Koen Jacobus Johannes Maria ZAAL

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement system, lithographic apparatus and method for measuring...
- Patent number 7,903,866
- Issue date Mar 8, 2011
- ASML Netherlands B.V.
- Marc Wilhelmus Maria Van Der Wijst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, method of calibrating a lithographic appara...
- Patent number 7,804,582
- Issue date Sep 28, 2010
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and method of c...
- Patent number 7,746,447
- Issue date Jun 29, 2010
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,671,963
- Issue date Mar 2, 2010
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,649,611
- Issue date Jan 19, 2010
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,528,935
- Issue date May 5, 2009
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,492,440
- Issue date Feb 17, 2009
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,486,381
- Issue date Feb 3, 2009
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of calibrating a lithographic apparatus and device manufactu...
- Patent number 7,426,011
- Issue date Sep 16, 2008
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 7,423,725
- Issue date Sep 9, 2008
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,411,657
- Issue date Aug 12, 2008
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,327,437
- Issue date Feb 5, 2008
- ASML Netherlands B.V.
- Henrikus Herman Marie Cox
- G05 - CONTROLLING REGULATING
Information Patent Grant
Lithographic apparatus and method of a manufacturing device
- Patent number 7,327,438
- Issue date Feb 5, 2008
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,327,439
- Issue date Feb 5, 2008
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Using unflatness information of the substrate table or mask table f...
- Patent number 7,239,368
- Issue date Jul 3, 2007
- ASML Netherlands B.V.
- Rene Oesterholt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Movable carriage for a lithographic apparatus and device manufactur...
- Patent number 7,230,254
- Issue date Jun 12, 2007
- ASML Netherlands B.V.
- Martinus Arnoldus Henricus Terken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,227,619
- Issue date Jun 5, 2007
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electrostatic clamp assembly for a lithographic apparatus
- Patent number 7,187,433
- Issue date Mar 6, 2007
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,161,662
- Issue date Jan 9, 2007
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus, Lorentz actuator, and device manufacturing...
- Patent number 7,145,269
- Issue date Dec 5, 2006
- ASML Netherlands B.V.
- Sven Antoin Johan Hol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, article support member, and method
- Patent number 7,133,120
- Issue date Nov 7, 2006
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,119,885
- Issue date Oct 10, 2006
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,113,262
- Issue date Sep 26, 2006
- ASML Netherlands B.V.
- Tjarko Adriaan Rudolf Van Empel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, substrate holder and method of manufacturing
- Patent number 7,110,085
- Issue date Sep 19, 2006
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,110,091
- Issue date Sep 19, 2006
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,027,132
- Issue date Apr 11, 2006
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,019,816
- Issue date Mar 28, 2006
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,019,820
- Issue date Mar 28, 2006
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 6,897,945
- Issue date May 24, 2005
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CONTACTLESS HANDLING OF AN OBJECT
- Publication number 20110280703
- Publication date Nov 17, 2011
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND SUBSTRATE...
- Publication number 20110242518
- Publication date Oct 6, 2011
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110241259
- Publication date Oct 6, 2011
- ASML NETHERLANDS B.V.
- Joost Jeroen OTTENS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110222035
- Publication date Sep 15, 2011
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria ZAAL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110222036
- Publication date Sep 15, 2011
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria ZAAL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measurement System and Lithographic Apparatus for Measuring a Posit...
- Publication number 20110141447
- Publication date Jun 16, 2011
- ASML NETHERLANDS B.V.
- Marc Wilhelmus Maria Van Der Wijst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20100302518
- Publication date Dec 2, 2010
- ASML NETHERLANDS B.V.
- Jan VAN EIJK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100091255
- Publication date Apr 15, 2010
- ASML NETHERLANDS B.V.
- Bob STREEFKERK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100073650
- Publication date Mar 25, 2010
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria ZAAL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measurement system, lithographic apparatus and method for measuring...
- Publication number 20080240501
- Publication date Oct 2, 2008
- ASML NETHERLANDS B.V.
- Marc Wilhelmus Maria Van Der Wijst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, method of calibrating a lithographic appara...
- Publication number 20080024748
- Publication date Jan 31, 2008
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050270506
- Publication date Dec 8, 2005
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050259233
- Publication date Nov 24, 2005
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050128444
- Publication date Jun 16, 2005
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Koen Jacobus Johannes Maria ZAAL

Person

Patents Grantslast 30 patents

Measurement system, lithographic apparatus and method for measuring...

Lithographic apparatus, method of calibrating a lithographic appara...

Lithographic apparatus, device manufacturing method and method of c...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Method of calibrating a lithographic apparatus and device manufactu...

Lithographic method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method of a manufacturing device

Lithographic apparatus and device manufacturing method

Using unflatness information of the substrate table or mask table f...

Movable carriage for a lithographic apparatus and device manufactur...

Lithographic apparatus and device manufacturing method

Electrostatic clamp assembly for a lithographic apparatus

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus, Lorentz actuator, and device manufacturing...

Lithographic apparatus, article support member, and method

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus, substrate holder and method of manufacturing

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR CONTACTLESS HANDLING OF AN OBJECT

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND SUBSTRATE...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Measurement System and Lithographic Apparatus for Measuring a Posit...

LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Measurement system, lithographic apparatus and method for measuring...

Lithographic apparatus, method of calibrating a lithographic appara...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method