-
-
-
-
-
-
Mask data design method
-
Patent number 6,243,855
-
Issue date Jun 5, 2001
-
Kabushiki Kaisha Toshiba
-
Sachiko Kobayashi
-
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
-
-
-
Optical proximity correction system
-
Patent number 6,077,310
-
Issue date Jun 20, 2000
-
Kabushiki Kaisha Toshiba
-
Kazuko Yamamoto
-
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
-
Mask pattern correction method
-
Patent number 6,060,368
-
Issue date May 9, 2000
-
Kabushiki Kaisha Toshiba
-
Koji Hashimoto
-
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
-
Pattern forming method
-
Patent number 6,040,114
-
Issue date Mar 21, 2000
-
Kabushiki Kaisha Toshiba
-
Soichi Inoue
-
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
-
-
Optical proximity correction method
-
Patent number 5,879,844
-
Issue date Mar 9, 1999
-
Kabushiki Kaisha Toshiba
-
Kazuko Yamamoto
-
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
-