Mahadevan GanapathiSubramanian

Person

Cedar Park, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Safe separation for nano imprinting
- Patent number 11,020,894
- Issue date Jun 1, 2021
- Molecular Imprints, Inc.
- Se-Hyuk Im
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Asymmetric template shape modulation for partial field imprinting
- Patent number 10,578,964
- Issue date Mar 3, 2020
- Canon Nanotechnologies, Inc.
- Mahadevan Ganapathisubramanian
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mold, imprint apparatus, and method of manufacturing article
- Patent number 10,409,156
- Issue date Sep 10, 2019
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Large area imprint lithography
- Patent number 9,616,614
- Issue date Apr 11, 2017
- Canon Nanotechnologies, Inc.
- Byung-Jin Choi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Chucking system with recessed support feature
- Patent number 9,529,274
- Issue date Dec 27, 2016
- Canon Nanotechnologies, Inc.
- Mahadevan GanapathiSubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Dual zone template chuck
- Patent number 9,164,375
- Issue date Oct 20, 2015
- Canon Nanotechnologies, Inc.
- Mahadevan Ganapathisubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Safe separation for nano imprinting
- Patent number 8,968,620
- Issue date Mar 3, 2015
- Canon Nanotechnologies, Inc.
- Se-Hyuk Im
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Chucking system with recessed support feature
- Patent number 8,913,230
- Issue date Dec 16, 2014
- Canon Nanotechnologies, Inc.
- Mahadevan GanapathiSubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Separation in an imprint lithography process
- Patent number 8,309,008
- Issue date Nov 13, 2012
- Molecular Imprints, Inc.
- Byung-Jin Choi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Energy sources for curing in an imprint lithography system
- Patent number 8,237,133
- Issue date Aug 7, 2012
- Molecular Imprints, Inc.
- Mahadevan Ganapathisubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate alignment
- Patent number 8,231,821
- Issue date Jul 31, 2012
- Molecular Imprints, Inc.
- Byung-Jin Choi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint lithography system and method
- Patent number 8,215,946
- Issue date Jul 10, 2012
- Molecular Imprints, Inc.
- Mahadevan GanapathiSubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Bifurcated contact printing technique
- Patent number 7,906,058
- Issue date Mar 15, 2011
- Molecular Imprints, Inc.
- Mahadevan GanapathiSubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Technique for separating a mold from solidified imprinting material
- Patent number 7,803,308
- Issue date Sep 28, 2010
- Molecular Imprints, Inc.
- Mahadevan GanapathiSubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for expelling gas positioned between a substrate and a mold
- Patent number 7,641,840
- Issue date Jan 5, 2010
- Molecular Imprints, Inc.
- Byung-Jin Choi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Adaptive shape substrate support method
- Patent number 7,504,268
- Issue date Mar 17, 2009
- Board of Regents, The University of Texas System
- Mahadevan GanapathiSubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Adaptive shape substrate support system
- Patent number 7,307,697
- Issue date Dec 11, 2007
- Board of Regents, The University of Texas System
- Mahadevan GanapathiSubramanian
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Safe Separation for Nano Imprinting
- Publication number 20190061228
- Publication date Feb 28, 2019
- Molecular Imprints, Inc.
- Se-Hyuk Im
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MOLD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20160236400
- Publication date Aug 18, 2016
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Asymmetric Template Shape Modulation for Partial Field Imprinting
- Publication number 20150183151
- Publication date Jul 2, 2015
- Canon Nanotechnologies, Inc.
- Mahadevan Ganapathisubramanian
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SAFE SEPARATION FOR NANO IMPRINTING
- Publication number 20150165671
- Publication date Jun 18, 2015
- Canon Nanotechnologies, Inc.
- Se-Hyuk Im
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
CHUCKING SYSTEM WITH RECESSED SUPPORT FEATURE
- Publication number 20150091230
- Publication date Apr 2, 2015
- Canon Nanotechnologies, Inc.
- Mahadevan GanapathiSubramanian
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
LARGE AREA IMPRINT LITHOGRAPHY
- Publication number 20130214452
- Publication date Aug 22, 2013
- Molecular Imprints, Inc.
- Byung-Jin Choi
- B82 - NANO-TECHNOLOGY
Information Patent Application
SAFE DEPARATION FOR NANO IMPRINTING
- Publication number 20110260361
- Publication date Oct 27, 2011
- Molecular Imprints, Inc.
- Se-Hyuk Im
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
CHUCKING SYSTEM WITH RECESSED SUPPORT FEATURE
- Publication number 20110001954
- Publication date Jan 6, 2011
- Molecular Imprints, Inc.
- Mahadevan GanapathiSubramanian
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
DUAL ZONE TEMPLATE CHUCK
- Publication number 20100320645
- Publication date Dec 23, 2010
- Molecular Imprints, Inc.
- Mahadevan Ganapathisubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Application
Separation in an Imprint Lithography Process
- Publication number 20100110409
- Publication date May 6, 2010
- Molecular Imprints, Inc.
- Byung-Jin Choi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Substrate Alignment
- Publication number 20100109202
- Publication date May 6, 2010
- Molecular Imprints, Inc.
- Byung-Jin Choi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Energy Sources for Curing in an Imprint Lithography System
- Publication number 20100090130
- Publication date Apr 15, 2010
- Molecular Imprints, Inc.
- Mahadevan Ganapathisubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT LITHOGRAPHY SYSTEM AND METHOD
- Publication number 20100072652
- Publication date Mar 25, 2010
- Molecular Imprints, Inc.
- Mahadevan GanapathiSubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR EXPELLING GAS POSITIONED BETWEEN A SUBSTRATE AND A MOLD
- Publication number 20070228589
- Publication date Oct 4, 2007
- Molecular Imprints, Inc.
- Byung-Jin Choi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Bifurcated contact printing technique
- Publication number 20070126150
- Publication date Jun 7, 2007
- Molecular Imprints, Inc.
- Mahadevan GanapathiSubramanian
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Technique for separating a mold from solidified imprinting material
- Publication number 20070126156
- Publication date Jun 7, 2007
- Molecular Imprints, Inc.
- GanapathiSubramanian Mahadevan
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Adaptive shape substrate support method
- Publication number 20050263077
- Publication date Dec 1, 2005
- Board of Regents, The University of Texas System
- Mahadevan GanapathiSubramanian
- B82 - NANO-TECHNOLOGY
Information Patent Application
Adaptive shape substrate support system
- Publication number 20050264134
- Publication date Dec 1, 2005
- Board of Regents, The University of Texas System
- Mahadevan GanapathiSubramanian
- B82 - NANO-TECHNOLOGY

