Kevin M. McLaughlin

Person

Sherwood, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
UV cure for local stress modulation
- Patent number 12,300,489
- Issue date May 13, 2025
- Lam Research Corporation
- Anirvan Sircar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modulation of oxidation profile for substrate processing
- Patent number 12,087,573
- Issue date Sep 10, 2024
- Lam Research Corporation
- Gerald Joseph Brady
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film stack simplification for high aspect ratio patterning and vert...
- Patent number 12,080,592
- Issue date Sep 3, 2024
- Lam Research Corporation
- Hui-Jung Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of encapsulation
- Patent number 10,763,107
- Issue date Sep 1, 2020
- Lam Research Corporation
- Bart J. van Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of encapsulation
- Patent number 10,566,186
- Issue date Feb 18, 2020
- Lam Research Corporation
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clean resistant windows for ultraviolet thermal processing
- Patent number 10,240,236
- Issue date Mar 26, 2019
- Lam Research Corporation
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of encapsulation
- Patent number 10,157,736
- Issue date Dec 18, 2018
- Lam Research Corporation
- Bart J. van Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 9,873,946
- Issue date Jan 23, 2018
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature formation of high quality silicon oxide films in se...
- Patent number 9,847,221
- Issue date Dec 19, 2017
- Lam Research Corporation
- Kevin M. McLaughlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,980,769
- Issue date Mar 17, 2015
- Novellus Systems, Inc.
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carbon containing low-k dielectric constant recovery using UV treat...
- Patent number 8,465,991
- Issue date Jun 18, 2013
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ENHANCED EUV UNDERLAYER EFFECT WITH DIFFUSION BARRIER LAYER
- Publication number 20250068065
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- Sivananda Krishnan Kanakasabapathy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING
- Publication number 20240404822
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Gerald Joseph Brady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...
- Publication number 20240387258
- Publication date Nov 21, 2024
- LAM RESEARCH CORPORATION
- Hui-Jung Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RIB COVER FOR MULTI-STATION PROCESSING MODULES
- Publication number 20230323532
- Publication date Oct 12, 2023
- LAM RESEARCH CORPORATION
- Keith Joseph Martin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UV CURE FOR LOCAL STRESS MODULATION
- Publication number 20230038611
- Publication date Feb 9, 2023
- LAM RESEARCH CORPORATION
- Anirvan SIRCAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING
- Publication number 20230005740
- Publication date Jan 5, 2023
- LAM RESEARCH CORPORATION
- Gerald Joseph Brady
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...
- Publication number 20220051938
- Publication date Feb 17, 2022
- LAM RESEARCH CORPORATION
- Hui-Jung Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF ENCAPSULATION
- Publication number 20200152452
- Publication date May 14, 2020
- LAM RESEARCH CORPORATION
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF ENCAPSULATION
- Publication number 20190157078
- Publication date May 23, 2019
- Lam Research Corporation
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF ENCAPSULATION
- Publication number 20170323803
- Publication date Nov 9, 2017
- LAM RESEARCH CORPORATION
- Bart J. van Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING
- Publication number 20160258057
- Publication date Sep 8, 2016
- LAM RESEARCH CORPORATION
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS
- Publication number 20150114292
- Publication date Apr 30, 2015
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON CONTAINING LOW-K DIELECTRIC CONSTANT RECOVERY USING UV TREAT...
- Publication number 20110117678
- Publication date May 19, 2011
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS

Kevin M. McLaughlin

Person

Patents Grantslast 30 patents

UV cure for local stress modulation

Modulation of oxidation profile for substrate processing

Film stack simplification for high aspect ratio patterning and vert...

Methods of encapsulation

Methods of encapsulation

Clean resistant windows for ultraviolet thermal processing

Methods of encapsulation

Multi-station sequential curing of dielectric films

Low temperature formation of high quality silicon oxide films in se...

Multi-station sequential curing of dielectric films

Carbon containing low-k dielectric constant recovery using UV treat...

Patents Applicationslast 30 patents

ENHANCED EUV UNDERLAYER EFFECT WITH DIFFUSION BARRIER LAYER

MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING

FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...

RIB COVER FOR MULTI-STATION PROCESSING MODULES

UV CURE FOR LOCAL STRESS MODULATION

MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING

FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...

METHODS OF ENCAPSULATION

METHODS OF ENCAPSULATION

METHODS OF ENCAPSULATION

CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING

MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS

CARBON CONTAINING LOW-K DIELECTRIC CONSTANT RECOVERY USING UV TREAT...