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Backside power rail integration
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Patent number 11,915,966
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Issue date Feb 27, 2024
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International Business Machines Corporation
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Ruilong Xie
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H01 - BASIC ELECTRIC ELEMENTS
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Top via with damascene line and via
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Patent number 11,894,265
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Issue date Feb 6, 2024
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International Business Machines Corporation
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Lawrence A. Clevenger
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H01 - BASIC ELECTRIC ELEMENTS
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Top via process with damascene metal
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Patent number 11,869,808
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Issue date Jan 9, 2024
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International Business Machines Corporation
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Lawrence A. Clevenger
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H01 - BASIC ELECTRIC ELEMENTS
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Top via stack
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Patent number 11,600,565
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Issue date Mar 7, 2023
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International Business Machines Corporation
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Brent Alan Anderson
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H01 - BASIC ELECTRIC ELEMENTS
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Self-aligned top via
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Patent number 11,315,872
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Issue date Apr 26, 2022
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International Business Machines Corporation
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Chanro Park
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H01 - BASIC ELECTRIC ELEMENTS
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