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Kazunori Hasimoto
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Tachikawa, JP
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last 30 patents
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Patent Grant
Processing machine for electron beam lithography system
Patent number
D352910
Issue date
Nov 29, 1994
Hitachi, Ltd.
Takashi Yamamoto
D10 - Measuring, testing, or signalling instruments
Information
Patent Grant
Processing machine for electron beam lithography system
Patent number
D352911
Issue date
Nov 29, 1994
Hitachi, Ltd.
Takashi Yamamoto
D10 - Measuring, testing, or signalling instruments
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Patent Grant
Controller for semi-conductor processing machine
Patent number
D349888
Issue date
Aug 23, 1994
Hitachi, Ltd.
Takashi Yamamoto
D13 - Equipment for production, distribution, or transformation of energy