Kouji Mitsuhashi

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Internal member of a plasma processing vessel
- Patent number 8,877,002
- Issue date Nov 4, 2014
- Tokyo Electron Limited
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment container internal member, and plasma treatment ap...
- Patent number 8,739,732
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Internal member of a plasma processing vessel
- Patent number 8,449,715
- Issue date May 28, 2013
- Tokyo Electron Limited
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for an improved baffle plate in a plasma proce...
- Patent number 8,118,936
- Issue date Feb 21, 2012
- Tokyo Electron Limited
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for an improved deposition shield in a plasma processing...
- Patent number 8,117,986
- Issue date Feb 21, 2012
- Tokyo Electron Limited
- Hidehito Saigusa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Components for substrate processing apparatus and manufacturing met...
- Patent number 8,058,186
- Issue date Nov 15, 2011
- Tokyo Electron Limited
- Tsuyoshi Moriya
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method and apparatus for an improved baffle plate in a plasma proce...
- Patent number 8,057,600
- Issue date Nov 15, 2011
- Tokyo Electron Limited
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic sprayed member-cleaning method
- Patent number 7,942,975
- Issue date May 17, 2011
- Tokyo Electron Limited
- Tsuyoshi Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-chamber member, a cleaning method therefor and a plasma processi...
- Patent number 7,892,361
- Issue date Feb 22, 2011
- Tokyo Electron Limited
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for an improved optical window deposition shie...
- Patent number 7,811,428
- Issue date Oct 12, 2010
- Tokyo Electron Limited
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal member of a plasma processing vessel
- Patent number 7,780,786
- Issue date Aug 24, 2010
- Tokyo Electron Limited
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for an improved bellows shield in a plasma pro...
- Patent number 7,678,226
- Issue date Mar 16, 2010
- Tokyo Electron Limited
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an improved upper electrode plate with dep...
- Patent number 7,566,379
- Issue date Jul 28, 2009
- Tokyo Electron Limited
- Shinya Nishimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for an improved upper electrode plate in a pla...
- Patent number 7,566,368
- Issue date Jul 28, 2009
- Tokyo Electron Limited
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing device and method of maintaining the device, mechanism a...
- Patent number 7,481,903
- Issue date Jan 27, 2009
- Tokyo Electron Limited
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal member for plasma-treating vessel and method of producing...
- Patent number 7,364,798
- Issue date Apr 29, 2008
- Tocalo Co., Ltd.
- Yoshio Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for an improved baffle plate in a plasma proce...
- Patent number 7,282,112
- Issue date Oct 16, 2007
- Tokyo Electron Limited
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an improved bellows shield in a plasma pro...
- Patent number 7,204,912
- Issue date Apr 17, 2007
- Tokyo Electron Limited
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an improved baffle plate in a plasma proce...
- Patent number 7,166,166
- Issue date Jan 23, 2007
- Tokyo Electron Limited
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an improved upper electrode plate in a pla...
- Patent number 7,166,200
- Issue date Jan 23, 2007
- Tokyo Electron Limited
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an improved optical window deposition shie...
- Patent number 7,163,585
- Issue date Jan 16, 2007
- Tokyo Electron Limited
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an improved upper electrode plate with dep...
- Patent number 7,147,749
- Issue date Dec 12, 2006
- Tokyo Electron Limited
- Shinya Nishimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for an improved deposition shield in a plasma...
- Patent number 7,137,353
- Issue date Nov 21, 2006
- Tokyo Electron Limited
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing device and method of maintaining the device, mechanism a...
- Patent number 6,899,786
- Issue date May 31, 2005
- Tokyo Electron Limited
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal member for plasma-treating vessel and method of producing...
- Patent number 6,884,516
- Issue date Apr 26, 2005
- Tocalo Co., Ltd.
- Yoshio Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for an improved baffle plate in a plasma proce...
- Patent number 6,837,966
- Issue date Jan 4, 2005
- Tokyo Electron Limeted
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an improved optical window deposition shie...
- Patent number 6,798,519
- Issue date Sep 28, 2004
- Tokyo Electron Limited
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning a plasma processing apparatus
- Patent number 6,790,289
- Issue date Sep 14, 2004
- Tokyo Electric Limited
- Taira Takase
- B24 - GRINDING POLISHING
Information Patent Grant
Plasma processing container internal member and production method t...
- Patent number 6,783,863
- Issue date Aug 31, 2004
- Tocalo Co., Ltd.
- Yoshio Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL
- Publication number 20130255881
- Publication date Oct 3, 2013
- TOKYO ELECTRON LIMITED
- Kouji MITSUHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT FOR SUBSTRATE PROCESSING APPARATUS AND METHOD OF FORMING...
- Publication number 20120186985