Mahadevan GanapathiSubramanian

Person

Patents Grantslast 30 patents

Safe separation for nano imprinting

Asymmetric template shape modulation for partial field imprinting

Mold, imprint apparatus, and method of manufacturing article

Large area imprint lithography

Chucking system with recessed support feature

Dual zone template chuck

Safe separation for nano imprinting

Chucking system with recessed support feature

Separation in an imprint lithography process

Energy sources for curing in an imprint lithography system

Substrate alignment

Imprint lithography system and method

Bifurcated contact printing technique

Technique for separating a mold from solidified imprinting material

Method for expelling gas positioned between a substrate and a mold

Adaptive shape substrate support method

Adaptive shape substrate support system

Patents Applicationslast 30 patents

Safe Separation for Nano Imprinting

MOLD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

Asymmetric Template Shape Modulation for Partial Field Imprinting

SAFE SEPARATION FOR NANO IMPRINTING

CHUCKING SYSTEM WITH RECESSED SUPPORT FEATURE

LARGE AREA IMPRINT LITHOGRAPHY

SAFE DEPARATION FOR NANO IMPRINTING

CHUCKING SYSTEM WITH RECESSED SUPPORT FEATURE

DUAL ZONE TEMPLATE CHUCK

Separation in an Imprint Lithography Process

Substrate Alignment

Energy Sources for Curing in an Imprint Lithography System

IMPRINT LITHOGRAPHY SYSTEM AND METHOD

METHOD FOR EXPELLING GAS POSITIONED BETWEEN A SUBSTRATE AND A MOLD

Bifurcated contact printing technique

Technique for separating a mold from solidified imprinting material

Adaptive shape substrate support method

Adaptive shape substrate support system