Marc de Leeuwe

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Templeton, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Removal of CMP and post-CMP residue from semiconductors using super...
- Patent number 7,064,070
- Issue date Jun 20, 2006
- Tokyo Electron Limited
- William H. Mullee
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Removal of CMP residue from semiconductor substrate using supercrit...
- Patent number 6,537,916
- Issue date Mar 25, 2003
- Tokyo Electron Limited
- William H. Mullee
- B08 - CLEANING
Information Patent Grant
Removal of CMP residue from semiconductors using supercritical carb...
- Patent number 6,277,753
- Issue date Aug 21, 2001
- Supercritical Systems Inc.
- William H. Mullee
- B08 - CLEANING