Kapu Sirish Reddy

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Selective deposition of etch-stop layer for enhanced patterning
- Patent number 11,869,770
- Issue date Jan 9, 2024
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of etch-stop layer for enhanced patterning
- Patent number 11,094,542
- Issue date Aug 17, 2021
- Lam Research Corporation
- Nagraj Shankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition with atomic layer etch reset
- Patent number 10,998,187
- Issue date May 4, 2021
- Lam Research Corporation
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of aluminum oxide etch stop layers
- Patent number 10,804,144
- Issue date Oct 13, 2020
- Lam Research Corporation
- Meliha Gozde Rainville
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with air-gapped plenums and overhead isolation gas distr...
- Patent number 10,745,806
- Issue date Aug 18, 2020
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of Aluminum oxide etch stop layers
- Patent number 10,665,501
- Issue date May 26, 2020
- Lam Research Corporation
- Meliha Gozde Rainville
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxidizing treatment of aluminum nitride films in semiconductor devi...
- Patent number 10,651,080
- Issue date May 12, 2020
- Lam Research Corporation
- Meliha Gozde Rainville
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pre-treatment method to improve selectivity in a selective depositi...
- Patent number 10,643,889
- Issue date May 5, 2020
- Lam Rasearch Corporation
- Dennis Hausmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition of etch-stop layer for enhanced patterning
- Patent number 10,566,194
- Issue date Feb 18, 2020
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition with atomic layer etch reset
- Patent number 10,559,461
- Issue date Feb 11, 2020
- Lam Research Corporation
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead with air-gapped plenums and overhead isolation gas distr...
- Patent number 10,472,716
- Issue date Nov 12, 2019
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite dielectric interface layers for interconnect structures
- Patent number 10,418,236
- Issue date Sep 17, 2019
- Lam Research Corporation
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite dielectric interface layers for interconnect structures
- Patent number 10,049,869
- Issue date Aug 14, 2018
- Lam Research Corporation
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of aluminum oxide etch stop layers
- Patent number 9,859,153
- Issue date Jan 2, 2018
- Lam Research Corporation
- Meliha Gozde Rainville
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature formation of high quality silicon oxide films in se...
- Patent number 9,847,221
- Issue date Dec 19, 2017
- Lam Research Corporation
- Kevin M. McLaughlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS
- Publication number 20240410760
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE ANALYSIS OF PLASMA CONDITIONS
- Publication number 20240234112
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Michal Danek
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN CARBON HARDMASKS IN...
- Publication number 20240030028
- Publication date Jan 25, 2024
- LAM RESEARCH CORPORATION
- Abbin Antony
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROBUST ASHABLE HARD MASK
- Publication number 20230360922
- Publication date Nov 9, 2023
- LAM RESEARCH CORPORATION
- Matthew Scott WEIMER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION RATE ENHANCEMENT OF AMORPHOUS CARBON HARD MASK FILM BY P...
- Publication number 20230357921
- Publication date Nov 9, 2023
- LAM RESEARCH CORPORATION
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU HYDROCARBON-BASED LAYER FOR NON-CONFORMAL PASSIVATION OF PA...
- Publication number 20230268192
- Publication date Aug 24, 2023
- LAM RESEARCH CORPORATION
- Eric HUDSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STABILIZATION OF CARBON DEPOSITION PRECURSORS LIKE C2H2
- Publication number 20230167545
- Publication date Jun 1, 2023
- LAM RESEARCH CORPORATION
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH MODULUS BORON-BASED CERAMICS FOR SEMICONDUCTOR APPLICATIONS
- Publication number 20230112746
- Publication date Apr 13, 2023
- LAM RESEARCH CORPORATION
- Ananda K. BANERJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK ENCAPSULATION TO PREVENT DEGRADATION DURING FABRICATION OF HIG...
- Publication number 20220406610
- Publication date Dec 22, 2022
- LAM RESEARCH CORPORATION
- Kapu Sirish REDDY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON BASED DEPOSITIONS USED FOR CRITICAL DIMENSION CONTROL DURING...
- Publication number 20220199417
- Publication date Jun 23, 2022
- LAM RESEARCH CORPORATION
- Jon HENRI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING
- Publication number 20210358753
- Publication date Nov 18, 2021
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF ALUMINUM OXIDE ETCH STOP LAYERS
- Publication number 20200251384
- Publication date Aug 6, 2020
- LAM RESEARCH CORPORATION
- Meliha Gozde Rainville
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING
- Publication number 20200168466
- Publication date May 28, 2020
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET
- Publication number 20200118809
- Publication date Apr 16, 2020
- LAM RESEARCH CORPORATION
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...
- Publication number 20200063261
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-TREATMENT METHOD TO IMPROVE SELECTIVITY IN A SELECTIVE DEPOSITI...
- Publication number 20200043776
- Publication date Feb 6, 2020
- LAM RESEARCH CORPORATION
- Dennis HAUSMANN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...
- Publication number 20190352777
- Publication date Nov 21, 2019
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING
- Publication number 20190341256
- Publication date Nov 7, 2019
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE DIELECTRIC INTERFACE LAYERS FOR INTERCONNECT STRUCTURES
- Publication number 20180342389
- Publication date Nov 29, 2018
- LAM RESEARCH CORPORATION
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET
- Publication number 20180308680
- Publication date Oct 25, 2018
- LAM RESEARCH CORPORATION
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF ALUMINUM OXIDE ETCH STOP LAYERS
- Publication number 20180197770
- Publication date Jul 12, 2018
- LAM RESEARCH CORPORATION
- Meliha Gozde Rainville
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE DIELECTRIC INTERFACE LAYERS FOR INTERCONNECT STRUCTURES
- Publication number 20180096886
- Publication date Apr 5, 2018
- LAM RESEARCH CORPORATION
- Kapu Sirish Reddy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDIZING TREATMENT OF ALUMINUM NITRIDE FILMS IN SEMICONDUCTOR DEVI...
- Publication number 20170309514
- Publication date Oct 26, 2017
- LAM RESEARCH CORPORATION
- Meliha Gozde Rainville
- H01 - BASIC ELECTRIC ELEMENTS

