Number | Date | Country | Kind |
---|---|---|---|
9-033649 | Feb 1997 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5308741 | Kemp | May 1994 | |
5723233 | Garza | Mar 1998 | |
5879843 | Ueno | Mar 1999 |
Number | Date | Country |
---|---|---|
534463 | Mar 1993 | EPX |
58-200238 | Nov 1983 | JPX |
Entry |
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A. Starikov; Use of a Single Size Square Serif for Variable Print Bias Compensation in Microlithography: Method, Design and Practice; SPIE vol. 1088 Optical/ Laser Microlithography II (1989), pp. 34-46. |