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Katsuhisa Yuda
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Minato-ku, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum processing apparatus
Patent number
7,981,216
Issue date
Jul 19, 2011
Canon Anelva Corporation
Keiji Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Remote plasma apparatus for processing substrate with two types of...
Patent number
7,709,063
Issue date
May 4, 2010
NEC Corporation
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for manufacturing a thin-film transistor
Patent number
7,585,708
Issue date
Sep 8, 2009
NEC Corporation
Yoshinobu Satou
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Remote plasma apparatus for processing substrate with two types of...
Patent number
7,392,759
Issue date
Jul 1, 2008
NEC Corporation
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin film transistor formed on a transparent substrate
Patent number
7,119,363
Issue date
Oct 10, 2006
NEC Corporation
Yoshinobu Satou
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of forming silicon oxide film and forming apparatus thereof
Patent number
7,067,436
Issue date
Jun 27, 2006
NEC Corp.
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Remote plasma apparatus for processing substrate with two types of...
Patent number
6,851,384
Issue date
Feb 8, 2005
NEC Corporation
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silicon oxide film, method of forming the silicon oxide film, and a...
Patent number
6,830,786
Issue date
Dec 14, 2004
NEC Corporation
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin film transistor formed on a transparent substrate
Patent number
6,822,263
Issue date
Nov 23, 2004
NEC Corporation
Yoshinobu Satou
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Plasma CVD apparatus for large area CVD film
Patent number
6,779,483
Issue date
Aug 24, 2004
NEC Corporation
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing thin film transistor
Patent number
6,703,267
Issue date
Mar 9, 2004
NEC Corporation
Hiroshi Tanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma CVD apparatus for large area CVD film
Patent number
6,663,715
Issue date
Dec 16, 2003
NEC Corporation
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition method
Patent number
6,537,911
Issue date
Mar 25, 2003
Anelva Corporation
Sang-Tae Ko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing thin film transistor
Patent number
6,444,508
Issue date
Sep 3, 2002
NEC Corporation
Hiroshi Tanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon oxide film, method of forming the silicon oxide film, and a...
Patent number
6,444,327
Issue date
Sep 3, 2002
NEC Corporation
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing a silicon oxide film
Patent number
6,436,487
Issue date
Aug 20, 2002
Anelva Corporation
Manabu Ikemoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silicon oxide film, method of forming the silicon oxide film, and a...
Patent number
6,383,299
Issue date
May 7, 2002
NEC Corporation
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin film transistor with reduced hydrogen passivation process time
Patent number
6,281,053
Issue date
Aug 28, 2001
NEC Corporation
Katsuhisa Yuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing thin film transistor
Patent number
6,258,638
Issue date
Jul 10, 2001
NEC Corporation
Hiroshi Tanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film transistor with reduced hydrogen passivation process time
Patent number
6,118,139
Issue date
Sep 12, 2000
NEC Corporation
Katsuhisa Yuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film transistor
Patent number
5,998,838
Issue date
Dec 7, 1999
NEC Corporation
Hiroshi Tanabe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
REMOTE PLASMA APPARATUS FOR PROCESSING SUBSTRATE WITH TWO TYPES OF...
Publication number
20100170442
Publication date
Jul 8, 2010
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Thin Film Formation
Publication number
20090202721
Publication date
Aug 13, 2009
Hiroshi Nogami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CVD system and substrate cleaning method
Publication number
20080305275
Publication date
Dec 11, 2008
Canon ANELVA Corporation
Kazuo Ichikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CVD system and substrate cleaning method
Publication number
20080044589
Publication date
Feb 21, 2008
ANELVA CORPORATION
Kazuo Ichikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REMOTE PLASMA APPARATUS FOR PROCESSING SUBSTRATE WITH TWO TYPES OF...
Publication number
20070110918
Publication date
May 17, 2007
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for manufacturing a thin-film transistor
Publication number
20070045624
Publication date
Mar 1, 2007
Yoshinobu Satou
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Vacuum Processing Apparatus
Publication number
20050217576
Publication date
Oct 6, 2005
ANELVA CORPORATION
Keiji Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Remote plasma apparatus for processing substrate with two types of...
Publication number
20050087140
Publication date
Apr 28, 2005
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Thin film transistor formed on a transparent substrate
Publication number
20050012098
Publication date
Jan 20, 2005
Yoshinobu Satou
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method of forming silicon oxide film and forming apparatus thereof
Publication number
20040198071
Publication date
Oct 7, 2004
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma CVD apparatus for large area CVD film
Publication number
20040083967
Publication date
May 6, 2004
NEC Corporation
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Thin film transistor formed on a transparent substrate
Publication number
20030201440
Publication date
Oct 30, 2003
Yoshinobu Satou
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method of manufacturing thin film transistor
Publication number
20030013239
Publication date
Jan 16, 2003
NEC Corporation
Hiroshi Tanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Silicon oxide film, method of forming the silicon oxide film, and a...
Publication number
20020182343
Publication date
Dec 5, 2002
NEC Corporation
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Chemical vapor deposition method
Publication number
20020110998
Publication date
Aug 15, 2002
Sang-Tae Ko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for depositing a silicon oxide film
Publication number
20020090455
Publication date
Jul 11, 2002
ANELVA CORPORATION
Manabu Ikemoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of manufacturing thin film transistor
Publication number
20020072158
Publication date
Jun 13, 2002
Hiroshi Tanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming silicon oxide film and forming apparatus thereof
Publication number
20020006478
Publication date
Jan 17, 2002
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Remote plasma apparatus for processing sustrate with two types of g...
Publication number
20020000202
Publication date
Jan 3, 2002
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma CVD apparatus and plasma CVD method
Publication number
20010003014
Publication date
Jun 7, 2001
NEC Corporation
Katsuhisa Yuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...