Koichi Sentoku

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Calibration method, measurement apparatus, exposure apparatus, and...
- Patent number 10,401,744
- Issue date Sep 3, 2019
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, lithography method, and method of manufactur...
- Patent number 9,257,262
- Issue date Feb 9, 2016
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing device, and substrate
- Patent number 8,922,774
- Issue date Dec 30, 2014
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method, imprint method, alignment apparatus, and position...
- Patent number 8,845,317
- Issue date Sep 30, 2014
- Canon Kabushiki Kaisha
- Nobuhito Suehira
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography apparatus and device manufacturing method
- Patent number 8,618,515
- Issue date Dec 31, 2013
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle manufacturing method, surface shape measuring apparatus and...
- Patent number 8,338,805
- Issue date Dec 25, 2012
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, position detection method, exposure a...
- Patent number 8,089,612
- Issue date Jan 3, 2012
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Surface shape measurement apparatus and exposure apparatus
- Patent number 7,952,725
- Issue date May 31, 2011
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Grant
Pattern transfer apparatus, imprint apparatus, and pattern transfer...
- Patent number 7,884,935
- Issue date Feb 8, 2011
- Canon Kabushiki Kaisha
- Nobuhito Suehira
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and program for calculating exposure dose and focus position...
- Patent number 7,771,905
- Issue date Aug 10, 2010
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement method and apparatus, exposure apparatus, and device fa...
- Patent number 7,670,729
- Issue date Mar 2, 2010
- Canon Kabushiki Kaisha
- Atsushi Takagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,586,582
- Issue date Sep 8, 2009
- Canon Kabushiki Kaisha
- Hideki Ina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and imprint method including dual movable image p...
- Patent number 7,531,821
- Issue date May 12, 2009
- Canon Kabushiki Kaisha
- Nobuhito Suehira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Imaging optical system and exposure apparatus
- Patent number 7,435,984
- Issue date Oct 14, 2008
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G02 - OPTICS
Information Patent Grant
Exposure method and exposure management system
- Patent number 7,396,620
- Issue date Jul 8, 2008
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management system, apparatus, and method, exposure apparatus, and c...
- Patent number 7,385,700
- Issue date Jun 10, 2008
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management system and apparatus, method therefor, and device manufa...
- Patent number 7,373,213
- Issue date May 13, 2008
- Canon Kabushiki Kaisha
- Satoru Oishi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Shape measuring apparatus, shape measuring method, and aligning method
- Patent number 7,271,882
- Issue date Sep 18, 2007
- Canon Kabushiki Kaisha
- Hideki Ina
- B24 - GRINDING POLISHING
Information Patent Grant
Position detection method and apparatus
- Patent number 7,247,868
- Issue date Jul 24, 2007
- Canon Kabushiki Kaisha
- Takehiko Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus, exposure apparatus using the same, and method...
- Patent number 7,173,716
- Issue date Feb 6, 2007
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method and apparatus, exposure apparatus and dev...
- Patent number 7,148,973
- Issue date Dec 12, 2006
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for producing library
- Patent number 7,123,414
- Issue date Oct 17, 2006
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Grant
Alignment apparatus, exposure apparatus using same, and method of m...
- Patent number 7,110,116
- Issue date Sep 19, 2006
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus control system, apparatus control method, semiconductor e...
- Patent number 7,075,618
- Issue date Jul 11, 2006
- Canon Kabushiki Kaisha
- Hideki Ina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection method and apparatus
- Patent number 7,067,826
- Issue date Jun 27, 2006
- Canon Kabushiki Kaisha
- Takehiko Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management system, management apparatus, management method, and dev...
- Patent number 7,069,104
- Issue date Jun 27, 2006
- Canon Kabushiki Kaisha
- Takehiko Suzuki
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Management system, management method and apparatus, and management...
- Patent number 7,010,380
- Issue date Mar 7, 2006
- Canon Kabushiki Kaisha
- Koichi Sentoku
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Position detecting method and apparatus, exposure apparatus and dev...
- Patent number 6,992,780
- Issue date Jan 31, 2006
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management system, apparatus, and method, exposure apparatus, and c...
- Patent number 6,992,767
