Spie, vol. 2322, pp. 229-238, 1994, Lars W. Liebmann, et al., "Optical Proximity Correction, A First Look At Manufacturability". |
Jpn. J. Appl. Phys., vol. 34, pp. 6547-6551, 1995, Eiichi Kawamura, et al., "Simple Method of Correcting Optical Proximity Effect For 0.35 .mu.m Logic LSI Circuits". |
SPIE, vol. 2197, pp. 278-293, 1994, Oberdan W. Otto, et al., "Automated Optical Proximity Correction-A Rules-Based Approach". |
Spie, vol. 2197, pp. 361-370, 1994, Richard C. Henderson, et al., "Correcting for Proximity Effect Widens Process Latitude". |
SPIE, vol. 2240, pp. 261-269, 1995, Satomi Shioiri, et al., "Fast Optical Proximity Correction: Analytical Method". |