Kim Vellore

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for non-contact low substrate temperature measurement
- Patent number 12,230,521
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Kim Ramkumar Vellore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz susceptor for accurate non-contact temperature measurement
- Patent number 12,134,835
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Kim Ramkumar Vellore
- C30 - CRYSTAL GROWTH
Information Patent Grant
Carrier FOUP and a method of placing a carrier
- Patent number 11,756,816
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Steven Trey Tindel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment module with a cleaning chamber
- Patent number 11,637,004
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for aligning a mask with a substrate
- Patent number 11,538,706
- Issue date Dec 27, 2022
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contactless latch and coupling for vacuum wafer transfer cassette
- Patent number 11,469,124
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Shreyas Patil Shanthaveeraswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system for forming layers
- Patent number 11,414,740
- Issue date Aug 16, 2022
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for electrostatically chucking a substrate to a c...
- Patent number 11,196,360
- Issue date Dec 7, 2021
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of pre aligning carrier, wafer and carrier-wafer combination...
- Patent number 11,183,411
- Issue date Nov 23, 2021
- APPLIED MATERIALS, INC.
- Kim Ramkumar Vellore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrier having hard mask
- Patent number 11,047,039
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Alexander Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of pre aligning carrier, wafer and carrier-wafer combination...
- Patent number 10,916,464
- Issue date Feb 9, 2021
- Applied Materials, Inc.
- Kim Ramkumar Vellore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Visual feedback for process control in RTP chambers
- Patent number 10,109,514
- Issue date Oct 23, 2018
- Applied Materials, Inc.
- Kim Vellore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method to detect substrate and/or substrate support misa...
- Patent number 9,959,610
- Issue date May 1, 2018
- Applied Materials, Inc.
- Leonid M. Tertitski
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process sheet resistance uniformity improvement using multiple melt...
- Patent number 9,953,851
- Issue date Apr 24, 2018
- Applied Materials, Inc.
- Jiping Li
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Visual feedback for process control in RTP chambers
- Patent number 9,735,034
- Issue date Aug 15, 2017
- Applied Materials, Inc.
- Kim Vellore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-substrate thermal management apparatus
- Patent number 9,696,097
- Issue date Jul 4, 2017
- Applied Materials, Inc.
- Kallol Bera
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Process sheet resistance uniformity improvement using multiple melt...
- Patent number 9,390,926
- Issue date Jul 12, 2016
- Applied Materials, Inc.
- Jiping Li
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and system for determining object height
- Patent number 7,567,885
- Issue date Jul 28, 2009
- Sokudo Co., Ltd.
- Harald Herchen
- G01 - MEASURING TESTING
Information Patent Grant
Temperature controlled chamber
- Patent number 6,598,559
- Issue date Jul 29, 2003
- Applied Materials, Inc.
- Kim Vellore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF ANALYZING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS,...
- Publication number 20250029850
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Kim Ramkumar VELLORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF ADJUSTING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS,...
- Publication number 20250027202
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ZONE LAMP HEATING FOR CHEMICAL VAPOR DEPOSITION
- Publication number 20230352322
- Publication date Nov 2, 2023
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUARTZ SUSCEPTOR FOR ACCURATE NON-CONTACT TEMPERATURE MEASUREMENT
- Publication number 20230066087
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Kim Ramkumar Vellore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRE ALIGNING CARRIER, WAFER AND CARRIER-WAFER COMBINATION...
- Publication number 20210159106
- Publication date May 27, 2021
- Applied Materials, Inc.
- Kim Ramkumar VELLORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRE ALIGNING CARRIER, WAFER AND CARRIER-WAFER COMBINATION...
- Publication number 20210028044
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Kim Ramkumar VELLORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for electrostatically chucking a substrate to a c...