- Issue date Jan 31, 2006
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Shape measuring apparatus, shape measuring method, and aligning method
- Patent number 6,950,179
- Issue date Sep 27, 2005
- Canon Kabushiki Kaisha
- Hideki Ina
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
PHOTOACOUSTIC APPARATUS
- Publication number 20180206728
- Publication date Jul 26, 2018
- Canon Kabushiki Kaisha
- Koichi Sentoku
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
ULTRASONIC PROBE
- Publication number 20180146950
- Publication date May 31, 2018
- Canon Kabushiki Kaisha
- Shinji Ohishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20150331331
- Publication date Nov 19, 2015
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING INCLINATION OF BEAM, DRAWING METHOD, DRAWING A...
- Publication number 20150155137
- Publication date Jun 4, 2015
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150044614
- Publication date Feb 12, 2015
- Canon Kabushiki Kaisha
- Koichi SENTOKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...
- Publication number 20150015861
- Publication date Jan 15, 2015
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD OF MANUFACTUR...
- Publication number 20140322831
- Publication date Oct 30, 2014
- Canon Kabushiki Kaisha
- Koichi Sentoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD FOR MANUFACTU...
- Publication number 20140320836
- Publication date Oct 30, 2014
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE
- Publication number 20140322654
- Publication date Oct 30, 2014
- Canon Kabushiki Kaisha
- Koichi Sentoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130216954
- Publication date Aug 22, 2013
- Canon Kabushiki Kaisha
- Satoru Oishi
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130188165
- Publication date Jul 25, 2013
- Canon Kabushiki Kaisha
- Shigeki Ogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130171570
- Publication date Jul 4, 2013
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130148091
- Publication date Jun 13, 2013
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING DEVICE, AND SUBSTRATE
- Publication number 20130148122
- Publication date Jun 13, 2013
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110310373
- Publication date Dec 22, 2011
- Canon Kabushiki Kaisha
- Koichi SENTOKU
- B82 - NANO-TECHNOLOGY
Information Patent Application
RETICLE MANUFACTURING METHOD, SURFACE SHAPE MEASURING APPARATUS AND...
- Publication number 20100209828
- Publication date Aug 19, 2010
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURIN...
- Publication number 20100002215
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE SHAPE MEASUREMENT APPARATUS AND EXPOSURE APPARATUS
- Publication number 20090286172
- Publication date Nov 19, 2009
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Application
POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, EXPOSURE A...
- Publication number 20090244513
- Publication date Oct 1, 2009
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT METHOD, IMPRINT METHOD, ALIGNMENT APPARATUS, AND POSITION...
- Publication number 20090108483
- Publication date Apr 30, 2009
- Nobuhito Suehira
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND IMPRINT METHOD
- Publication number 20080073604
- Publication date Mar 27, 2008
- Canon Kabushiki Kaisha
- Nobuhito Suehira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN TRANSFER APPARATUS, IMPRINT APPARATUS, AND PATTERN TRANSFER...
- Publication number 20070242272
- Publication date Oct 18, 2007
- Canon Kabushiki Kaisha
- Nobuhito Suehira
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
METHOD AND PROGRAM FOR CALCULATING EXPOSURE DOSE AND FOCUS POSITION...
- Publication number 20070154824
- Publication date Jul 5, 2007
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20070035708
- Publication date Feb 15, 2007
- Canon Kabushiki Kaisha
- Hideki Ina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING OPTICAL SYSTEM AND EXPOSURE APPARATUS
- Publication number 20070007471
- Publication date Jan 11, 2007
- Koichi SENTOKU
- G02 - OPTICS
Information Patent Application
Management system, management apparatus, management method, and dev...
- Publication number 20060195215
- Publication date Aug 31, 2006
- Canon Kabushiki Kaisha
- Takehiko Suzuki
- G05 - CONTROLLING REGULATING
Information Patent Application
Management system, apparatus, and method, exposure apparatus, and c...
- Publication number 20060050274
- Publication date Mar 9, 2006
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measurement method and apparatus, exposure apparatus, and device fa...
- Publication number 20050270504
- Publication date Dec 8, 2005
- Atsushi Takagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detection method and apparatus
- Publication number 20050264781
- Publication date Dec 1, 2005
- Canon Kabushiki Kaisha
- Takehiko Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detecting method and apparatus, exposure apparatus and dev...
- Publication number 20050243296
- Publication date Nov 3, 2005
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Koichi Sentoku

