Leonid Belau

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for etching features in a stack
- Patent number 10,847,374
- Issue date Nov 24, 2020
- Lam Research Corporation
- Leonid Belau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching features in dielectric layers
- Patent number 9,673,058
- Issue date Jun 6, 2017
- Lam Research Corporation
- Scott Briggs
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROFILE OPTIMIZATION FOR HIGH ASPECT RATIO MEMORY USING AN ETCH FRO...
- Publication number 20230369061
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Leonid BELAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING FOR LOCALIZED DELIVERY OF TUNING GAS
- Publication number 20230128551
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Yohan SEEPERSAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH ASPECT RATIO DIELECTRIC ETCH WITH CHLORINE
- Publication number 20230127597
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Rui Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ASPECT RATIO ETCH WITH INFINITE SELECTIVITY
- Publication number 20230081817
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Leonid Belau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER OPENING SYSTEM
- Publication number 20200194234
- Publication date Jun 18, 2020
- LAM RESEARCH CORPORATION
- Leonid BELAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Managing Byproduct Material Accumulation Du...
- Publication number 20200105508
- Publication date Apr 2, 2020
- LAM RESEARCH CORPORATION
- Leonid Belau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING CHAMBER
- Publication number 20190157051
- Publication date May 23, 2019
- LAM RESEARCH CORPORATION
- Leonid BELAU
- B08 - CLEANING
Information Patent Application
METHOD FOR ETCHING FEATURES IN A STACK
- Publication number 20190131135
- Publication date May 2, 2019
- LAM RESEARCH CORPORATION
- Leonid BELAU
- H01 - BASIC ELECTRIC ELEMENTS

Leonid Belau

Person

Patents Grantslast 30 patents

Method for etching features in a stack

Method for etching features in dielectric layers

Patents Applicationslast 30 patents

PROFILE OPTIMIZATION FOR HIGH ASPECT RATIO MEMORY USING AN ETCH FRO...

EDGE RING FOR LOCALIZED DELIVERY OF TUNING GAS

HIGH ASPECT RATIO DIELECTRIC ETCH WITH CHLORINE

HIGH ASPECT RATIO ETCH WITH INFINITE SELECTIVITY

VACUUM CHAMBER OPENING SYSTEM

Methods and Systems for Managing Byproduct Material Accumulation Du...

METHOD FOR CLEANING CHAMBER

METHOD FOR ETCHING FEATURES IN A STACK