Kentaro Oshimo

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing method
- Patent number 11,414,753
- Issue date Aug 16, 2022
- Tokyo Electron Limited
- Hideomi Hane
- B08 - CLEANING
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,201,053
- Issue date Dec 14, 2021
- Tokyo Electron Limited
- Noriaki Fukiage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,171,014
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Hideomi Hane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and apparatus of manuf...
- Patent number 10,900,121
- Issue date Jan 26, 2021
- Tokyo Electron Limited
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 10,714,332
- Issue date Jul 14, 2020
- Tokyo Electron Limited
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and operation method of film forming apparatus
- Patent number 10,550,470
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and storage medium
- Patent number 10,438,791
- Issue date Oct 8, 2019
- Tokyo Electron Limited
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing a substrate and substrate processing apparatus
- Patent number 10,151,031
- Issue date Dec 11, 2018
- Tokyo Electron Limited
- Hitoshi Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing a film, recording medium, and film deposition...
- Patent number 9,777,369
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing a substrate and substrate processing apparatus
- Patent number 9,714,467
- Issue date Jul 25, 2017
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and film deposition apparatus
- Patent number 9,136,156
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Tadashi Enomoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing film
- Patent number 9,136,133
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Kentaro Oshimo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing a film
- Patent number 8,921,237
- Issue date Dec 30, 2014
- Tokyo Electron Limited
- Kentaro Oshimo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing device using shower head structure and processing method
- Patent number 7,615,251
- Issue date Nov 10, 2009
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming a film on an object to be processed
- Patent number 6,454,909
- Issue date Sep 24, 2002
- Tokyo Electron Limited
- Kimihiro Matsuse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE REMOVAL METHOD
- Publication number 20230193464
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Akihiro KURIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD
- Publication number 20210130950
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20200294787
- Publication date Sep 17, 2020
- TOKYO ELECTRON LIMITED
- Noriaki FUKIAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20190292662
- Publication date Sep 26, 2019
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND OPERATION METHOD OF FILM FORMING APPARATUS
- Publication number 20190127849
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method, Film Forming Apparatus, and Storage Medium
- Publication number 20180366315
- Publication date Dec 20, 2018
- TOKYO ELECTRON LIMITED
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180358235
- Publication date Dec 13, 2018
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20180237914
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION PROCESSING METHOD AND FILM FORMATION PROCESING APPAR...
- Publication number 20180142350
- Publication date May 24, 2018
- TOKYO ELECTRON LIMITED
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method and Film Forming Apparatus
- Publication number 20170271143
- Publication date Sep 21, 2017
- TOKYO ELECTRON LIMITED
- Noriaki FUKIAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170268104
- Publication date Sep 21, 2017
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150225849
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING FILM
- Publication number 20150011087
- Publication date Jan 8, 2015
- TOKYO ELECTRON LIMITED
- Kentaro OSHIMO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING A FILM, RECORDING MEDIUM, AND FILM DEPOSITION...
- Publication number 20150004332
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20140209028
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Kentaro OSHIMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A FILM
- Publication number 20140179104
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Kentaro Oshimo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD
- Publication number 20130164936
- Publication date Jun 27, 2013
- TOKYO ELECTRON LIMITED
- Kentaro OSHIMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND FILM DEPOSITION APPARATUS
- Publication number 20130061804
- Publication date Mar 14, 2013
- TOKYO ELECTRON LIMITED
- Tadashi ENOMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing device using shower head structure and processing method
- Publication number 20050223981
- Publication date Oct 13, 2005
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kentaro Oshimo

Person

Patents Grantslast 30 patents

Processing method

Film forming method and film forming apparatus

Substrate processing method and substrate processing apparatus

Method of manufacturing semiconductor device and apparatus of manuf...

Film forming method and film forming apparatus

Film forming apparatus and operation method of film forming apparatus

Film forming method, film forming apparatus, and storage medium

Method for processing a substrate and substrate processing apparatus

Method of depositing a film, recording medium, and film deposition...

Method for processing a substrate and substrate processing apparatus

Substrate processing apparatus and film deposition apparatus

Method of depositing film

Method of depositing a film

Processing device using shower head structure and processing method

Method and apparatus for forming a film on an object to be processed

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE REMOVAL METHOD

PROCESSING METHOD

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

FILM FORMING APPARATUS AND OPERATION METHOD OF FILM FORMING APPARATUS

Film Forming Method, Film Forming Apparatus, and Storage Medium

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM FORMING APPARATUS

FILM FORMATION PROCESSING METHOD AND FILM FORMATION PROCESING APPAR...

Film Forming Method and Film Forming Apparatus

METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

METHOD OF DEPOSITING FILM

METHOD OF DEPOSITING A FILM, RECORDING MEDIUM, AND FILM DEPOSITION...

FILM DEPOSITION APPARATUS

METHOD OF DEPOSITING A FILM

FILM DEPOSITION METHOD

SUBSTRATE PROCESSING APPARATUS AND FILM DEPOSITION APPARATUS

Processing device using shower head structure and processing method