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Louis N. Koppel
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Menlo Park, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Calibration and alignment of X-ray reflectometric systems
Patent number
6,987,832
Issue date
Jan 17, 2006
KLA-Tencor Technologies Corp.
Louis N. Koppel
G01 - MEASURING TESTING
Information
Patent Grant
Detector-shield assembly for X-ray reflectometric system
Patent number
6,770,886
Issue date
Aug 3, 2004
Therma-Wave, Inc.
Louis N. Koppel
G01 - MEASURING TESTING
Information
Patent Grant
Calibration and alignment of X-ray reflectometric systems
Patent number
6,768,785
Issue date
Jul 27, 2004
Therma-Wave, Inc.
Louis N. Koppel
G01 - MEASURING TESTING
Information
Patent Grant
X-ray reflectance measurement system with adjustable resolution
Patent number
6,744,850
Issue date
Jun 1, 2004
Therma-Wave, Inc.
Jeffrey T. Fanton
G01 - MEASURING TESTING
Information
Patent Grant
Calibration and alignment of X-ray reflectometric systems
Patent number
6,643,354
Issue date
Nov 4, 2003
Therma-Wave, Inc.
Louis N. Koppel
G01 - MEASURING TESTING
Information
Patent Grant
System and method for X-ray reflectometry measurement of low densit...
Patent number
6,507,634
Issue date
Jan 14, 2003
Therma-Wave, Inc.
Louis N. Koppel
G01 - MEASURING TESTING
Information
Patent Grant
Calibration and alignment of X-ray reflectometric systems
Patent number
6,453,006
Issue date
Sep 17, 2002
Therma-Wave, Inc.
Louis N. Koppel
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Calibration and alignment of X-ray reflectometric systems
Publication number
20040218717
Publication date
Nov 4, 2004
Louis N. Koppel
G01 - MEASURING TESTING
Information
Patent Application
Calibration and alignment of X-ray reflectometric systems
Publication number
20040052330
Publication date
Mar 18, 2004
Louis N. Koppel
G01 - MEASURING TESTING
Information
Patent Application
Calibration and alignment of X-ray reflectometric systems
Publication number
20020110218
Publication date
Aug 15, 2002
Louis N. Koppel
G01 - MEASURING TESTING
Information
Patent Application
X-ray reflectance measurement system with adjustable resolution
Publication number
20020097837
Publication date
Jul 25, 2002
Jeffrey T. Fanton
G01 - MEASURING TESTING