Lawrence C. Lei

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for making solar panels or components thereof
- Patent number 11,894,482
- Issue date Feb 6, 2024
- Dual Helios Semiconductor Equipment Company, Inc.
- Lawrence Chung-Lai Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for making solar panels or components thereof
- Patent number 11,888,082
- Issue date Jan 30, 2024
- Dual Helios Semiconductor Equipment Company, Inc.
- Lawrence Chung-Lai Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate conveying device and conveyi...
- Patent number 11,024,762
- Issue date Jun 1, 2021
- Lawrence Chung-Lai Lei
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Apparatus and method of selective turning over a row of substrates...
- Patent number 10,854,497
- Issue date Dec 1, 2020
- Lawrence Chung-Lai Lei
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Atomic layer deposition apparatus
- Patent number 9,031,685
- Issue date May 12, 2015
- Applied Materials, Inc.
- Barry L. Chin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus
- Patent number 8,626,330
- Issue date Jan 7, 2014
- Applied Materials, Inc.
- Barry L. Chin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems of transferring, docking and processing substrates
- Patent number 8,367,565
- Issue date Feb 5, 2013
- Archers Inc.
- Lawrence Chung-Lai Lei
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Self aligning non contact shadow ring process kit
- Patent number 8,342,119
- Issue date Jan 1, 2013
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station deposition apparatus and method
- Patent number 7,923,069
- Issue date Apr 12, 2011
- Applied Materials, Inc.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station deposition apparatus and method
- Patent number 7,794,789
- Issue date Sep 14, 2010
- Applied Materials, Inc.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for measuring a thickness of a layer of a wafer
- Patent number 7,777,483
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Grant
Multi-station deposition apparatus and method
- Patent number 7,547,465
- Issue date Jun 16, 2009
- Applied Materials, Inc.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of dynamically measuring thickness of a layer...
- Patent number 7,355,394
- Issue date Apr 8, 2008
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for dynamically measuring the thickness of an...
- Patent number 7,112,961
- Issue date Sep 26, 2006
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Grant
Multi-station deposition apparatus and method
- Patent number 6,932,871
- Issue date Aug 23, 2005
- Applied Materials, Inc.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamshell and small volume chamber with fixed substrate support
- Patent number 6,866,746
- Issue date Mar 15, 2005
- Applied Materials, Inc.
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead assembly for a processing chamber
- Patent number 6,827,815
- Issue date Dec 7, 2004
- Applied Materials, Inc.
- Mark M. Hytros
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus having platforms positioned for precise centering of semi...
- Patent number 6,793,766
- Issue date Sep 21, 2004
- Applied Materials Inc.
- Eric W. Schieve
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Variable flow deposition apparatus and method in semiconductor subs...
- Patent number 6,777,352
- Issue date Aug 17, 2004
- Applied Materials, Inc.
- Avi Tepman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual robot processing system
- Patent number 6,729,824
- Issue date May 4, 2004
- Applied Materials, Inc.
- Lawrence C. Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for vaporizing solid precursor for CVD or atom...
- Patent number 6,718,126
- Issue date Apr 6, 2004
- Applied Materials, Inc.
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Resonant chamber applicator for remote plasma source
- Patent number 6,603,269
- Issue date Aug 5, 2003
- Applied Materials, Inc.
- Be Van Vo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self aligning non contact shadow ring process kit
- Patent number 6,589,352
- Issue date Jul 8, 2003
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bifurcated deposition process for depositing refractory metal layer...
- Patent number 6,551,929
- Issue date Apr 22, 2003
- Applied Materials, Inc.
- Moris Kori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reactor using inductive RF coupling, and processes
- Patent number 6,545,420
- Issue date Apr 8, 2003
- Applied Materials, Inc.
- Kenneth S. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cold trap assembly
- Patent number 6,517,592
- Issue date Feb 11, 2003
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reactor using inductive RF coupling, and processes
- Patent number 6,518,195
- Issue date Feb 11, 2003
- Applied Materials, Inc.
- Kenneth S. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten chamber with stationary heater
- Patent number 6,503,331
- Issue date Jan 7, 2003
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic substrate support
- Patent number 6,494,955
- Issue date Dec 17, 2002
- Applied Materials, Inc.
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic confinement in a plasma reactor having an RF bias electrode
- Patent number 6,488,807
- Issue date Dec 3, 2002
- Applied Materials, Inc.
- Kenneth S. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR MAKING SOLAR PANELS OR COMPONENTS THEREOF
- Publication number 20230131921
- Publication date Apr 27, 2023
- Dual Helios Semiconductor Equipment Company, Inc.
- Lawrence Chung-Lai Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR MAKING SOLAR PANELS OR COMPONENTS THEREOF
- Publication number 20230096933
- Publication date Mar 30, 2023
- Dual Helios Semiconductor Equipment Company, Inc.
- Lawrence Chung-Lai Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CONVEYING DEVICE AND CONVEYI...
- Publication number 20180287007
- Publication date Oct 4, 2018
- Lawrence Chung-Lai Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF TURNING OVER A SUBSTRATE IN A SUBSTRATE PRO...
- Publication number 20180282864
- Publication date Oct 4, 2018
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20140130739
- Publication date May 15, 2014
- Barry L. CHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION DEPOSITION APPARATUS AND METHOD
- Publication number 20100316800
- Publication date Dec 16, 2010
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION DEPOSITION APPARATUS AND METHOD
- Publication number 20090214786
- Publication date Aug 27, 2009
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MEASURING OBJECT THICKNESS
- Publication number 20080186022
- Publication date Aug 7, 2008
- Applied Materials, Inc., a Delaware corporation
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Application
SELF ALIGNING NON CONTACT SHADOW RING PROCESS KIT
- Publication number 20080072823
- Publication date Mar 27, 2008
- Joseph Yudovsky
- C30 - CRYSTAL GROWTH
Information Patent Application
ANTI-CLOGGING NOZZLE FOR SEMICONDUCTOR PROCESSING
- Publication number 20080044568
- Publication date Feb 21, 2008
- Applied Materials, Inc.
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING TUNGSTEN MATERIALS DURING VAPOR DEPOSITION PROCE...
- Publication number 20070254481
- Publication date Nov 1, 2007
- Moris Kori
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and apparatus for measuring object thickness
- Publication number 20070063698
- Publication date Mar 22, 2007
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Application
Substrate support having brazed plates and resistance heater
- Publication number 20070040265
- Publication date Feb 22, 2007
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING TUNGSTEN MATERIALS DURING VAPOR DEPOSITION PROCE...
- Publication number 20060292874
- Publication date Dec 28, 2006
- Moris Kori
- C30 - CRYSTAL GROWTH
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20060223286
- Publication date Oct 5, 2006
- Barry L. Chin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas baffle and distributor for semiconductor processing chamber
- Publication number 20060196603
- Publication date Sep 7, 2006
- Applied Materials, Inc.
- Lawrence Chung-Lai Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for controlling the presence of fluorine in refra...
- Publication number 20060128132
- Publication date Jun 15, 2006
- APPLIED MATERIALS, INC.
- Ashok Sinha
- C30 - CRYSTAL GROWTH
Information Patent Application
Anti-clogging nozzle for semiconductor processing
- Publication number 20060048707
- Publication date Mar 9, 2006
- Applied Materials, Inc.
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Uniformly compressed process chamber gate seal for semiconductor pr...
- Publication number 20050268857
- Publication date Dec 8, 2005
- APPLIED MATERIALS, INC.
- Won B. Bang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-station deposition apparatus and method
- Publication number 20050271814
- Publication date Dec 8, 2005
- APPLIED MATERIALS, INC.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Anti-clogging nozzle for semiconductor processing
- Publication number 20050218115
- Publication date Oct 6, 2005
- Applied Materials, Inc.
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Clamshell and small volume chamber with fixed substrate support
- Publication number 20050139160
- Publication date Jun 30, 2005
- APPLIED MATERIALS, INC.
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plating system with integrated substrate inspection
- Publication number 20050083048
- Publication date Apr 21, 2005
- APPLIED MATERIALS, INC.
- Lawrence Chung-Lai Lei
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and system for controlling the presence of fluorine in refra...
- Publication number 20050059241
- Publication date Mar 17, 2005
- Moris Kori
- C30 - CRYSTAL GROWTH
Information Patent Application
Control of metal resistance in semiconductor products via integrate...
- Publication number 20050014299
- Publication date Jan 20, 2005
- Applied Materials, Inc.
- Susie Xiuru Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for vaporizing solid precursor for CVD or atom...
- Publication number 20040170403
- Publication date Sep 2, 2004
- APPLIED MATERIALS, INC.
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for measuring object thickness
- Publication number 20040140797
- Publication date Jul 22, 2004
- APPLIED MATERIALS, INC.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Application
Self aligning non contact shadow ring process kit
- Publication number 20040003780
- Publication date Jan 8, 2004
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- C30 - CRYSTAL GROWTH
Information Patent Application
Clamshell and small volume chamber with fixed substrate support
- Publication number 20030221780
- Publication date Dec 4, 2003
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-station deposition apparatus and method
- Publication number 20030194493
- Publication date Oct 16, 2003
- APPLIED MATERIALS, INC.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Lawrence C. Lei

Person

Patents Grantslast 30 patents

Systems and methods for making solar panels or components thereof

Systems and methods for making solar panels or components thereof

Substrate processing system, substrate conveying device and conveyi...

Apparatus and method of selective turning over a row of substrates...

Atomic layer deposition apparatus

Atomic layer deposition apparatus

Methods and systems of transferring, docking and processing substrates

Self aligning non contact shadow ring process kit

Multi-station deposition apparatus and method

Multi-station deposition apparatus and method

Method and apparatus for measuring a thickness of a layer of a wafer

Multi-station deposition apparatus and method

Apparatus and method of dynamically measuring thickness of a layer...

Method and apparatus for dynamically measuring the thickness of an...

Multi-station deposition apparatus and method

Clamshell and small volume chamber with fixed substrate support

Showerhead assembly for a processing chamber

Apparatus having platforms positioned for precise centering of semi...

Variable flow deposition apparatus and method in semiconductor subs...

Dual robot processing system

Apparatus and method for vaporizing solid precursor for CVD or atom...

Resonant chamber applicator for remote plasma source

Self aligning non contact shadow ring process kit

Bifurcated deposition process for depositing refractory metal layer...

Plasma reactor using inductive RF coupling, and processes

Cold trap assembly

Plasma reactor using inductive RF coupling, and processes

Tungsten chamber with stationary heater

Ceramic substrate support

Magnetic confinement in a plasma reactor having an RF bias electrode

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR MAKING SOLAR PANELS OR COMPONENTS THEREOF

SYSTEMS AND METHODS FOR MAKING SOLAR PANELS OR COMPONENTS THEREOF

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CONVEYING DEVICE AND CONVEYI...

APPARATUS AND METHOD OF TURNING OVER A SUBSTRATE IN A SUBSTRATE PRO...

ATOMIC LAYER DEPOSITION APPARATUS

MULTI-STATION DEPOSITION APPARATUS AND METHOD

MULTI-STATION DEPOSITION APPARATUS AND METHOD

METHOD AND APPARATUS FOR MEASURING OBJECT THICKNESS

SELF ALIGNING NON CONTACT SHADOW RING PROCESS KIT

ANTI-CLOGGING NOZZLE FOR SEMICONDUCTOR PROCESSING

METHOD FOR FORMING TUNGSTEN MATERIALS DURING VAPOR DEPOSITION PROCE...

Method and apparatus for measuring object thickness

Substrate support having brazed plates and resistance heater

METHOD FOR FORMING TUNGSTEN MATERIALS DURING VAPOR DEPOSITION PROCE...

ATOMIC LAYER DEPOSITION APPARATUS

Gas baffle and distributor for semiconductor processing chamber

Method and system for controlling the presence of fluorine in refra...

Anti-clogging nozzle for semiconductor processing

Uniformly compressed process chamber gate seal for semiconductor pr...

Multi-station deposition apparatus and method

Anti-clogging nozzle for semiconductor processing

Clamshell and small volume chamber with fixed substrate support

Plating system with integrated substrate inspection

Method and system for controlling the presence of fluorine in refra...

Control of metal resistance in semiconductor products via integrate...

Apparatus and method for vaporizing solid precursor for CVD or atom...

Method and apparatus for measuring object thickness

Self aligning non contact shadow ring process kit

Clamshell and small volume chamber with fixed substrate support

Multi-station deposition apparatus and method