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Katsuhiko Mitani
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Kodaira, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
6,902,683
Issue date
Jun 7, 2005
Hitachi, Ltd.
Tetsunori Kaji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing system and plasma processing method
Patent number
6,245,190
Issue date
Jun 12, 2001
Hitachi, Ltd.
Toshio Masuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
6,197,151
Issue date
Mar 6, 2001
Hitachi, Ltd.
Tetsunori Kaji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
6,129,806
Issue date
Oct 10, 2000
Hitachi, Ltd.
Tetsunori Kaji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device
Patent number
5,668,402
Issue date
Sep 16, 1997
Hitachi, Ltd.
Kazuhiro Mochizuki
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Dry etching method
Patent number
5,401,357
Issue date
Mar 28, 1995
Hitachi, Ltd.
Hidekazu Okuhira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having a heterojunction and a two dimensional...
Patent number
5,381,027
Issue date
Jan 10, 1995
Hitachi, Ltd.
Toshiyuki Usagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hetero junction bipolar transistor with improved electrode wiring c...
Patent number
5,296,733
Issue date
Mar 22, 1994
Hitachi, Ltd.
Chushiroh Kusano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having a two-dimensional electron gas as an ac...
Patent number
5,258,631
Issue date
Nov 2, 1993
Hitachi, Ltd.
Toshiyuki Usagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a heterojunction bipolar transistor
Patent number
5,019,524
Issue date
May 28, 1991
Hitachi, Ltd.
Katsuhiko Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating semiconductor device using an Sb protection l...
Patent number
5,017,517
Issue date
May 21, 1991
Hitachi, Ltd.
Kazuhiro Mochizuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for fabricating heterojunction bipolar transistors
Patent number
4,983,532
Issue date
Jan 8, 1991
Hitachi, Ltd.
Katsuhiko Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heterojunction bipolar transistor
Patent number
4,979,009
Issue date
Dec 18, 1990
Hitachi, Ltd.
Chushiro Kusano
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Plasma processing apparatus and plasma processing method
Publication number
20060144518
Publication date
Jul 6, 2006
Tetsunori Kaji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus
Publication number
20050082006
Publication date
Apr 21, 2005
Tetsunori Kaji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus
Publication number
20040178180
Publication date
Sep 16, 2004
Tetsunori Kaji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and plasma processing method
Publication number
20020069971
Publication date
Jun 13, 2002
Tetsunori Kaji
H01 - BASIC ELECTRIC ELEMENTS