Kapu Sirish Reddy

Person

Patents Grantslast 30 patents

Selective deposition of etch-stop layer for enhanced patterning

Selective deposition of etch-stop layer for enhanced patterning

Selective deposition with atomic layer etch reset

Deposition of aluminum oxide etch stop layers

Showerhead with air-gapped plenums and overhead isolation gas distr...

Deposition of Aluminum oxide etch stop layers

Oxidizing treatment of aluminum nitride films in semiconductor devi...

Pre-treatment method to improve selectivity in a selective depositi...

Selective deposition of etch-stop layer for enhanced patterning

Selective deposition with atomic layer etch reset

Showerhead with air-gapped plenums and overhead isolation gas distr...

Composite dielectric interface layers for interconnect structures

Composite dielectric interface layers for interconnect structures

Deposition of aluminum oxide etch stop layers

Low temperature formation of high quality silicon oxide films in se...

Patents Applicationslast 30 patents

THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS

IMAGE ANALYSIS OF PLASMA CONDITIONS

HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN CARBON HARDMASKS IN...

ROBUST ASHABLE HARD MASK

DEPOSITION RATE ENHANCEMENT OF AMORPHOUS CARBON HARD MASK FILM BY P...

IN-SITU HYDROCARBON-BASED LAYER FOR NON-CONFORMAL PASSIVATION OF PA...

STABILIZATION OF CARBON DEPOSITION PRECURSORS LIKE C2H2

HIGH MODULUS BORON-BASED CERAMICS FOR SEMICONDUCTOR APPLICATIONS

MASK ENCAPSULATION TO PREVENT DEGRADATION DURING FABRICATION OF HIG...

CARBON BASED DEPOSITIONS USED FOR CRITICAL DIMENSION CONTROL DURING...

SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING

DEPOSITION OF ALUMINUM OXIDE ETCH STOP LAYERS

SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING

SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET

SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...

PRE-TREATMENT METHOD TO IMPROVE SELECTIVITY IN A SELECTIVE DEPOSITI...

SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...

SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING

COMPOSITE DIELECTRIC INTERFACE LAYERS FOR INTERCONNECT STRUCTURES

SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET

DEPOSITION OF ALUMINUM OXIDE ETCH STOP LAYERS

COMPOSITE DIELECTRIC INTERFACE LAYERS FOR INTERCONNECT STRUCTURES

OXIDIZING TREATMENT OF ALUMINUM NITRIDE FILMS IN SEMICONDUCTOR DEVI...