- Publication number 20210028726
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Alexander N. LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER FOUP AND A METHOD OF PLACING A CARRIER
- Publication number 20210028039
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Steven Trey TINDEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM FOR FORMING LAYERS
- Publication number 20200385851
- Publication date Dec 10, 2020
- Applied Materials, Inc.
- Alexander N. LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR NON-CONTACT LOW SUBSTRATE TEMPERATURE MEASUREMENT
- Publication number 20200381278
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Kim Ramkumar VELLORE
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING A MASK WITH A SUBSTRATE
- Publication number 20200373183
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Alexander N. LERNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALIGNMENT MODULE WITH A CLEANING CHAMBER
- Publication number 20200373134
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Alexander N. LERNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTACTLESS LATCH AND COUPLING FOR VACUUM WAFER TRANSFER CASSETTE
- Publication number 20200286760
- Publication date Sep 10, 2020
- Applied Materials, Inc.
- Shreyas PATIL SHANTHAVEERASWAMY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER HAVING HARD MASK
- Publication number 20190211442
- Publication date Jul 11, 2019
- Applied Materials, Inc.
- ALEXANDER LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROPHOBIC ELECTROSTATIC CHUCK
- Publication number 20190115241
- Publication date Apr 18, 2019
- Kim VELLORE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CARRIER FOR DIE BONDING APPLICATIONS
- Publication number 20180374736
- Publication date Dec 27, 2018
- Applied Materials, Inc.
- Niranjan KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VISUAL FEEDBACK FOR PROCESS CONTROL IN RTP CHAMBERS
- Publication number 20170345693
- Publication date Nov 30, 2017
- Applied Materials, Inc.
- Kim VELLORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS SHEET RESISTANCE UNIFORMITY IMPROVEMENT USING MULTIPLE MELT...
- Publication number 20170040194
- Publication date Feb 9, 2017
- Applied Materials, Inc.
- Jiping LI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD TO DETECT SUBSTRATE AND/OR SUBSTRATE SUPPORT MISA...
- Publication number 20160125589
- Publication date May 5, 2016
- Applied Materials, Inc.
- Leonid M. TERTITSKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-SUBSTRATE THERMAL MANAGEMENT APPARATUS
- Publication number 20160033205
- Publication date Feb 4, 2016
- Applied Materials, Inc.
- KALLOL BERA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
LOW TEMPERATURE RTP CONTROL USING IR CAMERA
- Publication number 20150131698
- Publication date May 14, 2015
- Applied Materials, Inc.
- Kim VELLORE
- G01 - MEASURING TESTING
Information Patent Application
VISUAL FEEDBACK FOR PROCESS CONTROL IN RTP CHAMBERS
- Publication number 20150041453
- Publication date Feb 12, 2015
- Applied Materials, Inc.
- Kim VELLORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS SHEET RESISTANCE UNIFORMITY IMPROVEMENT USING MULTIPLE MELT...
- Publication number 20140256161
- Publication date Sep 11, 2014
- Jiping LI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus and Methods for Measuring Solar Cell Module Performance
- Publication number 20110140726
- Publication date Jun 16, 2011
- Applied Materials, Inc.
- Jeffrey S. Sullivan
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Solar Cell Module Having Buss Adhered With Conductive Adhesive
- Publication number 20100071752
- Publication date Mar 25, 2010
- Applied Materials, Inc.
- Kim Vellore
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
APPARATUS FOR SUPPORTING A SUBSTRATE DURING SEMICONDUCTOR PROCESSIN...
- Publication number 20090179366
- Publication date Jul 16, 2009
- Sokudo Co., Ltd.
- Harald Herchen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR PERFORMING ELECTROSTATIC CHUCK CLAMPING IN TR...
- Publication number 20090109595
- Publication date Apr 30, 2009
- Sokudo Co., Ltd.
- Harald Herchen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Determining Object Height
- Publication number 20090055124
- Publication date Feb 26, 2009
- SOKUDO CO., LTD.
- Harald Herchen
- G01 - MEASURING TESTING
Information Patent Application
INTERLACED RTD SENSOR FOR ZONE/AVERAGE TEMPERATURE SENSING
- Publication number 20080224817
- Publication date Sep 18, 2008
- Sokudo Co., Ltd.
- Kim R. Vellore
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR BAKE PLATE HEAT TRANSFER CONTROL IN TRACK LIT...
- Publication number 20080160462
- Publication date Jul 3, 2008
- SOKUDO CO., LTD.
- Harald Herchen
- H01 - BASIC ELECTRIC ELEMENTS

