Kenichiro ARAI

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,997,378
- Issue date Jun 12, 2018
- SCREEN Holdings Co., Ltd.
- Hirofumi Masuhara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,640,382
- Issue date May 2, 2017
- SCREEN Holdings Co., Ltd.
- Hirofumi Masuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,576,808
- Issue date Feb 21, 2017
- SCREEN Holdings Co., Ltd.
- Hirofumi Masuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method
- Patent number 9,401,283
- Issue date Jul 26, 2016
- SCREEN Holdings Co., Ltd.
- Kenichiro Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electroless plating apparatus and electroless plating method
- Patent number 9,293,364
- Issue date Mar 22, 2016
- Ebara Corporation
- Hiroyuki Kanda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment apparatus, and substrate treatment method
- Patent number 9,099,504
- Issue date Aug 4, 2015
- SCREEN Holdings Co., Ltd.
- Kazunari Nada
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and method of removing particles
- Patent number 7,981,286
- Issue date Jul 19, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Ayumi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,841,788
- Issue date Nov 30, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Ayumi Higuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer treating apparatus
- Patent number 7,758,717
- Issue date Jul 20, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Koji Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 7,392,814
- Issue date Jul 1, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Koji Hasegawa
- B08 - CLEANING
Information Patent Grant
Substrate treating apparatus
- Patent number 7,160,416
- Issue date Jan 9, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Koji Hasegawa
- B08 - CLEANING
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 6,352,083
- Issue date Mar 5, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Hiroyuki Araki
- B08 - CLEANING
Information Patent Grant
Treating tank, and substrate treating apparatus having the treating...
- Patent number 6,199,568
- Issue date Mar 13, 2001
- Dainippon Screen Mfg. Co., Ltd.
- Kenichiro Arai
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170117163
- Publication date Apr 27, 2017
- SCREEN HOLDINGS CO., LTD.
- Hirofumi MASUHARA
- B08 - CLEANING
Information Patent Application
ELECTROLESS PLATING APPARATUS
- Publication number 20160160352
- Publication date Jun 9, 2016
- EBARA CORPORATION
- Hiroyuki KANDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160005592
- Publication date Jan 7, 2016
- SCREEN Holdings Co., Ltd.
- Hirofumi MASUHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD
- Publication number 20150325449
- Publication date Nov 12, 2015
- SCREEN Holdings Co., Ltd.
- Kenichiro ARAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140202496
- Publication date Jul 24, 2014
- Dainippon Screen Mfg., Co., Ltd.
- Masahiro MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130260570
- Publication date Oct 3, 2013
- DAINIPPON SCREEN MFG. CO., LTD.
- Hirofumi MASUHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130260574
- Publication date Oct 3, 2013
- DAINIPPON SCREEN MFG. CO., LTD.
- Hirofumi MASUHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROLESS PLATING APPARATUS AND ELECTROLESS PLATING METHOD
- Publication number 20130122704
- Publication date May 16, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Hiroyuki KANDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER THINNING METHOD IN WAFER TREATING SYSTEM
- Publication number 20110256728
- Publication date Oct 20, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Toshio HIROE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE TREATMENT METHOD
- Publication number 20090194509
- Publication date Aug 6, 2009
- Kazunari Nada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE SUPPORT TO BE USED FOR...
- Publication number 20090194234
- Publication date Aug 6, 2009
- Kenichiro Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20080083501
- Publication date Apr 10, 2008
- Kenichiro ARAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER THINNING APPARATUS AND WAFER TREATING SYSTEM
- Publication number 20070277861
- Publication date Dec 6, 2007
- Toshio Hiroe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method
- Publication number 20070235064
- Publication date Oct 11, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Koji Hasegawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070223916
- Publication date Sep 27, 2007
- Ayumi HIGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wafer treating apparatus
- Publication number 20060191635
- Publication date Aug 31, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Koji Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method
- Publication number 20060137719
- Publication date Jun 29, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Koji Hasegawa
- B08 - CLEANING
Information Patent Application
Wafer treating apparatus and method
- Publication number 20060087007
- Publication date Apr 27, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Kenichiro Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method of removing particles
- Publication number 20060054191
- Publication date Mar 16, 2006
- DAINIPPON SCREEN MFG., CO., LTD.
- Ayumi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating apparatus
- Publication number 20060024213
- Publication date Feb 2, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Kenichiro Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating apparatus
- Publication number 20050217793
- Publication date Oct 6, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Koji Hasegawa
- B08 - CLEANING

Kenichiro ARAI

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate treatment method

Electroless plating apparatus and electroless plating method

Substrate treatment apparatus, and substrate treatment method

Substrate processing apparatus and method of removing particles

Substrate processing apparatus and substrate processing method

Wafer treating apparatus

Substrate processing apparatus and method

Substrate treating apparatus

Substrate treating apparatus and substrate treating method

Treating tank, and substrate treating apparatus having the treating...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ELECTROLESS PLATING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ELECTROLESS PLATING APPARATUS AND ELECTROLESS PLATING METHOD

WAFER THINNING METHOD IN WAFER TREATING SYSTEM

SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE TREATMENT METHOD

SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE SUPPORT TO BE USED FOR...

SUBSTRATE PROCESSING APPARATUS

WAFER THINNING APPARATUS AND WAFER TREATING SYSTEM

Substrate processing apparatus and method

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Wafer treating apparatus

Substrate processing apparatus and method

Wafer treating apparatus and method

Substrate processing apparatus and method of removing particles

Substrate treating apparatus

Substrate treating apparatus