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Loren R. Jacobs

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  • Chandler, AZ, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Reactor system and method to reduce residue buildup during a film d...
    • Patent number 12,043,899
    • Issue date Jul 23, 2024
    • ASM IP Holding B.V.
    • Hyeongeu Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactor system and method to reduce residue buildup during a film d...
    • Patent number 11,390,950
    • Issue date Jul 19, 2022
    • ASM IP Holding B.V.
    • Hyeongeu Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods for thermally calibrating reaction chambers
    • Patent number 10,943,771
    • Issue date Mar 9, 2021
    • ASM IP Holding B.V.
    • Hyeongeu Kim
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Methods for thermally calibrating reaction chambers
    • Patent number 10,643,826
    • Issue date May 5, 2020
    • ASM IP Holdings B.V.
    • Hyeongeu Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thermocouple
    • Patent number 8,616,765
    • Issue date Dec 31, 2013
    • ASM America, Inc.
    • Buz Darabnia
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thermocouple
    • Patent number 8,262,287
    • Issue date Sep 11, 2012
    • ASM America, Inc.
    • Buz Darabnia
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Redundant temperature sensor for semiconductor processing chambers
    • Patent number 7,993,057
    • Issue date Aug 9, 2011
    • ASM America, Inc.
    • Ravinder Aggarwal
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Thermocouple
    • Patent number 7,874,726
    • Issue date Jan 25, 2011
    • ASM America, Inc.
    • Loren Jacobs
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Wafer support system
    • Patent number 7,655,093
    • Issue date Feb 2, 2010
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 7,186,298
    • Issue date Mar 6, 2007
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus and methods for preventing rotational slippage between a...
    • Patent number 7,169,234
    • Issue date Jan 30, 2007
    • ASM America, Inc.
    • Thomas M. Weeks
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Self-centering wafer support system
    • Patent number 6,893,507
    • Issue date May 17, 2005
    • ASM America, Inc.
    • Matthew G. Goodman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate holder with deep annular groove to prevent edge heat loss
    • Patent number 6,709,267
    • Issue date Mar 23, 2004
    • ASM America, Inc.
    • Mark Hawkins
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,692,576
    • Issue date Feb 17, 2004
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,491,757
    • Issue date Dec 10, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process chamber with downstream getter plate
    • Patent number 6,464,792
    • Issue date Oct 15, 2002
    • ASM America, Inc.
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Low mass wafer support system
    • Patent number 6,454,865
    • Issue date Sep 24, 2002
    • ASM America, Inc.
    • Matthew G. Goodman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,454,866
    • Issue date Sep 24, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,343,183
    • Issue date Jan 29, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Long life high temperature process chamber
    • Patent number 6,325,858
    • Issue date Dec 4, 2001
    • ASM America, Inc.
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate transfer system for semiconductor processing equipment
    • Patent number 6,293,749
    • Issue date Sep 25, 2001
    • ASM America, Inc.
    • Ivo Raaijmakers
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer support system
    • Patent number 6,203,622
    • Issue date Mar 20, 2001
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,113,702
    • Issue date Sep 5, 2000
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process chamber with inner support
    • Patent number 6,093,252
    • Issue date Jul 25, 2000
    • ASM America, Inc.
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate transfer system for semiconductor processing equipment
    • Patent number 6,068,441
    • Issue date May 30, 2000
    • ASM America, Inc.
    • Ivo Raaijmakers
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer support system
    • Patent number 6,053,982
    • Issue date Apr 25, 2000
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM D...
    • Publication number 20220307139
    • Publication date Sep 29, 2022
    • ASM IP HOLDING B.V.
    • Hyeongeu Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR THERMALLY CALIBRATING REACTION CHAMBERS
    • Publication number 20200227243
    • Publication date Jul 16, 2020
    • ASM IP HOLDING B.V.
    • Hyeongeu Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM D...
    • Publication number 20180195174
    • Publication date Jul 12, 2018
    • ASM IP HOLDING B.V.
    • Hyeongeu Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR THERMALLY CALIBRATING REACTION CHAMBERS
    • Publication number 20180114680
    • Publication date Apr 26, 2018
    • ASM IP HOLDING B.V.
    • Hyeongeu Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THERMOCOUPLE
    • Publication number 20120310440
    • Publication date Dec 6, 2012
    • ASM AMERICA, INC
    • Buz Darabnia
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THERMOCOUPLE
    • Publication number 20100145547
    • Publication date Jun 10, 2010
    • ASM AMERICA, INC
    • Buz Darabnia
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REDUNDANT TEMPERATURE SENSOR FOR SEMICONDUCTOR PROCESSING CHAMBERS
    • Publication number 20090159000
    • Publication date Jun 25, 2009
    • ASM AMERICA, INC
    • Ravinder Aggarwal
    • G01 - MEASURING TESTING
  • Information Patent Application

    THERMOCOUPLE
    • Publication number 20080289574
    • Publication date Nov 27, 2008
    • ASM AMERICA, INC
    • Loren Jacobs
    • G01 - MEASURING TESTING
  • Information Patent Application

    WAFER SUPPORT SYSTEM
    • Publication number 20070131173
    • Publication date Jun 14, 2007
    • ASM AMERICA, INC
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS AND METHODS FOR PREVENTING ROTATIONAL SLIPPAGE BETWEEN A...
    • Publication number 20070056150
    • Publication date Mar 15, 2007
    • ASM AMERICA, INC
    • Thomas M. Weeks
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Low-mass susceptor improvements
    • Publication number 20050183829
    • Publication date Aug 25, 2005
    • Matthew G. Goodman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Apparatus and methods for preventing rotational slippage between a...
    • Publication number 20050166849
    • Publication date Aug 4, 2005
    • Thomas M. Weeks
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer support system
    • Publication number 20040198153
    • Publication date Oct 7, 2004
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer support system
    • Publication number 20030075274
    • Publication date Apr 24, 2003
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Self-centering wafer support system
    • Publication number 20030029571
    • Publication date Feb 13, 2003
    • Matthew G. Goodman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Process chamber with rectangular temperature compensation ring
    • Publication number 20020179586
    • Publication date Dec 5, 2002
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Low mass wafer support system
    • Publication number 20020043337
    • Publication date Apr 18, 2002
    • Matthew G. Goodman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer support system
    • Publication number 20010054390
    • Publication date Dec 27, 2001
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...