Kaihan Ashtiani

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Metal fill process for three-dimensional vertical NAND wordline
- Patent number 11,348,795
- Issue date May 31, 2022
- Lam Research Corporation
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gap fill using carbon-based films
- Patent number 11,049,716
- Issue date Jun 29, 2021
- Lam Research Corporation
- Wei Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ chamber clean end point detection systems and methods using...
- Patent number 10,895,539
- Issue date Jan 19, 2021
- Lam Research Corporation
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Manganese barrier and adhesion layers for cobalt
- Patent number 10,438,847
- Issue date Oct 8, 2019
- Lam Research Corporation
- Chiukin Steven Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interlevel conductor pre-fill utilizing selective barrier deposition
- Patent number 10,262,943
- Issue date Apr 16, 2019
- Lam Research Corporation
- Artur Kolics
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selectively sealing ultra low-k porous dielectric layer...
- Patent number 10,049,921
- Issue date Aug 14, 2018
- Lam Research Corporation
- Nerissa Sue Draeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interlevel conductor pre-fill utilizing selective barrier deposition
- Patent number 9,875,968
- Issue date Jan 23, 2018
- Lam Research Corporation
- Artur Kolics
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interlevel conductor pre-fill utilizing selective barrier deposition
- Patent number 9,583,386
- Issue date Feb 28, 2017
- Lam Research Corporation
- Artur Kolics
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery
- Patent number 9,447,499
- Issue date Sep 20, 2016
- Novellus Systems, Inc.
- Shambhu N. Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for eliminating seams in atomic layer depositio...
- Patent number 9,406,544
- Issue date Aug 2, 2016
- Lam Research Corporation
- Wei Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flowable oxide film with tunable wet etch rate
- Patent number 9,299,559
- Issue date Mar 29, 2016
- Novellus Systems, Inc.
- Nerissa Draeger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for improving wafer uniformity
- Patent number 9,284,644
- Issue date Mar 15, 2016
- Lam Research Corporation
- Kevin Madrigal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flowable oxide film with tunable wet etch rate
- Patent number 8,846,536
- Issue date Sep 30, 2014
- Novellus Systems, Inc.
- Nerissa Draeger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gap fill integration
- Patent number 8,728,958
- Issue date May 20, 2014
- Novellus Systems, Inc.
- Kaihan Ashtiani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing thin tungsten film with low resistivity and r...
- Patent number 8,409,987
- Issue date Apr 2, 2013
- Novellus Systems, Inc.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for growing low-resistivity tungsten for high aspect ratio...
- Patent number 8,409,985
- Issue date Apr 2, 2013
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming all tungsten contacts and lines
- Patent number 8,367,546
- Issue date Feb 5, 2013
- Novellus Systems, Inc.
- Raashina Humayun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ternary tungsten-containing resistive thin films
- Patent number 8,062,977
- Issue date Nov 22, 2011
- Novellus Systems, Inc.
- Kaihan Ashtiani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing thin tungsten film with low resistivity and r...
- Patent number 8,058,170
- Issue date Nov 15, 2011
- Novellus Systems, Inc.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming all tungsten contacts and lines
- Patent number 8,053,365
- Issue date Nov 8, 2011
- Novellus Systems, Inc.
- Raashina Humayun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adsorption based material removal process
- Patent number 8,043,972
- Issue date Oct 25, 2011
- Novellus Systems, Inc.
- Xinye Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for growing low-resistivity tungsten for high aspect ratio...
- Patent number 7,955,972
- Issue date Jun 7, 2011
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of tungsten nitride
- Patent number 7,691,749
- Issue date Apr 6, 2010
- Novellus Systems, Inc.
- Karl B. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adsorption based material removal process
- Patent number 7,416,989
- Issue date Aug 26, 2008
- Novellus Systems, Inc.
- Xinye Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming low-resistivity tungsten interconnects
- Patent number 7,262,125
- Issue date Aug 28, 2007
- Novellus Systems, Inc.
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reducing tungsten film roughness and improving step cove...
- Patent number 7,141,494
- Issue date Nov 28, 2006
- Novellus Systems, Inc.
- Sang-Hyeob Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of tungsten nitride
- Patent number 7,005,372
- Issue date Feb 28, 2006
- Novellus Systems, Inc.
- Karl B. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for depositing superior Ta (N) copper thin fil...
- Patent number 6,905,959
- Issue date Jun 14, 2005
- Novellus Systems, Inc.
- Kaihan A. Ashtiani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for depositing superior Ta(N)/copper thin film...
- Patent number 6,541,371
- Issue date Apr 1, 2003
- Novellus Systems, Inc.
- Kaihan A. Ashtiani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of erosion profile and process characteristics in magnetron...
- Patent number 6,500,321
- Issue date Dec 31, 2002
- Novellus Systems, Inc.
- Kaihan A. Ashtiani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GRADIENT LINER IN METAL FILL
- Publication number 20250022751
