Kazuo Ushida

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus
- Patent number RE39662
- Issue date May 29, 2007
- Nikon Corporation
- Kazuo Ushida
- 355 - Photocopying
Information Patent Grant
Projection exposure apparatus and method with adjustment of rotatio...
- Patent number 6,958,803
- Issue date Oct 25, 2005
- Nikon Corporation
- Toshihiro Sasaya
- F21 - LIGHTING
Information Patent Grant
Apparatus for preforming measurement of a dimension of a test mark...
- Patent number 6,750,952
- Issue date Jun 15, 2004
- Nikon Precision, Inc.
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system and projection exposure apparatus
- Patent number RE38403
- Issue date Jan 27, 2004
- Nikon Corporation
- Toshihiro Sasaya
- 359 - Optical: systems and elements
Information Patent Grant
Projection exposure apparatus wherein focusing of the apparatus is...
- Patent number RE38320
- Issue date Nov 18, 2003
- Nikon Corporation
- Kenji Nishi
- 355 - Photocopying
Information Patent Grant
Exposure method
- Patent number 6,610,460
- Issue date Aug 26, 2003
- Nikon Corporation
- Masaya Komatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for use of a critical dimensional test structure
- Patent number 6,449,031
- Issue date Sep 10, 2002
- Nikon Corporation
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing and using correction member to correct aber...
- Patent number 6,262,793
- Issue date Jul 17, 2001
- Nikon Corporation
- Toshihiro Sasaya
- G02 - OPTICS
Information Patent Grant
Method for forming a critical dimension test structure and its use
- Patent number 6,094,256
- Issue date Jul 25, 2000
- Nikon Precision Inc.
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination apparatus, a projection exposure apparatus having the...
- Patent number 6,049,374
- Issue date Apr 11, 2000
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system and projection exposure apparatus
- Patent number 5,943,172
- Issue date Aug 24, 1999
- Nikon Corporation
- Toshihiro Sasaya
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus wherein focusing of the apparatus is...
- Patent number 5,883,704
- Issue date Mar 16, 1999
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system and projection exposure apparatus
- Patent number 5,831,776
- Issue date Nov 3, 1998
- Nikon Corporation
- Toshihiro Sasaya
- G02 - OPTICS
Information Patent Grant
Projection optical system and projection exposure apparatus
- Patent number 5,805,344
- Issue date Sep 8, 1998
- Nikon Corporation
- Toshihiro Sasaya
- G02 - OPTICS
Information Patent Grant
Projection optical system and projection exposure apparatus using t...
- Patent number 5,754,340
- Issue date May 19, 1998
- Nikon Corporation
- Kazuo Ushida
- G02 - OPTICS
Information Patent Grant
Projection optical system and projection exposure apparatus using t...
- Patent number 5,636,000
- Issue date Jun 3, 1997
- Nikon Corporation
- Kazuo Ushida
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus
- Patent number 5,576,801
- Issue date Nov 19, 1996
- Nikon Corporation
- Kazuo Ushida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 5,530,518
- Issue date Jun 25, 1996
- Nikon Corporation
- Kazuo Ushida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 5,311,362
- Issue date May 10, 1994
- Nikon Corporation
- Koichi Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 4,965,630
- Issue date Oct 23, 1990
- Nikon Corporation
- Kinya Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 4,931,830
- Issue date Jun 5, 1990
- Nikon Corporation
- Kyoichi Suwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and system for photolithography
- Patent number 4,734,746
- Issue date Mar 29, 1988
- Nippon Kogaku K.K.
- Kazuo Ushida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Objective lens for microscope of low magnification
- Patent number 4,592,624
- Issue date Jun 3, 1986
- Nippon Kogaku K.K.
- Kazuo Ushida
- G02 - OPTICS
Information Patent Grant
Objective lens for microscope
- Patent number 4,403,835
- Issue date Sep 13, 1983
- Nippon Kogaku K.K.
- Kazuo Ushida
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Projection exposure apparatus and method with adjustment of rotatio...
- Publication number 20040046950
- Publication date Mar 11, 2004
- Nikon Corporation
- Toshihiro Sasaya
- G02 - OPTICS
Information Patent Application
Apparatus for preforming measurement of a dimension of a test mark...
- Publication number 20020180948
- Publication date Dec 5, 2002
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method
- Publication number 20020177076
- Publication date Nov 28, 2002
- Nikon Corporation
- Masaya Komatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus
- Publication number 20020054282
- Publication date May 9, 2002
- NIKON CORPORATION
- Toshihiro Sasaya
- G02 - OPTICS

Kazuo Ushida

Person

Patents Grantslast 30 patents

Projection exposure apparatus

Projection exposure apparatus and method with adjustment of rotatio...

Apparatus for preforming measurement of a dimension of a test mark...

Projection optical system and projection exposure apparatus

Projection exposure apparatus wherein focusing of the apparatus is...

Exposure method

Method for use of a critical dimensional test structure

Method of manufacturing and using correction member to correct aber...

Method for forming a critical dimension test structure and its use

Illumination apparatus, a projection exposure apparatus having the...

Projection optical system and projection exposure apparatus

Projection exposure apparatus wherein focusing of the apparatus is...

Projection optical system and projection exposure apparatus

Projection optical system and projection exposure apparatus

Projection optical system and projection exposure apparatus using t...

Projection optical system and projection exposure apparatus using t...

Projection exposure apparatus

Projection exposure apparatus

Projection exposure apparatus

Projection exposure apparatus

Projection exposure apparatus

Exposure method and system for photolithography

Objective lens for microscope of low magnification

Objective lens for microscope

Patents Applicationslast 30 patents

Projection exposure apparatus and method with adjustment of rotatio...

Apparatus for preforming measurement of a dimension of a test mark...

Exposure method

Projection exposure apparatus