifter configured to move up and down the target object above the table; anda driving mechanism for driving the lifter,wherein the lifter comprises a plurality of pins configured to support a lifter arm configured to support the plurality of pins, a support portion configured to horizontally support the lifter arm, and an elevating section coupled to the support portion and configured to move up and down while horizontally supporting the lifter arm so as to move up and down the lifter arm,the table has a plurality of holes formed therethrough in which the pins are inserted, such that the pins are moved up and down by the lifter arm and thereby caused to project and retreat relative to the holes so as to move up and down the target object,the lifter arm comprises a pair of arm parts,the support portion comprises a pair of support plates configured to respectively and horizontally support the arm parts,the elevating section comprises a pair of elevating shafts respectively coupled to the support plates and configured to move up and down while respectively and horizontally supporting the arm parts so as to move up and down the arm parts, andthe arm parts are operated to move up and down in set positions where the arm parts are close to each other, and the arm parts are separable from each other by rotating the elevating shafts or rotating the support plates relative to the elevating shafts from the set positions.

10. The processing apparatus according to claim 9, wherein the arm parts respectively extend from ends of the support plates in a direction perpendicular to a longitudinal direction of the support plates, and other ends of the support plates are respectively fixed to upper ends of the elevating shafts by fixing screws extending therethrough, the lifter further comprises a coupling plate configured to couple the support plates to each other in a state where ends of the support plates are set to abut on each other, andcoupling by the coupling plate is unlocked, and the fixing screws are loosened, so that the support plates are set to be rotatable relative to the elevating shafts, when the arm parts are separated from each other.

11. A processing apparatus according to claim 9, wherein the lifter further comprises pin fixing portions configured to respectively fix the pins to the lifter arm, each of the pin fixing portions being inserted into a through-hole formed in the lifter arm, and comprisinga movable portion having a pin insertion hole formed therein to fix a corresponding one of the pins, the movable portion being inserted in the through-hole with a gap formed therebetween,a support portion connected to the movable portion on an upper side and having a diameter larger than that of the movable portion, the support portion being set in contact with an upper surface of the lifter arm while said one of the pins extending therethrough,an engage portion connected to the movable portion on a lower side and projecting downward from the through-hole, anda contact portion engaged with engage portion and set in contact with a lower surface of the lifter arm,such that the pin fixing portion is allowed to move in a horizontal direction by the gap around the movable portion.

12. A processing apparatus according to claim 9, wherein the lifter further comprises pin fixing portions configured to respectively fix the pins to the lifter arm,such that the pins are moved up and down by the lifter arm and thereby caused to project and retreat relative to the holes of the table so as to move up and down the target object,wherein each of the pin fixing portions being inserted into a screw hole formed in the lifter arm and having a screw on an inner wall, and comprisinga movable portion having a pin insertion hole formed therein to fix a corresponding one of the pins, the movable portion being inserted in the screw hole with a gap formed therebetween,a support portion connected to the movable portion on an upper side and having a diameter larger than that of the movable portion, the support portion being set in contact with an upper surface of the lifter arm while said one of the pins extending therethrough, anda stopper portion connected to the movable portion on a lower side and having a male screw formed on an outer surface to be screwed into the screw hole, the stopper portion supporting the movable portion from below while the male screw being screwed into the screw hole and projecting downward from the screw hole,such that the pin fixing portion is allowed to move in a horizontal direction by the gap around the movable portion.