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Lynda C. Mantalas
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Campbell, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Chemical mechanical polishing test structures and methods for inspe...
Patent number
7,655,482
Issue date
Feb 2, 2010
KLA Tencor
Akella V. S. Satya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical mechanical polishing test structures and methods for inspe...
Patent number
7,179,661
Issue date
Feb 20, 2007
KLA Tencor
Akella V. S. Satya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Test structures and methods for inspection of semiconductor integra...
Patent number
6,921,672
Issue date
Jul 26, 2005
KLA-Tencor Technologies Corporation
Akella V. S. Satya
G01 - MEASURING TESTING
Information
Patent Grant
Inspectable buried test structures and methods for inspecting the same
Patent number
6,576,923
Issue date
Jun 10, 2003
KLA-Tencor Corporation
Akella V. S. Satya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Test structures and methods for inspection of semiconductor integra...
Patent number
6,528,818
Issue date
Mar 4, 2003
KLA Tencor
Akella V. S. Satya
G01 - MEASURING TESTING
Information
Patent Grant
Inspectable buried test structures and methods for inspecting the same
Patent number
6,509,197
Issue date
Jan 21, 2003
KLA-Tencor Corporation
Akella V. S. Satya
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
TEST STRUCTURES AND METHODS FOR INSPECTION OF SEMICONDUCTOR INTEGRA...
Publication number
20080246030
Publication date
Oct 9, 2008
KLA-TENCOR
Akella V.S. Satya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL MECHANICAL POLISHING TEST STRUCTURES AND METHODS FOR INSPE...
Publication number
20070111342
Publication date
May 17, 2007
KLA-TENCOR
Akella V. S. Satya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Test structures and methods for inspection of semiconductor integra...
Publication number
20030096436
Publication date
May 22, 2003
KLA-Tencor Technologies Corporation
Akella V. S. Satya
G01 - MEASURING TESTING
Information
Patent Application
Inspectable buried test structures and methods for inspecting the same
Publication number
20020187582
Publication date
Dec 12, 2002
KLA-Tencor Corporation
Akella V. S. Satya
H01 - BASIC ELECTRIC ELEMENTS