Jurgen Kleinschmidt

Person

Weissenfels, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Reduction of laser speckle in photolithography by controlled disrup...
- Patent number 6,898,216
- Issue date May 24, 2005
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for wavelength calibration
- Patent number 6,608,848
- Issue date Aug 19, 2003
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
F2-laser with line selection
- Patent number 6,556,613
- Issue date Apr 29, 2003
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser for generating narrow-band radiation
- Patent number RE38039
- Issue date Mar 18, 2003
- Lambda Physik AG
- Jürgen Kleinschmidt
- 372 - Coherent light generators
Information Patent Grant
Narrow band excimer or molecular fluorine laser with adjustable ban...
- Patent number 6,498,803
- Issue date Dec 24, 2002
- Lambda Physik AG
- Peter Heist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Narrow band excimer or molecular fluorine laser with adjustable ban...
- Patent number 6,487,228
- Issue date Nov 26, 2002
- Lambda Physik AG
- Peter Heist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
F2-laser with line selection
- Patent number 6,477,187
- Issue date Nov 5, 2002
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
F2-laser with line selection
- Patent number 6,466,598
- Issue date Oct 15, 2002
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser
- Patent number 6,459,720
- Issue date Oct 1, 2002
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal wavelength calibration for tunable ArF-excimer laser using...
- Patent number 6,404,795
- Issue date Jun 11, 2002
- Lambda Physik AG
- Uwe Leinhos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
F2-laser with line selection
- Patent number 6,345,065
- Issue date Feb 5, 2002
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Narrow band excimer or molecular fluorine laser with adjustable ban...
- Patent number 6,298,080
- Issue date Oct 2, 2001
- Lambda Physik AG
- Peter Heist
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for wavelength calibration
- Patent number 6,272,158
- Issue date Aug 7, 2001
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal wavelength calibration for tunable ArF-excimer laser using...
- Patent number 6,269,110
- Issue date Jul 31, 2001
- Lambda Physik AG
- Uwe Leinhos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas performance control system for gas discharge lasers
- Patent number 6,243,406
- Issue date Jun 5, 2001
- Peter Heist
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wavelength calibration tool for narrow band excimer lasers
- Patent number 6,160,831
- Issue date Dec 12, 2000
- Lambda Physik GmbH
- Jurgen Kleinschmidt
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for wavelength calibration
- Patent number 6,160,832
- Issue date Dec 12, 2000
- Lambda Physik GmbH
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser for generating narrow-band radiation
- Patent number 5,761,236
- Issue date Jun 2, 1998
- Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed laser
- Patent number 5,559,815
- Issue date Sep 24, 1996
- Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
- Vadim Berger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Narrow-band laser apparatus
- Patent number 5,559,816
- Issue date Sep 24, 1996
- Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
- Dirk Basting
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Very narrow band excimer or molecular fluorine laser
- Publication number 20020186741
- Publication date Dec 12, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- G01 - MEASURING TESTING
Information Patent Application
F2-laser with line selection
- Publication number 20020041616
- Publication date Apr 11, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
F2-laser with line selection
- Publication number 20020034206
- Publication date Mar 21, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
F2-laser with line selection
- Publication number 20020015431
- Publication date Feb 7, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Excimer laser
- Publication number 20020015432
- Publication date Feb 7, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for wavelength calibration
- Publication number 20020012368
- Publication date Jan 31, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Narrow band excimer or molecular fluorine laser with adjustable ban...
- Publication number 20010028669
- Publication date Oct 11, 2001
- Peter Heist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Narrow band excimer or molecular fluorine laser with adjustable ban...
- Publication number 20010009560
- Publication date Jul 26, 2001
- Lambda Physik Gesellschaft zur Herstellung von Larsen GmbH
- Peter Heist
- H01 - BASIC ELECTRIC ELEMENTS

Jurgen Kleinschmidt

Person

Patents Grantslast 30 patents

Reduction of laser speckle in photolithography by controlled disrup...

Method and apparatus for wavelength calibration

F2-laser with line selection

Laser for generating narrow-band radiation

Narrow band excimer or molecular fluorine laser with adjustable ban...

Narrow band excimer or molecular fluorine laser with adjustable ban...

F2-laser with line selection

F2-laser with line selection

Excimer laser

Internal wavelength calibration for tunable ArF-excimer laser using...

F2-laser with line selection

Narrow band excimer or molecular fluorine laser with adjustable ban...

Method and apparatus for wavelength calibration

Internal wavelength calibration for tunable ArF-excimer laser using...

Gas performance control system for gas discharge lasers

Wavelength calibration tool for narrow band excimer lasers

Method and apparatus for wavelength calibration

Laser for generating narrow-band radiation

Pulsed laser

Narrow-band laser apparatus

Patents Applicationslast 30 patents

Very narrow band excimer or molecular fluorine laser

F2-laser with line selection

F2-laser with line selection

F2-laser with line selection

Excimer laser

Method and apparatus for wavelength calibration

Narrow band excimer or molecular fluorine laser with adjustable ban...

Narrow band excimer or molecular fluorine laser with adjustable ban...