Kazuto Hirokawa

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Elastic membrane and substrate holding apparatus
- Patent number 11,472,001
- Issue date Oct 18, 2022
- Ebara Corporation
- Cheng Cheng
- B24 - GRINDING POLISHING
Information Patent Grant
Method for regenerating ion exchanger
- Patent number 8,133,380
- Issue date Mar 13, 2012
- Ebara Corporation
- Takayuki Saito
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,002,607
- Issue date Aug 23, 2011
- Ebara Corporation
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 7,976,358
- Issue date Jul 12, 2011
- Ebara Corporation
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 7,967,660
- Issue date Jun 28, 2011
- Ebara Corporation
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Grant
Electrolytic processing method
- Patent number 7,578,920
- Issue date Aug 25, 2009
- Ebara Corporation
- Ikutaro Noji
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate polishing apparatus
- Patent number 7,547,242
- Issue date Jun 16, 2009
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus
- Patent number 7,507,144
- Issue date Mar 24, 2009
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Electrolytic processing apparatus and electrolytic processing method
- Patent number 7,476,303
- Issue date Jan 13, 2009
- Ebara Corporation
- Hozumi Yasuda
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and device for regenerating ion exchanger, and electrolytic...
- Patent number 7,427,345
- Issue date Sep 23, 2008
- Ebara Corporation
- Takayuki Saito
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,361,076
- Issue date Apr 22, 2008
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,234,999
- Issue date Jun 26, 2007
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus
- Patent number 7,214,122
- Issue date May 8, 2007
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,150,673
- Issue date Dec 19, 2006
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus
- Patent number 7,101,257
- Issue date Sep 5, 2006
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method using an abrading plate
- Patent number 6,942,548
- Issue date Sep 13, 2005
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and dressing method for polishing tool
- Patent number 6,899,592
- Issue date May 31, 2005
- Ebara Corporation
- Shunichiro Kojima
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing tool and polishing apparatus
- Patent number 6,866,565
- Issue date Mar 15, 2005
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing-product discharging device and polishing device
- Patent number 6,712,678
- Issue date Mar 30, 2004
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and dressing method
- Patent number 6,672,945
- Issue date Jan 6, 2004
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 6,626,739
- Issue date Sep 30, 2003
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING
Information Patent Grant
Method for polishing workpieces using fixed abrasives
- Patent number 6,595,831
- Issue date Jul 22, 2003
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,579,148
- Issue date Jun 17, 2003
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,520,845
- Issue date Feb 18, 2003
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,458,012
- Issue date Oct 1, 2002
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Abrading plate and polishing method using the same
- Patent number 6,413,149
- Issue date Jul 2, 2002
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,413,155
- Issue date Jul 2, 2002
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,402,588
- Issue date Jun 11, 2002
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,398,626
- Issue date Jun 4, 2002
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,390,901
- Issue date May 21, 2002
- Ebara Corporation
- Hirokuni Hiyama
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
ELASTIC MEMBRANE AND SUBSTRATE HOLDING APPARATUS
- Publication number 20210060725
- Publication date Mar 4, 2021
- EBARA CORPORATION
- Cheng Cheng
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20110014851
- Publication date Jan 20, 2011
- Akira FUKUDA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20100076588
- Publication date Mar 25, 2010
- Akira FUKUDA
- B24 - GRINDING POLISHING
Information Patent Application
Polishing Apparatus and Polishing Method
- Publication number 20090239446
- Publication date Sep 24, 2009
- EBARA CORPORATION
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Application
Method and device for regenerating ion exchanger, and electrolytic...
- Publication number 20080314763
- Publication date Dec 25, 2008
- Takayuki Saito
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electrolytic Processing Apparatus
- Publication number 20080217164
- Publication date Sep 11, 2008
- Yasushi Toma
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrolytic Processing Apparatus and Electrolytic Processing Method
- Publication number 20070272562
- Publication date Nov 29, 2007
- Ikutaro Noji
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Polishing Apparatus and Polishing Method
- Publication number 20070254558
- Publication date Nov 1, 2007
- Masako Kodera
- B24 - GRINDING POLISHING
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20070224916
- Publication date Sep 27, 2007
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20070205112
- Publication date Sep 6, 2007
- Masako Kodera
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrolytic processing apparatus and electrolytic processing method
- Publication number 20070187257
- Publication date Aug 16, 2007
- EBARA CORPORATION
- Ikutaro Noji
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate polishing apparatus
- Publication number 20070173177
- Publication date Jul 26, 2007
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Electrolytic processing apparatus and electrolytic processing method
- Publication number 20070095659
- Publication date May 3, 2007
- Hozumi Yasuda
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20070061036
- Publication date Mar 15, 2007
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing apparatus
- Publication number 20070042679
- Publication date Feb 22, 2007
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20070020918
- Publication date Jan 25, 2007
- EBARA CORPORATION
- Kazuto Hirokawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Polishing apparatus
- Publication number 20070004324
- Publication date Jan 4, 2007
- Masayoshi Hirose
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing apparatus
- Publication number 20060105679
- Publication date May 18, 2006
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20060009127
- Publication date Jan 12, 2006
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Electrolytic processing apparatus and electrolytic processing method
- Publication number 20050067289
- Publication date Mar 31, 2005
- Ikutaro Noji
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electrolytic processing apparatus and electrolytic processing method
- Publication number 20050035001
- Publication date Feb 17, 2005
- Hozumi Yasuda
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Polishing apparatus
- Publication number 20050009456
- Publication date Jan 13, 2005
- Tatsuya Sasaki
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing apparatus
- Publication number 20040242121
- Publication date Dec 2, 2004
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing apparatus
- Publication number 20040235393
- Publication date Nov 25, 2004
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Method and device for regenerating ion exchanger, and electrolytic...
- Publication number 20040112761
- Publication date Jun 17, 2004
- Takayuki Saito
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Polishing method and apparatus
- Publication number 20040087248
- Publication date May 6, 2004
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing tool
- Publication number 20040033771
- Publication date Feb 19, 2004
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing tool and polishing apparatus
- Publication number 20030143931
- Publication date Jul 31, 2003
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and dressing method
- Publication number 20030100246
- Publication date May 29, 2003
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20020151259
- Publication date Oct 17, 2002
- Kazuto Hirokawa
- B24 - GRINDING POLISHING