- Publication date Jul 26, 2012
- TOKYO ELECTRON LIMITED
- Kouji Mitsuhashi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL
- Publication number 20100307687
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC SPRAYED MEMBER-CLEANING METHOD, PROGRAM FOR IMPLEMENTING TH...
- Publication number 20090133717
- Publication date May 28, 2009
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- B08 - CLEANING
Information Patent Application
In-chamber member, a cleaning method therefor and a plasma processi...
- Publication number 20080196744
- Publication date Aug 21, 2008
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT FOR SUBSTRATE PROCESSING APPARATUS AND METHOD OF FORMING...
- Publication number 20080105203
- Publication date May 8, 2008
- TOKYO ELECTRON LIMITED
- Kouji Mitsuhashi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Internal member for plasma-treating vessel and method of producing...
- Publication number 20080066647
- Publication date Mar 20, 2008
- Tocalo Co., Ltd.
- Yoshio Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Internal member for plasma-treating vessel and method of producing...
- Publication number 20080070028
- Publication date Mar 20, 2008
- Tocalo Co., Ltd.
- Yoshio Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Internal member for plasma-treating vessel and method of producing...
- Publication number 20080070051
- Publication date Mar 20, 2008
- Tocalo Co., Ltd.
- Yoshio Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR AN IMPROVED BAFFLE PLATE IN A PLASMA PROCE...
- Publication number 20070204794
- Publication date Sep 6, 2007
- TOKYO ELECTRON LIMITED
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR AN IMPROVED BELLOWS SHIELD IN A PLASMA PRO...
- Publication number 20070125494
- Publication date Jun 7, 2007
- TOKYO ELECTRON LIMITED
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR AN IMPROVED BAFFLE PLATE IN A PLASMA PROCE...
- Publication number 20070107846
- Publication date May 17, 2007
- TOKYO ELECTRON LIMITED
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR AN IMPROVED OPTICAL WINDOW DEPOSITION SHIE...
- Publication number 20070102287
- Publication date May 10, 2007
- TOKYO ELECTRON LIMITED
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR AN IMPROVED UPPER ELECTRODE PLATE IN A PLA...
- Publication number 20070096658
- Publication date May 3, 2007
- TOKYO ELECTRON LIMITED
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for an improved upper electrode plate with dep...
- Publication number 20070034337
- Publication date Feb 15, 2007
- TOKYO ELECTRON LIMITED
- Shinya Nishimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for an improved deposition shield in a plasma...
- Publication number 20070028839
- Publication date Feb 8, 2007
- TOKYO ELECTRON LIMITED
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic sprayed member-cleaning method, program for implementing th...
- Publication number 20060099444
- Publication date May 11, 2006
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- B08 - CLEANING
Information Patent Application
Components for substrate processing apparatus and manufacturing met...
- Publication number 20060096703
- Publication date May 11, 2006
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Processing device and method of maintaining the device, mechanism a...
- Publication number 20050150456
- Publication date Jul 14, 2005
- TOKYO ELECTRON LIMITED
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Internal member for plasma-treating vessel and method of producing...
- Publication number 20050147852
- Publication date Jul 7, 2005
- Tocalo Co., Ltd.
- Yoshio Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for an improved baffle plate in a plasma proce...
- Publication number 20050103268
- Publication date May 19, 2005
- TOKYO ELECTRON LIMITED
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of cleaning a plasma processing apparatus
- Publication number 20040216769
- Publication date Nov 4, 2004
- TOKYO ELECTRON LIMITED
- Taira Takase
- B08 - CLEANING
Information Patent Application
Internal member of a plasma processing vessel
- Publication number 20040216667
- Publication date Nov 4, 2004
- TOKYO ELECTRON LIMITED
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Internal member for plasma-treating vessel and method of producing...
- Publication number 20040214026
- Publication date Oct 28, 2004
- Tocalo Co., Ltd.
- Yoshio Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of processing quartz member for plasma processing device, qu...
- Publication number 20040200804
- Publication date Oct 14, 2004
- Norikazu Sugiyama
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Method and apparatus for an improved optical window deposition shie...
- Publication number 20040173155
- Publication date Sep 9, 2004
- TOKYO ELECTRON LIMITED
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating agent, plasma-resistant component having coating film forme...
- Publication number 20040163591
- Publication date Aug 26, 2004
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma treatment container internal member, and plasma treatment de...
- Publication number 20040144319
- Publication date Jul 29, 2004
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing device and method of maintaining the device, mechanism a...
- Publication number 20040108068
- Publication date Jun 10, 2004
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for an improved bellows shield in a plasma pro...
- Publication number 20040060656
- Publication date Apr 1, 2004
- TOKYO ELECTRON LIMITED
- Hidehito Saigusa
- H01 - BASIC ELECTRIC ELEMENTS

Kouji Mitsuhashi

Person

Patents Grantslast 30 patents

Internal member of a plasma processing vessel

Plasma treatment container internal member, and plasma treatment ap...

Internal member of a plasma processing vessel

Method and apparatus for an improved baffle plate in a plasma proce...

Apparatus for an improved deposition shield in a plasma processing...

Components for substrate processing apparatus and manufacturing met...

Method and apparatus for an improved baffle plate in a plasma proce...

Ceramic sprayed member-cleaning method

In-chamber member, a cleaning method therefor and a plasma processi...

Method and apparatus for an improved optical window deposition shie...

Internal member of a plasma processing vessel

Method and apparatus for an improved bellows shield in a plasma pro...

Method and apparatus for an improved upper electrode plate with dep...

Method and apparatus for an improved upper electrode plate in a pla...

Processing device and method of maintaining the device, mechanism a...

Internal member for plasma-treating vessel and method of producing...

Method and apparatus for an improved baffle plate in a plasma proce...

Method and apparatus for an improved bellows shield in a plasma pro...

Method and apparatus for an improved baffle plate in a plasma proce...

Method and apparatus for an improved upper electrode plate in a pla...

Method and apparatus for an improved optical window deposition shie...

Method and apparatus for an improved upper electrode plate with dep...

Method and apparatus for an improved deposition shield in a plasma...

Processing device and method of maintaining the device, mechanism a...

Internal member for plasma-treating vessel and method of producing...

Method and apparatus for an improved baffle plate in a plasma proce...

Method and apparatus for an improved optical window deposition shie...

Method of cleaning a plasma processing apparatus

Plasma processing container internal member and production method t...

Patents Applicationslast 30 patents

INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL

COMPONENT FOR SUBSTRATE PROCESSING APPARATUS AND METHOD OF FORMING...

INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL

CERAMIC SPRAYED MEMBER-CLEANING METHOD, PROGRAM FOR IMPLEMENTING TH...

In-chamber member, a cleaning method therefor and a plasma processi...

COMPONENT FOR SUBSTRATE PROCESSING APPARATUS AND METHOD OF FORMING...

Internal member for plasma-treating vessel and method of producing...

Internal member for plasma-treating vessel and method of producing...

Internal member for plasma-treating vessel and method of producing...

METHOD AND APPARATUS FOR AN IMPROVED BAFFLE PLATE IN A PLASMA PROCE...

METHOD AND APPARATUS FOR AN IMPROVED BELLOWS SHIELD IN A PLASMA PRO...

METHOD AND APPARATUS FOR AN IMPROVED BAFFLE PLATE IN A PLASMA PROCE...

METHOD AND APPARATUS FOR AN IMPROVED OPTICAL WINDOW DEPOSITION SHIE...

METHOD AND APPARATUS FOR AN IMPROVED UPPER ELECTRODE PLATE IN A PLA...

Method and apparatus for an improved upper electrode plate with dep...

Method and apparatus for an improved deposition shield in a plasma...

Ceramic sprayed member-cleaning method, program for implementing th...

Components for substrate processing apparatus and manufacturing met...

Processing device and method of maintaining the device, mechanism a...

Internal member for plasma-treating vessel and method of producing...

Method and apparatus for an improved baffle plate in a plasma proce...

Method of cleaning a plasma processing apparatus

Internal member of a plasma processing vessel

Internal member for plasma-treating vessel and method of producing...

Method of processing quartz member for plasma processing device, qu...

Method and apparatus for an improved optical window deposition shie...

Coating agent, plasma-resistant component having coating film forme...

Plasma treatment container internal member, and plasma treatment de...

Processing device and method of maintaining the device, mechanism a...

Method and apparatus for an improved bellows shield in a plasma pro...