Person

Patents Grantslast 30 patents

Calibration method, measurement apparatus, exposure apparatus, and...

Lithography apparatus, lithography method, and method of manufactur...

Method of manufacturing device, and substrate

Alignment method, imprint method, alignment apparatus, and position...

Lithography apparatus and device manufacturing method

Reticle manufacturing method, surface shape measuring apparatus and...

Position detection apparatus, position detection method, exposure a...

Surface shape measurement apparatus and exposure apparatus

Pattern transfer apparatus, imprint apparatus, and pattern transfer...

Method and program for calculating exposure dose and focus position...

Measurement method and apparatus, exposure apparatus, and device fa...

Exposure apparatus

Imprint apparatus and imprint method including dual movable image p...

Imaging optical system and exposure apparatus

Exposure method and exposure management system

Management system, apparatus, and method, exposure apparatus, and c...

Management system and apparatus, method therefor, and device manufa...

Shape measuring apparatus, shape measuring method, and aligning method

Position detection method and apparatus

Alignment apparatus, exposure apparatus using the same, and method...

Position detecting method and apparatus, exposure apparatus and dev...

Method for producing library

Alignment apparatus, exposure apparatus using same, and method of m...

Apparatus control system, apparatus control method, semiconductor e...

Position detection method and apparatus

Management system, management apparatus, management method, and dev...

Management system, management method and apparatus, and management...

Position detecting method and apparatus, exposure apparatus and dev...

Management system, apparatus, and method, exposure apparatus, and c...

Shape measuring apparatus, shape measuring method, and aligning method

Patents Applicationslast 30 patents

PHOTOACOUSTIC APPARATUS

ULTRASONIC PROBE

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...

METHOD FOR MEASURING INCLINATION OF BEAM, DRAWING METHOD, DRAWING A...

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

CALIBRATION METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD OF MANUFACTUR...

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD FOR MANUFACTU...

LITHOGRAPHY APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING ARTICLE

METHOD OF MANUFACTURING DEVICE, AND SUBSTRATE

LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD

RETICLE MANUFACTURING METHOD, SURFACE SHAPE MEASURING APPARATUS AND...

IMAGING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURIN...

SURFACE SHAPE MEASUREMENT APPARATUS AND EXPOSURE APPARATUS

POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, EXPOSURE A...

ALIGNMENT METHOD, IMPRINT METHOD, ALIGNMENT APPARATUS, AND POSITION...

IMPRINT APPARATUS AND IMPRINT METHOD

PATTERN TRANSFER APPARATUS, IMPRINT APPARATUS, AND PATTERN TRANSFER...

METHOD AND PROGRAM FOR CALCULATING EXPOSURE DOSE AND FOCUS POSITION...

EXPOSURE APPARATUS

IMAGING OPTICAL SYSTEM AND EXPOSURE APPARATUS

Management system, management apparatus, management method, and dev...

Management system, apparatus, and method, exposure apparatus, and c...

Measurement method and apparatus, exposure apparatus, and device fa...

Position detection method and apparatus

Position detecting method and apparatus, exposure apparatus and dev...