Kazuto Hirokawa

Person

Patents Grantslast 30 patents

Elastic membrane and substrate holding apparatus

Method for regenerating ion exchanger

Polishing apparatus and polishing method

Polishing apparatus and polishing method

Polishing apparatus and polishing method

Electrolytic processing method

Substrate polishing apparatus

Substrate polishing apparatus

Electrolytic processing apparatus and electrolytic processing method

Method and device for regenerating ion exchanger, and electrolytic...

Method for estimating polishing profile or polishing amount, polish...

Method for estimating polishing profile or polishing amount, polish...

Substrate polishing apparatus

Method for estimating polishing profile or polishing amount, polish...

Substrate polishing apparatus

Polishing method using an abrading plate

Polishing apparatus and dressing method for polishing tool

Polishing tool and polishing apparatus

Polishing-product discharging device and polishing device

Polishing apparatus and dressing method

Polishing method and polishing apparatus

Method for polishing workpieces using fixed abrasives

Polishing apparatus

Polishing apparatus

Polishing apparatus

Abrading plate and polishing method using the same

Polishing apparatus

Polishing apparatus

Polishing apparatus

Polishing apparatus

Patents Applicationslast 30 patents

ELASTIC MEMBRANE AND SUBSTRATE HOLDING APPARATUS

POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS AND POLISHING METHOD

Polishing Apparatus and Polishing Method

Method and device for regenerating ion exchanger, and electrolytic...

Electrolytic Processing Apparatus

Electrolytic Processing Apparatus and Electrolytic Processing Method

Polishing Apparatus and Polishing Method

Method for estimating polishing profile or polishing amount, polish...

Polishing apparatus and polishing method

Electrolytic processing apparatus and electrolytic processing method

Substrate polishing apparatus

Electrolytic processing apparatus and electrolytic processing method

Method for estimating polishing profile or polishing amount, polish...

Substrate polishing apparatus

Substrate processing method and substrate processing apparatus

Polishing apparatus

Substrate polishing apparatus

Method for estimating polishing profile or polishing amount, polish...

Electrolytic processing apparatus and electrolytic processing method

Electrolytic processing apparatus and electrolytic processing method

Polishing apparatus

Substrate polishing apparatus

Substrate polishing apparatus

Method and device for regenerating ion exchanger, and electrolytic...

Polishing method and apparatus

Polishing tool

Polishing tool and polishing apparatus

Polishing apparatus and dressing method

Polishing apparatus