Lars Metzger

Person

Moessingen-Belsen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for producing a component having a semiconductor substrate a...
- Patent number 7,803,646
- Issue date Sep 28, 2010
- Robert Bosch GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component having a diaphragm
- Patent number 7,495,302
- Issue date Feb 24, 2009
- Robert Bosch GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for capacitive pressure measurement and method for manufactu...
- Patent number 7,321,156
- Issue date Jan 22, 2008
- Robert Bosch GmbH
- Frank Fischer
- G01 - MEASURING TESTING
Information Patent Grant
Method for the production of a micromechanical device, particularly...
- Patent number 7,261,825
- Issue date Aug 28, 2007
- Robert Bosch GmbH
- Lars Metzger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structural element having a diaphragm and method fo...
- Patent number 7,148,077
- Issue date Dec 12, 2006
- Robert Bosch GmbH
- Matthias Fuertsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical mass flow sensor and method for the production thereof
- Patent number 7,060,197
- Issue date Jun 13, 2006
- Robert Bosch GmbH
- Matthias Fuertsch
- G01 - MEASURING TESTING
Information Patent Grant
Method of manufacturing a micromechanical component
- Patent number 6,905,615
- Issue date Jun 14, 2005
- Robert Bosch GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing surface micromechanical structures, and sensor
- Patent number 6,867,061
- Issue date Mar 15, 2005
- Robert Bosch GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component including function components suspended m...
- Patent number 6,686,638
- Issue date Feb 3, 2004
- Robert Bosch GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Micromechanical Capacitive Sensor Element
- Publication number 20110108932
- Publication date May 12, 2011
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR PRODUCING A COMPONENT HAVING A SEMICONDUCTOR SUBSTRATE A...
- Publication number 20060258037
- Publication date Nov 16, 2006
- ROBERT BOSCH GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a micromechanical device and a micromechanical...
- Publication number 20060226114
- Publication date Oct 12, 2006
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for the production of a micromechanical device, particularly...
- Publication number 20060096944
- Publication date May 11, 2006
- Lars Metzger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component having a diaphragm, and method for manufa...
- Publication number 20050204821
- Publication date Sep 22, 2005
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical structural element having a diaphragm and method fo...
- Publication number 20050098840
- Publication date May 12, 2005
- Matthias Fuertsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device for capacitive pressure measurement and method for manufactu...
- Publication number 20050029607
- Publication date Feb 10, 2005
- Frank Fischer
- G01 - MEASURING TESTING
Information Patent Application
Method for producing surface micromechanical structures, and sensor
- Publication number 20040089903
- Publication date May 13, 2004
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical mass flow sensor and method for the production thereof
- Publication number 20040026365
- Publication date Feb 12, 2004
- Matthias Fuertsch
- G01 - MEASURING TESTING
Information Patent Application
Method of manufacturing a micromechanical component
- Publication number 20020119589
- Publication date Aug 29, 2002
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component and method of manufacturing a micromechan...
- Publication number 20020096727
- Publication date Jul 25, 2002
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Lars Metzger

Person

Patents Grantslast 30 patents

Method for producing a component having a semiconductor substrate a...

Micromechanical component having a diaphragm

Device for capacitive pressure measurement and method for manufactu...

Method for the production of a micromechanical device, particularly...

Micromechanical structural element having a diaphragm and method fo...

Micromechanical mass flow sensor and method for the production thereof

Method of manufacturing a micromechanical component

Method for producing surface micromechanical structures, and sensor

Micromechanical component including function components suspended m...

Patents Applicationslast 30 patents

Micromechanical Capacitive Sensor Element

METHOD FOR PRODUCING A COMPONENT HAVING A SEMICONDUCTOR SUBSTRATE A...

Method for producing a micromechanical device and a micromechanical...

Method for the production of a micromechanical device, particularly...

Micromechanical component having a diaphragm, and method for manufa...

Micromechanical structural element having a diaphragm and method fo...

Device for capacitive pressure measurement and method for manufactu...

Method for producing surface micromechanical structures, and sensor

Micromechanical mass flow sensor and method for the production thereof

Method of manufacturing a micromechanical component

Micromechanical component and method of manufacturing a micromechan...