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Sang-Hyeob LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS GAS RAMP DURING SEMICONDUCTOR PROCESSING
- Publication number 20240376598
- Publication date Nov 14, 2024
- LAM RESEARCH CORPORATION
- Jasmine LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL FILL PROCESS FOR THREE-DIMENSIONAL VERTICAL NAND WORDLINE
- Publication number 20200211853
- Publication date Jul 2, 2020
- LAM RESEARCH CORPORATION
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAP FILL USING CARBON-BASED FILMS
- Publication number 20190181004
- Publication date Jun 13, 2019
- LAM RESEARCH CORPORATION
- Wei Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU CHAMBER CLEAN END POINT DETECTION SYSTEMS AND METHODS USING...
- Publication number 20190120775
- Publication date Apr 25, 2019
- LAM RESEARCH CORPORATION
- Kapil Sawlani
- G01 - MEASURING TESTING
Information Patent Application
Interlevel Conductor Pre-Fill Utilizing Selective Barrier Deposition
- Publication number 20180151503
- Publication date May 31, 2018
- LAM RESEARCH CORPORATION
- Artur Kolics
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANGANESE BARRIER AND ADHESION LAYERS FOR COBALT
- Publication number 20170330797
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Chiukin Steven Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Interlevel Conductor Pre-Fill Utilizing Selective Barrier Deposition
- Publication number 20170162512
- Publication date Jun 8, 2017
- LAM RESEARCH CORPORATION
- Artur Kolics
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAP FILL USING CARBON-BASED FILMS
- Publication number 20160314964
- Publication date Oct 27, 2016
- LAM RESEARCH CORPORATION
- Wei Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Interlevel Conductor Pre-Fill Utilizing Selective Barrier Deposition
- Publication number 20160118296
- Publication date Apr 28, 2016
- LAM RESEARCH CORPORATION
- Artur Kolics
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOWABLE DIELECTRIC FOR SELECTIVE ULTRA LOW-K PORE SEALING
- Publication number 20160056071
- Publication date Feb 25, 2016
- LAM RESEARCH CORPORATION
- Nerissa Sue Draeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR PRODUCING ENERGETIC NEUTRALS
- Publication number 20160013020
- Publication date Jan 14, 2016
- LAM RESEARCH CORPORATION
- Kaihan Ashtiani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR IMPROVING WAFER UNIFORMITY
- Publication number 20150240361
- Publication date Aug 27, 2015
- LAM RESEARCH CORPORATION
- Kevin Madrigal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR FORMING FLOWABLE DIELECTRIC FILMS HAVING...
- Publication number 20150118863
- Publication date Apr 30, 2015
- LAM RESEARCH CORPORATION
- Megha Rathod
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOWABLE OXIDE FILM WITH TUNABLE WET ETCH RATE
- Publication number 20150044882
- Publication date Feb 12, 2015
- Novellus Systems, Inc.
- Nerissa Draeger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION
- Publication number 20140302689
- Publication date Oct 9, 2014
- Novellus Systems, Inc.
- Kaihan Ashtiani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL PLENUM, AXI-SYMMETRIC SHOWERHEAD WITH EDGE-TO-CENTER GAS DELIVERY
- Publication number 20130341433
- Publication date Dec 26, 2013
- Shambhu N. Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOWABLE OXIDE FILM WITH TUNABLE WET ETCH RATE
- Publication number 20130230987
- Publication date Sep 5, 2013
- Nerissa Draeger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING ALL TUNGSTEN CONTACTS AND LINES
- Publication number 20120040530
- Publication date Feb 16, 2012
- Raashina HUMAYUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING THIN TUNGSTEN FILM WITH LOW RESISTIVITY AND R...
- Publication number 20120015518
- Publication date Jan 19, 2012
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FOR HIGH ASPECT RATIO...
- Publication number 20110223763
- Publication date Sep 15, 2011
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOVEL GAP FILL INTEGRATION
- Publication number 20110151678
- Publication date Jun 23, 2011
- Kaihan Ashtiani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING THIN TUNGSTEN FILM WITH LOW RESISTIVITY AND R...
- Publication number 20100159694
- Publication date Jun 24, 2010
- NOVELLUS SYSTEMS INC.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING ALL TUNGSTEN CONTACTS AND LINES
- Publication number 20090163025
- Publication date Jun 25, 2009
- Novellus Systems, Inc.
- Raashina Humayun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FOR HIGH ASPECT RATIO...
- Publication number 20080254623
- Publication date Oct 16, 2008
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition of tungsten nitride
- Publication number 20060094238
- Publication date May 4, 2006
- Novellus Systems, Inc.
- Karl B. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for reducing tungsten film roughness and improving step cove...
- Publication number 20050031786
- Publication date Feb 10, 2005
- Novellus Systems, Inc.
- Sang-Hyeob Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming low-resistivity tungsten interconnects
- Publication number 20040202786
- Publication date Oct 14, 2004
- Novellus Systems, Inc.
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition of tungsten nitride
- Publication number 20040142557
- Publication date Jul 22, 2004
- Novellus Systems, Inc.
- Karl B. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD deposition of titanium and titanium nitride layers in the same...
- Publication number 20010030125
- Publication date Oct 18, 2001
- Gerard Chris D'Couto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kaihan Ashtiani

