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Kurt E. Wampler
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Scattering bar OPC application method for sub-half wavelength litho...
Patent number
8,039,180
Issue date
Oct 18, 2011
ASML Masktools B.V.
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
CPL mask and a method and program product for generating the same
Patent number
7,998,355
Issue date
Aug 16, 2011
ASML Masktools B.V.
Douglas Van Den Broeke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for performing model-based layout conversion f...
Patent number
7,985,515
Issue date
Jul 26, 2011
ASML Masktools B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scattering bar OPC application method for sub-half wavelength litho...
Patent number
7,892,707
Issue date
Feb 22, 2011
ASML Masktools B.V.
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of two dimensional feature model calibration and optimization
Patent number
7,820,341
Issue date
Oct 26, 2010
ASML Masktools B.V.
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for providing optical proximity features to a...
Patent number
7,774,736
Issue date
Aug 10, 2010
ASML Masktools B.V.
Douglas Van Den Broeke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for performing model-based layout conversion f...
Patent number
7,666,554
Issue date
Feb 23, 2010
ASML Masktools, B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for performing model based placement of phase-...
Patent number
7,550,235
Issue date
Jun 23, 2009
ASML Masktools B.V.
Xuelong Shi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for decomposing semiconductor device patterns...
Patent number
7,549,140
Issue date
Jun 16, 2009
ASML Masktools B.V.
Doug Van Den Broeke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scattering bar OPC application method for sub-half wavelength litho...
Patent number
7,485,396
Issue date
Feb 3, 2009
ASML Masktools B.V.
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for performing full-chip manufacturing reliability checking...
Patent number
7,434,195
Issue date
Oct 7, 2008
ASML Masktools B.V.
Michael Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method, program product and apparatus for generating assist feature...
Patent number
7,376,930
Issue date
May 20, 2008
ASML Masktools B.V.
Kurt E. Wampler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scattering bar OPC application method for sub-half wavelength litho...
Patent number
7,354,681
Issue date
Apr 8, 2008
ASML Masktools B.V.
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for providing optical proximity features to a...
Patent number
7,247,574
Issue date
Jul 24, 2007
ASML Masktools B.V.
Douglas Van Den Broeke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of two dimensional feature model calibration and optimization
Patent number
7,175,940
Issue date
Feb 13, 2007
ASML Masktools B.V.
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for performing model-based layout conversion f...
Patent number
7,138,212
Issue date
Nov 21, 2006
ASML Masktools B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for decomposing semiconductor device patterns...
Patent number
6,851,103
Issue date
Feb 1, 2005
ASML Masktools, B.V.
Doug Van Den Broeke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Hybrid phase-shift mask
Patent number
6,835,510
Issue date
Dec 28, 2004
ASML Masktools B.V.
Jang Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical proximity correction method utilizing serifs having variabl...
Patent number
6,670,081
Issue date
Dec 30, 2003
ASML Masktools Netherlands B.V.
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Hybrid phase-shift mask
Patent number
6,623,895
Issue date
Sep 23, 2003
ASML Masktools Netherlands B.V.
Jang Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of patterning sub-0.25λ line features with high trans...
Patent number
6,482,555
Issue date
Nov 19, 2002
ASML Masktools Netherlands B.V.
J. Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of patterning sub-0.25 lambda line features with high transm...
Patent number
6,312,854
Issue date
Nov 6, 2001
ASML Masktools Netherlands B.V.
J. Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of fine feature edge tuning with optically-halftoned mask
Patent number
6,114,071
Issue date
Sep 5, 2000
ASML Masktools Netherlands B.V.
J. Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical proximity correction method for intermediate-pitch features...
Patent number
5,821,014
Issue date
Oct 13, 1998
MicroUnity Systems Engineering, Inc.
Jang Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for generating proximity correction features for a lithograp...
Patent number
5,663,893
Issue date
Sep 2, 1997
MicroUnity Systems Engineering, Inc.
Kurt E. Wampler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
RULE-BASED DEPLOYMENT OF ASSIST FEATURES
Publication number
20170329235
Publication date
Nov 16, 2017
Duan-Fu Stephen HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Scattering Bar OPC Application Method for Sub-Half Wavelength Litho...
Publication number
20110143268
Publication date
Jun 16, 2011
ASML MASKTOOLS B.V.
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR PERFORMING MODEL-BASED LAYOUT CONVERSION F...
Publication number
20100167183
Publication date
Jul 1, 2010
Duan-Fu Stephen HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SCATTERING BAR OPC APPLICATION METHOD FOR SUB-HALF WAVELENGTH LITHO...
Publication number
20090233186
Publication date
Sep 17, 2009
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Scattering bar OPC application method for sub-half wavelength litho...
Publication number
20080206656
Publication date
Aug 28, 2008
ASML MASKTOOLS B.V.
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CPL mask and a method and program product for generating the same
Publication number
20080067143
Publication date
Mar 20, 2008
Douglas Van den Broeke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for providing optical proximity features to a...
Publication number
20070162889
Publication date
Jul 12, 2007
ASML MASKTOOLS B.V.
Douglas Van Den Broeke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of two dimensional feature model calibration and optimization
Publication number
20070117030
Publication date
May 24, 2007
ASML MASKTOOLS B.V.
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for performing model-based layout conversion f...
Publication number
20070042277
Publication date
Feb 22, 2007
ASML MASKTOOLS B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for performing full-chip manufacturing reliability checking...
Publication number
20060080633
Publication date
Apr 13, 2006
Michael Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for performing model based placement of phase-...
Publication number
20050142449
Publication date
Jun 30, 2005
Xuelong Shi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for decomposing semiconductor device patterns...
Publication number
20050125765
Publication date
Jun 9, 2005
ASML MASKTOOLS, B.V.
Doug Van Den Broeke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Scattering bar OPC application method for sub-half wavelength litho...
Publication number
20050074677
Publication date
Apr 7, 2005
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method, program product and apparatus for generating assist feature...
Publication number
20050053848
Publication date
Mar 10, 2005
Kurt E. Wampler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for providing optical proximity features to a...
Publication number
20040209170
Publication date
Oct 21, 2004
Douglas Van Den Broeke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for performing model-based layout conversion f...
Publication number
20040142251
Publication date
Jul 22, 2004
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Hybrid phase-shift mask
Publication number
20040067423
Publication date
Apr 8, 2004
ASML MASKTOOLS NETHERLANDS B.V.
Jang Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for decomposing semiconductor device patterns...
Publication number
20040010770
Publication date
Jan 15, 2004
Doug Van Den Broeke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of two dimensional feature model calibration and optimization
Publication number
20030082463
Publication date
May 1, 2003
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of patterning sub-0.25lambda line features with high transmi...
Publication number
20020048708
Publication date
Apr 25, 2002
ASML MASKTOOLS NETHERLANDS B.V.
J. Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical proximity correction method utilizing serifs having variabl...
Publication number
20020028393
Publication date
Mar 7, 2002
Thomas Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Hybrid phase-shift mask
Publication number
20020015899
Publication date
Feb 7, 2002
Jang Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY