Manfred Engelhardt

Person

Deutschald, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Process tools and methods of forming devices using process tools
- Patent number 8,993,422
- Issue date Mar 31, 2015
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnect arrangement and associated production methods
- Patent number 8,877,631
- Issue date Nov 4, 2014
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MIM capacitor and associated production method
- Patent number 8,709,906
- Issue date Apr 29, 2014
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MIM capacitor and associated production method
- Patent number 8,093,637
- Issue date Jan 10, 2012
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic component comprising an electrically conductive connecti...
- Patent number 7,321,097
- Issue date Jan 22, 2008
- Infineon Technologies AG
- Manfred Engelhardt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Process for producing and removing a mask layer
- Patent number 7,129,173
- Issue date Oct 31, 2006
- Infineon Technologies AG
- Heike Drummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing an electrode configuration and method of electr...
- Patent number 7,045,070
- Issue date May 16, 2006
- Infineon Technologies AG
- Volker Weinrich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing an integrated circuit configuration
- Patent number 6,998,338
- Issue date Feb 14, 2006
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for producing ultrathin homogenous metal layers
- Patent number 6,946,386
- Issue date Sep 20, 2005
- Infineon Technologies AG
- Gernot Steinlesberger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing an integrated circuit having at least one meta...
- Patent number 6,930,052
- Issue date Aug 16, 2005
- Infineon Technologies AG
- Siegfried Schwarzl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnect arrangement and method for fabricating an interconnect...
- Patent number 6,888,244
- Issue date May 3, 2005
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating integrated circuit arrangements, and associa...
- Patent number 6,864,175
- Issue date Mar 8, 2005
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit configuration using spacers as a diffusion barri...
- Patent number 6,828,680
- Issue date Dec 7, 2004
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of patterning ferroelectric layers
- Patent number 6,730,562
- Issue date May 4, 2004
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a semiconductor memory element
- Patent number 6,716,643
- Issue date Apr 6, 2004
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a semiconductor memory component
- Patent number 6,566,220
- Issue date May 20, 2003
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structuring method
- Patent number 6,454,956
- Issue date Sep 24, 2002
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating trenches having hallows along the trenches s...
- Patent number 6,387,773
- Issue date May 14, 2002
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structuring method
- Patent number 6,315,913
- Issue date Nov 13, 2001
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Easy to manufacture integrated semiconductor memory configuration w...
- Patent number 6,316,802
- Issue date Nov 13, 2001
- Infineon Technologies AG
- Günther Schindler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structuring process
- Patent number 6,296,777
- Issue date Oct 2, 2001
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing structures having a high aspect ratio and stru...
- Patent number 6,210,595
- Issue date Apr 3, 2001
- Infineon Technologies AG
- Volker Weinrich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for generating a space in a structure
- Patent number 6,030,900
- Issue date Feb 29, 2000
- Siemens Aktiengesellschaft
- Thomas Grassl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated circuit arrangement having at least two mutually insulat...
- Patent number 5,990,536
- Issue date Nov 23, 1999
- Siemens Aktiengesellschaft
- Frank Lau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for structuring a layer using a ring electrode and multiple...
- Patent number 5,332,468
- Issue date Jul 26, 1994
- Siemens Aktiengesellschaft
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing trench structures in silicon substrates for VL...
- Patent number 5,118,383
- Issue date Jun 2, 1992
- Siemens Aktiengesellschaft
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Process Tools and Methods of Forming Devices Using Process Tools
- Publication number 20140134829
- Publication date May 15, 2014
- INFINEON TECHNOLOGIES AG
- Manfred Engelhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MIM CAPACITOR AND ASSOCIATED PRODUCTION METHOD
- Publication number 20120100689
- Publication date Apr 26, 2012
- INFINEON TECHNOLOGIES AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Forming Self-Aligned Air-Gaps Using Self-Aligned Capping...
- Publication number 20070218677
- Publication date Sep 20, 2007
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MIM capacitor and associated production method
- Publication number 20070111431
- Publication date May 17, 2007
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Interconnect arrangement and associated production methods
- Publication number 20060199368
- Publication date Sep 7, 2006
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process for depositing a catalyst
- Publication number 20050118342
- Publication date Jun 2, 2005
- Manfred Engelhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for producing ultrathin homogenous metal layers
- Publication number 20040253806
- Publication date Dec 16, 2004
- Infineon Technologies AG
- Gernot Steinlesberger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Interconnect arrangement and method for fabricating an interconnect...
- Publication number 20040113274
- Publication date Jun 17, 2004
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Biosensor, biosensor array, method for producing an electrode of a...
- Publication number 20040094414
- Publication date May 20, 2004
- Manfred Engelhardt
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Method for producing an integrated circuit having at least one meta...
- Publication number 20040092093
- Publication date May 13, 2004
- Siegfried Schwarzl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process for producing and removing a mask layer
- Publication number 20040048479
- Publication date Mar 11, 2004
- Heike Drummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of producing an integrated circuit configuration
- Publication number 20040038507
- Publication date Feb 26, 2004
- Infineon Technologies AG
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electronic component comprising an electrically conductive connecti...
- Publication number 20030179559
- Publication date Sep 25, 2003
- Manfred Engelhardt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method of patterning ferroelectric layers
- Publication number 20030157734
- Publication date Aug 21, 2003
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating a semiconductor memory component
- Publication number 20020115253
- Publication date Aug 22, 2002
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for producing an integrated circuit having at least one meta...
- Publication number 20020098679
- Publication date Jul 25, 2002
- Siegfried Schwarzl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for carrying out a plasma etching process
- Publication number 20020094692
- Publication date Jul 18, 2002
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating integrated circuit arrangements, and associa...
- Publication number 20020076572
- Publication date Jun 20, 2002
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electronic component and method for etching an insulating layer of...
- Publication number 20010055664
- Publication date Dec 27, 2001
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching method
- Publication number 20010054599
- Publication date Dec 27, 2001
- Manfred Engelhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated circuit configuration and production method
- Publication number 20010026952
- Publication date Oct 4, 2001
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS

Manfred Engelhardt

Person

Patents Grantslast 30 patents

Process tools and methods of forming devices using process tools

Interconnect arrangement and associated production methods

MIM capacitor and associated production method

MIM capacitor and associated production method

Electronic component comprising an electrically conductive connecti...

Process for producing and removing a mask layer

Method of producing an electrode configuration and method of electr...

Method of producing an integrated circuit configuration

Process for producing ultrathin homogenous metal layers

Method for producing an integrated circuit having at least one meta...

Interconnect arrangement and method for fabricating an interconnect...

Method for fabricating integrated circuit arrangements, and associa...

Integrated circuit configuration using spacers as a diffusion barri...

Method of patterning ferroelectric layers

Method for producing a semiconductor memory element

Method for fabricating a semiconductor memory component

Structuring method

Method for fabricating trenches having hallows along the trenches s...

Structuring method

Easy to manufacture integrated semiconductor memory configuration w...

Structuring process

Method for producing structures having a high aspect ratio and stru...

Process for generating a space in a structure

Integrated circuit arrangement having at least two mutually insulat...

Method for structuring a layer using a ring electrode and multiple...

Method for producing trench structures in silicon substrates for VL...

Patents Applicationslast 30 patents

Process Tools and Methods of Forming Devices Using Process Tools

MIM CAPACITOR AND ASSOCIATED PRODUCTION METHOD

Method of Forming Self-Aligned Air-Gaps Using Self-Aligned Capping...

MIM capacitor and associated production method

Interconnect arrangement and associated production methods

Process for depositing a catalyst

Process for producing ultrathin homogenous metal layers

Interconnect arrangement and method for fabricating an interconnect...

Biosensor, biosensor array, method for producing an electrode of a...

Method for producing an integrated circuit having at least one meta...

Process for producing and removing a mask layer

Method of producing an integrated circuit configuration

Electronic component comprising an electrically conductive connecti...

Method of patterning ferroelectric layers

Method for fabricating a semiconductor memory component

Method for producing an integrated circuit having at least one meta...

Method for carrying out a plasma etching process

Method for fabricating integrated circuit arrangements, and associa...

Electronic component and method for etching an insulating layer of...

Etching method

Integrated circuit configuration and production method