Kim Vellore

Person

Patents Grantslast 30 patents

Method for non-contact low substrate temperature measurement

Quartz susceptor for accurate non-contact temperature measurement

Carrier FOUP and a method of placing a carrier

Alignment module with a cleaning chamber

System and method for aligning a mask with a substrate

Contactless latch and coupling for vacuum wafer transfer cassette

Processing system for forming layers

System and method for electrostatically chucking a substrate to a c...

Method of pre aligning carrier, wafer and carrier-wafer combination...

Substrate carrier having hard mask

Method of pre aligning carrier, wafer and carrier-wafer combination...

Visual feedback for process control in RTP chambers

System and method to detect substrate and/or substrate support misa...

Process sheet resistance uniformity improvement using multiple melt...

Visual feedback for process control in RTP chambers

Multi-substrate thermal management apparatus

Process sheet resistance uniformity improvement using multiple melt...

Method and system for determining object height

Temperature controlled chamber

Patents Applicationslast 30 patents

METHODS OF ANALYZING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS,...

METHODS OF ADJUSTING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS,...

MULTI-ZONE LAMP HEATING FOR CHEMICAL VAPOR DEPOSITION

QUARTZ SUSCEPTOR FOR ACCURATE NON-CONTACT TEMPERATURE MEASUREMENT

METHOD OF PRE ALIGNING CARRIER, WAFER AND CARRIER-WAFER COMBINATION...

METHOD OF PRE ALIGNING CARRIER, WAFER AND CARRIER-WAFER COMBINATION...

System and method for electrostatically chucking a substrate to a c...

CARRIER FOUP AND A METHOD OF PLACING A CARRIER

PROCESSING SYSTEM FOR FORMING LAYERS

METHOD FOR NON-CONTACT LOW SUBSTRATE TEMPERATURE MEASUREMENT

SYSTEM AND METHOD FOR ALIGNING A MASK WITH A SUBSTRATE

ALIGNMENT MODULE WITH A CLEANING CHAMBER

CONTACTLESS LATCH AND COUPLING FOR VACUUM WAFER TRANSFER CASSETTE

SUBSTRATE CARRIER HAVING HARD MASK

HYDROPHOBIC ELECTROSTATIC CHUCK

ELECTROSTATIC CARRIER FOR DIE BONDING APPLICATIONS

VISUAL FEEDBACK FOR PROCESS CONTROL IN RTP CHAMBERS

PROCESS SHEET RESISTANCE UNIFORMITY IMPROVEMENT USING MULTIPLE MELT...

SYSTEM AND METHOD TO DETECT SUBSTRATE AND/OR SUBSTRATE SUPPORT MISA...

MULTI-SUBSTRATE THERMAL MANAGEMENT APPARATUS

LOW TEMPERATURE RTP CONTROL USING IR CAMERA

VISUAL FEEDBACK FOR PROCESS CONTROL IN RTP CHAMBERS

PROCESS SHEET RESISTANCE UNIFORMITY IMPROVEMENT USING MULTIPLE MELT...

Apparatus and Methods for Measuring Solar Cell Module Performance

Solar Cell Module Having Buss Adhered With Conductive Adhesive

APPARATUS FOR SUPPORTING A SUBSTRATE DURING SEMICONDUCTOR PROCESSIN...

METHOD AND SYSTEM FOR PERFORMING ELECTROSTATIC CHUCK CLAMPING IN TR...

Method and System for Determining Object Height

INTERLACED RTD SENSOR FOR ZONE/AVERAGE TEMPERATURE SENSING

METHOD AND SYSTEM FOR BAKE PLATE HEAT TRANSFER CONTROL IN TRACK LIT...