Ken L. Yang

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Bellevue, WA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of making dimple structure for prevention of MEMS device sti...
- Patent number 7,482,192
- Issue date Jan 27, 2009
- Honeywell International Inc.
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for uniform multi-plane silicon oxide layer forma...
- Patent number 7,442,589
- Issue date Oct 28, 2008
- Honeywell International Inc.
- Lianzhong Yu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MAKING DIMPLE STRUCTURE FOR PREVENTION OF MEMS DEVICE STI...
- Publication number 20070269920
- Publication date Nov 22, 2007
- Honeywell International Inc.
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR UNIFORM MULTI-PLANE SILICON OXIDE LAYER FORMA...
- Publication number 20070167027
- Publication date Jul 19, 2007
- Honeywell International Inc.
- Lianzhong Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods for direct silicon epitaxy thickness measuring
- Publication number 20070004056
- Publication date Jan 4, 2007
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY