Lee Peng Chua

Person

Beaverton, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cross flow conduit for foaming prevention in high convection platin...
- Patent number 12,157,949
- Issue date Dec 3, 2024
- Lam Research Corporation
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Cross flow conduit for foaming prevention in high convection platin...
- Patent number 11,585,007
- Issue date Feb 21, 2023
- Lam Research Corporation
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Cleaning electroplating substrate holders using reverse current dep...
- Patent number 11,542,630
- Issue date Jan 3, 2023
- Novellus Systems, Inc.
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Integrated elastomeric lipseal and cup bottom for reducing wafer st...
- Patent number 10,982,346
- Issue date Apr 20, 2021
- Lam Research Corporation
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Protecting anodes from passivation in alloy plating systems
- Patent number 10,954,605
- Issue date Mar 23, 2021
- Novellus Systems, Inc.
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and method for electrodeposition of metals with the use o...
- Patent number 10,923,340
- Issue date Feb 16, 2021
- Lam Research Corporation
- Burhanuddin Kagajwala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning electroplating substrate holders using reverse current dep...
- Patent number 10,538,855
- Issue date Jan 21, 2020
- Novellus Systems, Inc.
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Dynamic modulation of cross flow manifold during electroplating
- Patent number 10,233,556
- Issue date Mar 19, 2019
- Lam Research Corporation
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Methods and apparatus for wetting pretreatment for through resist m...
- Patent number 10,128,102
- Issue date Nov 13, 2018
- Novellus Systems, Inc.
- Lee Peng Chua
- B08 - CLEANING
Information Patent Grant
Protecting anodes from passivation in alloy plating systems
- Patent number 10,106,907
- Issue date Oct 23, 2018
- Novellus Systems, Inc.
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Methods and apparatuses for cleaning electroplating substrate holders
- Patent number 10,092,933
- Issue date Oct 9, 2018
- Novellus Systems, Inc.
- Santosh Kumar
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Convection optimization for mixed feature electroplating
- Patent number 10,094,035
- Issue date Oct 9, 2018
- Lam Research Corporation
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Edge flow element for electroplating apparatus
- Patent number 10,094,034
- Issue date Oct 9, 2018
- Lam Research Corporation
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Automated cleaning of wafer plating assembly
- Patent number 10,087,545
- Issue date Oct 2, 2018
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Integrated elastomeric lipseal and cup bottom for reducing wafer st...
- Patent number 10,053,793
- Issue date Aug 21, 2018
- Lam Research Corporation
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and method for electrodeposition of metals with the use o...
- Patent number 10,014,170
- Issue date Jul 3, 2018
- Lam Research Corporation
- Burhanuddin Kagajwala
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and method for modulating azimuthal uniformity in electro...
- Patent number 9,988,733
- Issue date Jun 5, 2018
- Lam Research Corporation
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Methods and apparatus for wetting pretreatment for through resist m...
- Patent number 9,613,833
- Issue date Apr 4, 2017
- Novellus Systems, Inc.
- Lee Peng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for dynamic control of plated uniformity with...
- Patent number 9,567,685
- Issue date Feb 14, 2017
- Lam Research Corporation
- Burhanuddin Kagajwala
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Protecting anodes from passivation in alloy plating systems
- Patent number 9,534,308
- Issue date Jan 3, 2017
- Novellus Systems, Inc.
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Cleaning electroplating substrate holders using reverse current dep...
- Patent number 9,476,139
- Issue date Oct 25, 2016
- Novellus Systems, Inc.
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatuses and methods for controlling PH in electroplating baths
- Patent number 9,359,688
- Issue date Jun 7, 2016
- Novellus Systems, Inc.
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Automated cleaning of wafer plating assembly
- Patent number 9,221,081
- Issue date Dec 29, 2015
- Novellus Systems, Inc.
- Steven T. Mayer
- B08 - CLEANING
Information Patent Grant
Transferring heat in loadlocks
- Patent number 8,288,288
- Issue date Oct 16, 2012
- Novellus Systems, Inc.
- Christopher Gage
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONTROL OF DISSOLVED GAS CONCENTRATION IN ELECTROPLATING BATHS
- Publication number 20240200223
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Gregory J. Kearns
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTRODEPOSITION OF METALS USING AN IONICALLY RESISTIVE IONICALLY...
- Publication number 20240141541
- Publication date May 2, 2024
- LAM RESEARCH CORPORATION
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SPATIALLY AND DIMENSIONALLY NON-UNIFORM CHANNELLED PLATE FOR TAILOR...
- Publication number 20240076795
- Publication date Mar 7, 2024
- LAM RESEARCH CORPORATION
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CROSS FLOW CONDUIT FOR FOAMING PREVENTION IN HIGH CONVECTION PLATIN...
- Publication number 20230175162
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
WAFER SHIELDING FOR PREVENTION OF LIPSEAL PLATE-OUT
- Publication number 20220396894
- Publication date Dec 15, 2022
- LAM RESEARCH CORPORATION
- Gregory J. Kearns
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
DIFFERENTIAL CONTRAST PLATING FOR ADVANCED PACKAGING APPLICATIONS
- Publication number 20220275531
- Publication date Sep 1, 2022
- LAM RESEARCH CORPORATION
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
GOLD THROUGH SILICON MASK PLATING
- Publication number 20220216104
- Publication date Jul 7, 2022
- LAM RESEARCH CORPORATION
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CROSS FLOW CONDUIT FOR FOAMING PREVENTION IN HIGH CONVECTION PLATIN...
- Publication number 20210395913
- Publication date Dec 23, 2021
- LAM RESEARCH CORPORATION
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CLEANING ELECTROPLATING SUBSTRATE HOLDERS USING REVERSE CURRENT DEP...
- Publication number 20200115816
- Publication date Apr 16, 2020
- Novellus Systems, Inc.
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
INTEGRATED ELASTOMERIC LIPSEAL AND CUP BOTTOM FOR REDUCING WAFER ST...
- Publication number 20190040544
- Publication date Feb 7, 2019
- LAM RESEARCH CORPORATION
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PROTECTING ANODES FROM PASSIVATION IN ALLOY PLATING SYSTEMS
- Publication number 20180371637
- Publication date Dec 27, 2018
- Novellus Systems, Inc.
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR MODULATING AZIMUTHAL UNIFORMITY IN ELECTRO...
- Publication number 20180312991
- Publication date Nov 1, 2018
- LAM RESEARCH CORPORATION
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR ELECTRODEPOSITION OF METALS WITH THE USE O...
- Publication number 20180286660
- Publication date Oct 4, 2018
- LAM RESEARCH CORPORATION
- Burhanuddin Kagajwala
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATING APPARATUS AND METHODS UTILIZING INDEPENDENT CONTROL...
- Publication number 20180258546
- Publication date Sep 13, 2018
- LAM RESEARCH CORPORATION
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
WIDE LIPSEAL FOR ELECTROPLATING
- Publication number 20180251907
- Publication date Sep 6, 2018
- LAM RESEARCH CORPORATION
- Kari Thorkelsson
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHODS AND APPARATUS FOR WETTING PRETREATMENT FOR THROUGH RESIST M...
- Publication number 20170148627
- Publication date May 25, 2017
- Novellus Systems, Inc.
- Lee Peng Chua
- B08 - CLEANING
Information Patent Application
PROTECTING ANODES FROM PASSIVATION IN ALLOY PLATING SYSTEMS
- Publication number 20170137960
- Publication date May 18, 2017
- Novellus Systems, Inc.
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
DURABLE LOW CURE TEMPERATURE HYDROPHOBIC COATING IN ELECTROPLATING...
- Publication number 20170073832
- Publication date Mar 16, 2017
- LAM RESEARCH CORPORATION
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
EDGE FLOW ELEMENT FOR ELECTROPLATING APPARATUS
- Publication number 20170058417
- Publication date Mar 2, 2017
- LAM RESEARCH CORPORATION
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
INTEGRATED ELASTOMERIC LIPSEAL AND CUP BOTTOM FOR REDUCING WAFER ST...
- Publication number 20170009369
- Publication date Jan 12, 2017
- LAM RESEARCH CORPORATION
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CLEANING ELECTROPLATING SUBSTRATE HOLDERS USING REVERSE CURRENT DEP...
- Publication number 20170009370
- Publication date Jan 12, 2017
- Novellus Systems, Inc.
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR MODULATING AZIMUTHAL UNIFORMITY IN ELECTRO...
- Publication number 20160362809
- Publication date Dec 15, 2016
- LAM RESEARCH CORPORATION
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR ELECTODEPOSITION OF METALS WITH THE USE OF...
- Publication number 20160333495
- Publication date Nov 17, 2016
- LAM RESEARCH CORPORATION
- Burhanuddin Kagajwala
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
DYNAMIC MODULATION OF CROSS FLOW MANIFOLD DURING ELECTROPLATING
- Publication number 20160265132
- Publication date Sep 15, 2016
- LAM RESEARCH CORPORATION
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR DYNAMIC CONTROL OF PLATED UNIFORMITY WITH...
- Publication number 20160215408
- Publication date Jul 28, 2016
- LAM RESEARCH CORPORATION
- Burhanuddin Kagajwala
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
AUTOMATED CLEANING OF WAFER PLATING ASSEMBLY
- Publication number 20160145761
- Publication date May 26, 2016
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHODS AND APPARATUS FOR WETTING PRETREATMENT FOR THROUGH RESIST M...
- Publication number 20140230860
- Publication date Aug 21, 2014
- Novellus Systems, Inc.
- Lee Peng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTING ANODES FROM PASSIVATION IN ALLOY PLATING SYSTEMS
- Publication number 20130334052
- Publication date Dec 19, 2013
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHODS AND APPARATUSES FOR CLEANING ELECTROPLATING SUBSTRATE HOLDERS
- Publication number 20130292254
- Publication date Nov 7, 2013
- Santosh Kumar
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CLEANING ELECTROPLATING SUBSTRATE HOLDERS USING REVERSE CURRENT DEP...
- Publication number 20130256146
- Publication date Oct 3, 2013
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Lee Peng Chua

Person

Patents Grantslast 30 patents

Cross flow conduit for foaming prevention in high convection platin...

Cross flow conduit for foaming prevention in high convection platin...

Cleaning electroplating substrate holders using reverse current dep...

Integrated elastomeric lipseal and cup bottom for reducing wafer st...

Protecting anodes from passivation in alloy plating systems

Apparatus and method for electrodeposition of metals with the use o...

Cleaning electroplating substrate holders using reverse current dep...

Dynamic modulation of cross flow manifold during electroplating

Methods and apparatus for wetting pretreatment for through resist m...

Protecting anodes from passivation in alloy plating systems

Methods and apparatuses for cleaning electroplating substrate holders

Convection optimization for mixed feature electroplating

Edge flow element for electroplating apparatus

Automated cleaning of wafer plating assembly

Integrated elastomeric lipseal and cup bottom for reducing wafer st...

Apparatus and method for electrodeposition of metals with the use o...

Apparatus and method for modulating azimuthal uniformity in electro...

Methods and apparatus for wetting pretreatment for through resist m...

Apparatus and method for dynamic control of plated uniformity with...

Protecting anodes from passivation in alloy plating systems

Cleaning electroplating substrate holders using reverse current dep...

Apparatuses and methods for controlling PH in electroplating baths

Automated cleaning of wafer plating assembly

Transferring heat in loadlocks

Patents Applicationslast 30 patents

CONTROL OF DISSOLVED GAS CONCENTRATION IN ELECTROPLATING BATHS

ELECTRODEPOSITION OF METALS USING AN IONICALLY RESISTIVE IONICALLY...

SPATIALLY AND DIMENSIONALLY NON-UNIFORM CHANNELLED PLATE FOR TAILOR...

CROSS FLOW CONDUIT FOR FOAMING PREVENTION IN HIGH CONVECTION PLATIN...

WAFER SHIELDING FOR PREVENTION OF LIPSEAL PLATE-OUT

DIFFERENTIAL CONTRAST PLATING FOR ADVANCED PACKAGING APPLICATIONS

GOLD THROUGH SILICON MASK PLATING

CROSS FLOW CONDUIT FOR FOAMING PREVENTION IN HIGH CONVECTION PLATIN...

CLEANING ELECTROPLATING SUBSTRATE HOLDERS USING REVERSE CURRENT DEP...

INTEGRATED ELASTOMERIC LIPSEAL AND CUP BOTTOM FOR REDUCING WAFER ST...

PROTECTING ANODES FROM PASSIVATION IN ALLOY PLATING SYSTEMS

APPARATUS AND METHOD FOR MODULATING AZIMUTHAL UNIFORMITY IN ELECTRO...

APPARATUS AND METHOD FOR ELECTRODEPOSITION OF METALS WITH THE USE O...

ELECTROPLATING APPARATUS AND METHODS UTILIZING INDEPENDENT CONTROL...

WIDE LIPSEAL FOR ELECTROPLATING

METHODS AND APPARATUS FOR WETTING PRETREATMENT FOR THROUGH RESIST M...

PROTECTING ANODES FROM PASSIVATION IN ALLOY PLATING SYSTEMS

DURABLE LOW CURE TEMPERATURE HYDROPHOBIC COATING IN ELECTROPLATING...

EDGE FLOW ELEMENT FOR ELECTROPLATING APPARATUS

INTEGRATED ELASTOMERIC LIPSEAL AND CUP BOTTOM FOR REDUCING WAFER ST...

CLEANING ELECTROPLATING SUBSTRATE HOLDERS USING REVERSE CURRENT DEP...

APPARATUS AND METHOD FOR MODULATING AZIMUTHAL UNIFORMITY IN ELECTRO...

APPARATUS AND METHOD FOR ELECTODEPOSITION OF METALS WITH THE USE OF...

DYNAMIC MODULATION OF CROSS FLOW MANIFOLD DURING ELECTROPLATING

APPARATUS AND METHOD FOR DYNAMIC CONTROL OF PLATED UNIFORMITY WITH...

AUTOMATED CLEANING OF WAFER PLATING ASSEMBLY

METHODS AND APPARATUS FOR WETTING PRETREATMENT FOR THROUGH RESIST M...

PROTECTING ANODES FROM PASSIVATION IN ALLOY PLATING SYSTEMS

METHODS AND APPARATUSES FOR CLEANING ELECTROPLATING SUBSTRATE HOLDERS

CLEANING ELECTROPLATING SUBSTRATE HOLDERS USING REVERSE CURRENT DEP...