Kenji Shinkai

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate polishing apparatus
- Patent number 11,472,002
- Issue date Oct 18, 2022
- Ebara Corporation
- Hiroyuki Shinozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,688,622
- Issue date Jun 23, 2020
- Ebara Corporation
- Hiroshi Aono
- B08 - CLEANING
Information Patent Grant
Substrate polishing apparatus
- Patent number 10,576,604
- Issue date Mar 3, 2020
- Ebara Corporation
- Hiroyuki Shinozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus and substrate processing apparatus
- Patent number 10,573,509
- Issue date Feb 25, 2020
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cover for component of polishing apparatus, component of polishing...
- Patent number 9,724,798
- Issue date Aug 8, 2017
- Ebara Corporation
- Kenji Shinkai
- B24 - GRINDING POLISHING
Information Patent Grant
Lifting device, substrate processing apparatus having lifting devic...
- Patent number 9,666,469
- Issue date May 30, 2017
- Ebara Corporation
- Hiroyuki Shinozaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE POLISHING APPARATUS
- Publication number 20200198093
- Publication date Jun 25, 2020
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190299360
- Publication date Oct 3, 2019
- EBARA CORPORATION
- Tadakazu SONE
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HAND SHOWER GUN
- Publication number 20180304320
- Publication date Oct 25, 2018
- EBARA CORPORATION
- Hiroshi Aono
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180001440
- Publication date Jan 4, 2018
- EBARA CORPORATION
- Hiroshi AONO
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170372893
- Publication date Dec 28, 2017
- EBARA CORPORATION
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER FOR COMPONENT OF POLISHING APPARATUS, COMPONENT OF POLISHING...
- Publication number 20170008144
- Publication date Jan 12, 2017
- Kenji SHINKAI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HAND SHOWER GUN
- Publication number 20160256900
- Publication date Sep 8, 2016
- EBARA CORPORATION
- Hiroshi Aono
- B08 - CLEANING
Information Patent Application
SUBSTRATE POLISHING APPARATUS
- Publication number 20150314418
- Publication date Nov 5, 2015
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS
- Publication number 20150273659
- Publication date Oct 1, 2015
- EBARA CORPORATION
- Hiroshi Aono
- B08 - CLEANING
Information Patent Application
LIFTING DEVICE, SUBSTRATE PROCESSING APPARATUS HAVING LIFTING DEVIC...
- Publication number 20150082613
- Publication date Mar 26, 2015
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Kenji Shinkai

Person

Patents Grantslast 30 patents

Substrate polishing apparatus

Substrate processing apparatus

Substrate polishing apparatus

Cleaning apparatus and substrate processing apparatus

Cover for component of polishing apparatus, component of polishing...

Lifting device, substrate processing apparatus having lifting devic...

Patents Applicationslast 30 patents

SUBSTRATE POLISHING APPARATUS

POLISHING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND HAND SHOWER GUN

SUBSTRATE PROCESSING APPARATUS

CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

COVER FOR COMPONENT OF POLISHING APPARATUS, COMPONENT OF POLISHING...

SUBSTRATE PROCESSING APPARATUS AND HAND SHOWER GUN

SUBSTRATE POLISHING APPARATUS

SUBSTRATE POLISHING APPARATUS

LIFTING DEVICE, SUBSTRATE PROCESSING APPARATUS HAVING LIFTING DEVIC...