Kazuhito Shigemori

Person

Kamikyo-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method for drying a substrate by discharging g...
- Patent number 10,134,610
- Issue date Nov 20, 2018
- Screen Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,687,886
- Issue date Jun 27, 2017
- SCREEN Holdings Co., Ltd.
- Tomohiro Goto
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 9,477,162
- Issue date Oct 25, 2016
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,059,221
- Issue date Jun 16, 2015
- SCREEN Holdings Co., Ltd.
- Tomohiro Goto
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus
- Patent number 8,932,672
- Issue date Jan 13, 2015
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,894,775
- Issue date Nov 25, 2014
- Screen Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,585,830
- Issue date Nov 19, 2013
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 8,540,824
- Issue date Sep 24, 2013
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,496,761
- Issue date Jul 30, 2013
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 8,356,424
- Issue date Jan 22, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Koji Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus with multi-speed drying having rinse...
- Patent number 8,218,124
- Issue date Jul 10, 2012
- Sokudo Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,040,488
- Issue date Oct 18, 2011
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 7,604,424
- Issue date Oct 20, 2009
- Sokudo Co., Ltd.
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,497,633
- Issue date Mar 3, 2009
- Sokudo Co., Ltd.
- Koji Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treating solution applying method
- Patent number 6,645,880
- Issue date Nov 11, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,558,053
- Issue date May 6, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20160203997
- Publication date Jul 14, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150217335
- Publication date Aug 6, 2015
- SCREEN Holdings Co., Ltd.
- Tomohiro GOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20150086923
- Publication date Mar 26, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140120477
- Publication date May 1, 2014
- Sokudo Co., Ltd.
- Shuichi Yasuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF...
- Publication number 20120037593
- Publication date Feb 16, 2012
- SOKUDO CO., LTD.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100285225
- Publication date Nov 11, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Koji Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100239986
- Publication date Sep 23, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100190116
- Publication date Jul 29, 2010
- SOKUDO CO., LTD.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100159142
- Publication date Jun 24, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100136492
- Publication date Jun 3, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100136257
- Publication date Jun 3, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100129526
- Publication date May 27, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100081097
- Publication date Apr 1, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100075054
- Publication date Mar 25, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Application
MULTI-SPEED SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING...
- Publication number 20090071940
- Publication date Mar 19, 2009
- SOKUDO CO., LTD.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20090074402
- Publication date Mar 19, 2009
- SOKUDO CO., LTD.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS WITH MULTI-SPEED DRYING
- Publication number 20090073394
- Publication date Mar 19, 2009
- SOKUDO CO., LTD.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for removal of films from peripheral portions of...
- Publication number 20080226830
- Publication date Sep 18, 2008
- SOKUDO CO., LTD.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20080053487
- Publication date Mar 6, 2008
- Tomohiro Goto
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20080016714
- Publication date Jan 24, 2008
- Koji Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070274711
- Publication date Nov 29, 2007
- Koji Kaneyama
- G02 - OPTICS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND SUB...
- Publication number 20070253710
- Publication date Nov 1, 2007
- Koji KANEYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20070190437
- Publication date Aug 16, 2007
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20070172234
- Publication date Jul 26, 2007
- Kazuhito Shigemori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND SUB...
- Publication number 20070147832
- Publication date Jun 28, 2007
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PERFORMING EXPOSURE PROCESS
- Publication number 20070147831
- Publication date Jun 28, 2007
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20070071439
- Publication date Mar 29, 2007
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus
- Publication number 20060291854
- Publication date Dec 28, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus
- Publication number 20060291855
- Publication date Dec 28, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhito Shigemori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus
- Publication number 20060159449
- Publication date Jul 20, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kazuhito Shigemori

Person

Patents Grantslast 30 patents

Substrate processing method for drying a substrate by discharging g...

Substrate processing apparatus

Substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus with multi-speed drying having rinse...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Treating solution applying method

Substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

MULTI-SPEED SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS WITH MULTI-SPEED DRYING

Method and system for removal of films from peripheral portions of...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND SUB...

SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND SUB...

SUBSTRATE PROCESSING APPARATUS FOR PERFORMING EXPOSURE PROCESS

SUBSTRATE PROCESSING APPARATUS

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus