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Koyata Sakae
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for manufacturing epitaxial wafer
Patent number
8,759,229
Issue date
Jun 24, 2014
Sumco Corporation
Sakae Koyata
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for etching single wafer
Patent number
8,466,071
Issue date
Jun 18, 2013
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for etching wafer by single-wafer process and single wafe...
Patent number
8,066,896
Issue date
Nov 29, 2011
Sumco Corporation
Sakae Koyata
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for smoothing wafer surface and apparatus used therefor
Patent number
7,955,982
Issue date
Jun 7, 2011
Sumco Corporation
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Single wafer etching method
Patent number
7,906,438
Issue date
Mar 15, 2011
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alkaline etchant for controlling surface roughness of semiconductor...
Patent number
7,851,375
Issue date
Dec 14, 2010
Sumco Corporation
Sakae Koyata
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Wafer polishing apparatus and method for polishing wafers
Patent number
7,717,768
Issue date
May 18, 2010
Sumco Corporation
Tomohiro Hashii
B24 - GRINDING POLISHING
Information
Patent Grant
Process for producing silicon wafer
Patent number
7,648,890
Issue date
Jan 19, 2010
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of silicon wafer
Patent number
7,645,702
Issue date
Jan 12, 2010
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of processing silicon wafer
Patent number
7,601,642
Issue date
Oct 13, 2009
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing silicon wafers
Patent number
7,601,644
Issue date
Oct 13, 2009
Sumco Corporation
Sakae Koyata
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for etching wafer by single-wafer process
Patent number
7,488,400
Issue date
Feb 10, 2009
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing a silicon wafer
Patent number
7,456,106
Issue date
Nov 25, 2008
Sumitomo Mitsubishi Silicon Corporation
Sakae Koyata
B24 - GRINDING POLISHING
Information
Patent Grant
Method for manufacturing single-side mirror surface wafer
Patent number
7,338,904
Issue date
Mar 4, 2008
Sumco Corporation
Sakae Koyata
B24 - GRINDING POLISHING
Information
Patent Grant
Etching liquid for controlling silicon wafer surface shape and meth...
Patent number
7,288,207
Issue date
Oct 30, 2007
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing a silicon wafer
Patent number
7,226,864
Issue date
Jun 5, 2007
Sumitomo Mitsubishi Silicon Corporation
Sakae Koyata
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR SMOOTHING WAFER SURFACE AND APPARATUS USED THEREFOR
Publication number
20100151597
Publication date
Jun 17, 2010
SUMCO CORPORATION
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER MANUFACTURING METHOD AND WAFER OBTAINED THROUGH THE METHOD
Publication number
20100021688
Publication date
Jan 28, 2010
SUMCO CORPORATION
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR WAFER
Publication number
20090297755
Publication date
Dec 3, 2009
SUMCO CORPORATION
Sakae KOYATA
C30 - CRYSTAL GROWTH
Information
Patent Application
SINGLE WAFER ETCHING APPARATUS
Publication number
20090186488
Publication date
Jul 23, 2009
KATOH Takeo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Single-Wafer Etching Method for Wafer and Etching Apparatus Thereof
Publication number
20090181546
Publication date
Jul 16, 2009
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching Method of Single Wafer
Publication number
20090117749
Publication date
May 7, 2009
SUMCO CORPORATION
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing Epitaxial Wafer
Publication number
20090053894
Publication date
Feb 26, 2009
Sakae Koyata
C30 - CRYSTAL GROWTH
Information
Patent Application
ETCHANT FOR SILICON WAFER SURFACE SHAPE CONTROL AND METHOD FOR MANU...
Publication number
20090042390
Publication date
Feb 12, 2009
Sakae Koyata
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Method for Etching Single Wafer
Publication number
20090004876
Publication date
Jan 1, 2009
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SILICON WAFER
Publication number
20080214094
Publication date
Sep 4, 2008
Takeo KATOH
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus for etching wafer by single-wafer process and single wafe...
Publication number
20070298614
Publication date
Dec 27, 2007
SUMCO CORPORATION
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Alkaline Etchant for Controlling Surface Roughness of Semiconductor...
Publication number
20070298618
Publication date
Dec 27, 2007
SUMCO CORPORATION
Sakae Koyata
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Processing Method of Silicon Wafer
Publication number
20070267387
Publication date
Nov 22, 2007
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing Silicon Wafers
Publication number
20070224821
Publication date
Sep 27, 2007
SUMCO CORPORATION
Sakae Koyata
B24 - GRINDING POLISHING
Information
Patent Application
Etching Liquid for Controlling Silicon Wafer Surface Shape
Publication number
20070184658
Publication date
Aug 9, 2007
Sakae Koyata
C30 - CRYSTAL GROWTH
Information
Patent Application
Single Wafer Etching Apparatus and Single Wafer Etching Method
Publication number
20070175863
Publication date
Aug 2, 2007
SUMCO CORPORATION
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing single-side mirror surface wafer
Publication number
20070158308
Publication date
Jul 12, 2007
SUMCO CORPORATION
Sakae Koyata
B24 - GRINDING POLISHING
Information
Patent Application
ETCHING METHOD OF SINGLE WAFER
Publication number
20070161247
Publication date
Jul 12, 2007
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Manufacturing method of silicon wafer
Publication number
20070119817
Publication date
May 31, 2007
SUMCO CORPORATION
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for etching wafer by single-wafer process and single wafe...
Publication number
20070087568
Publication date
Apr 19, 2007
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for producing silicon wafer
Publication number
20070042567
Publication date
Feb 22, 2007
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer polishing apparatus and method for polishing wafers
Publication number
20060264157
Publication date
Nov 23, 2006
Tomohiro Hashii
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus for polishing wafer and process for polishing wafer
Publication number
20060264158
Publication date
Nov 23, 2006
SUMCO CORPORATION
Tomohiro Hashii
B24 - GRINDING POLISHING
Information
Patent Application
Method of processing silicon wafer
Publication number
20060252272
Publication date
Nov 9, 2006
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for etching a silicon wafer and method for performing differ...
Publication number
20060194441
Publication date
Aug 31, 2006
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching liquid for controlling silicon wafer surface shape and meth...
Publication number
20060169667
Publication date
Aug 3, 2006
Sakae Koyata
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for producing a silicon wafer
Publication number
20050148181
Publication date
Jul 7, 2005
Sakae Koyata
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for producing a silicon wafer
Publication number
20050112893
Publication date
May 26, 2005
Sakae Koyata
C30 - CRYSTAL GROWTH