Person

Patents Grantslast 30 patents

Metal fill process for three-dimensional vertical NAND wordline

Gap fill using carbon-based films

In-situ chamber clean end point detection systems and methods using...

Manganese barrier and adhesion layers for cobalt

Interlevel conductor pre-fill utilizing selective barrier deposition

Method for selectively sealing ultra low-k porous dielectric layer...

Interlevel conductor pre-fill utilizing selective barrier deposition

Interlevel conductor pre-fill utilizing selective barrier deposition

Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery

Systems and methods for eliminating seams in atomic layer depositio...

Flowable oxide film with tunable wet etch rate

Apparatus and method for improving wafer uniformity

Flowable oxide film with tunable wet etch rate

Gap fill integration

Method for depositing thin tungsten film with low resistivity and r...

Methods for growing low-resistivity tungsten for high aspect ratio...

Methods for forming all tungsten contacts and lines

Ternary tungsten-containing resistive thin films

Method for depositing thin tungsten film with low resistivity and r...

Methods for forming all tungsten contacts and lines

Adsorption based material removal process

Methods for growing low-resistivity tungsten for high aspect ratio...

Deposition of tungsten nitride

Adsorption based material removal process

Method of forming low-resistivity tungsten interconnects

Method for reducing tungsten film roughness and improving step cove...

Deposition of tungsten nitride

Apparatus and method for depositing superior Ta (N) copper thin fil...

Apparatus and method for depositing superior Ta(N)/copper thin film...

Control of erosion profile and process characteristics in magnetron...

Patents Applicationslast 30 patents

GRADIENT LINER IN METAL FILL

PROCESS GAS RAMP DURING SEMICONDUCTOR PROCESSING

METAL FILL PROCESS FOR THREE-DIMENSIONAL VERTICAL NAND WORDLINE

GAP FILL USING CARBON-BASED FILMS

IN-SITU CHAMBER CLEAN END POINT DETECTION SYSTEMS AND METHODS USING...

Interlevel Conductor Pre-Fill Utilizing Selective Barrier Deposition

MANGANESE BARRIER AND ADHESION LAYERS FOR COBALT

Interlevel Conductor Pre-Fill Utilizing Selective Barrier Deposition

GAP FILL USING CARBON-BASED FILMS

Interlevel Conductor Pre-Fill Utilizing Selective Barrier Deposition

FLOWABLE DIELECTRIC FOR SELECTIVE ULTRA LOW-K PORE SEALING

SYSTEMS AND METHODS FOR PRODUCING ENERGETIC NEUTRALS

APPARATUS AND METHOD FOR IMPROVING WAFER UNIFORMITY

METHODS AND APPARATUS FOR FORMING FLOWABLE DIELECTRIC FILMS HAVING...

FLOWABLE OXIDE FILM WITH TUNABLE WET ETCH RATE

METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION

DUAL PLENUM, AXI-SYMMETRIC SHOWERHEAD WITH EDGE-TO-CENTER GAS DELIVERY

FLOWABLE OXIDE FILM WITH TUNABLE WET ETCH RATE

METHODS FOR FORMING ALL TUNGSTEN CONTACTS AND LINES

METHOD FOR DEPOSITING THIN TUNGSTEN FILM WITH LOW RESISTIVITY AND R...

METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FOR HIGH ASPECT RATIO...

NOVEL GAP FILL INTEGRATION

METHOD FOR DEPOSITING THIN TUNGSTEN FILM WITH LOW RESISTIVITY AND R...

METHODS FOR FORMING ALL TUNGSTEN CONTACTS AND LINES

METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FOR HIGH ASPECT RATIO...

Deposition of tungsten nitride

Method for reducing tungsten film roughness and improving step cove...

Method of forming low-resistivity tungsten interconnects

Deposition of tungsten nitride

PVD deposition of titanium and titanium nitride layers in the same...