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Marina V. Plat
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Multilayer low reflectivity hard mask and process therefor
Patent number
8,309,457
Issue date
Nov 13, 2012
Advanced Micro Devices, Inc.
Kouros Ghandehari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multilayer low reflectivity hard mask and process therefor
Patent number
8,048,797
Issue date
Nov 1, 2011
Advanced Micro Devices, Inc.
Kouros Ghandehari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Anti-reflective interpoly dielectric
Patent number
7,964,905
Issue date
Jun 21, 2011
Spansion LLC
Robert B. Ogle, Jr.
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integration approach to form the core floating gate for flash memor...
Patent number
7,659,166
Issue date
Feb 9, 2010
GLOBALFOUNDRIES Inc.
Marina V. Plat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multilayer low reflectivity hard mask and process therefor
Patent number
7,538,026
Issue date
May 26, 2009
Advanced Micro Devices, Inc.
Kouros Ghandehari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for designing grating structures for use in situ scatterome...
Patent number
7,427,457
Issue date
Sep 23, 2008
Advanced Micro Devices, Inc.
Marina V. Plat
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Two mask photoresist exposure pattern for dense and isolated regions
Patent number
7,368,225
Issue date
May 6, 2008
Advanced Micro Devices, Inc.
Ramkumar Subramanian
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for semiconductor gate line dimension reduction
Patent number
7,268,066
Issue date
Sep 11, 2007
Advanced Micro Devices, Inc.
Douglas J. Bonser
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning with rigid organic under-layer
Patent number
7,122,455
Issue date
Oct 17, 2006
Advanced Micro Devices, Inc.
Christopher F. Lyons
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Negative resist or dry develop process for forming middle of line i...
Patent number
7,112,489
Issue date
Sep 26, 2006
Advanced Micro Devices, Inc.
Christopher F. Lyons
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method using in situ scatterometry to detect photoresist...
Patent number
7,052,921
Issue date
May 30, 2006
Advanced Micro Devices, Inc.
Marina V. Plat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning for elongated VSS contact flash memory
Patent number
7,018,922
Issue date
Mar 28, 2006
Advanced Micro Devices, Inc.
Hung-eil Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing anti-reflective coating layer removal during re...
Patent number
7,015,134
Issue date
Mar 21, 2006
Advanced Micro Devices, Inc.
Marina V. Plat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Damascene process for a T-shaped gate electrode
Patent number
7,008,832
Issue date
Mar 7, 2006
Advanced Micro Devices, Inc.
Ramkumar Subramanian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for patterning a feature using a trimmed hardmask
Patent number
6,913,958
Issue date
Jul 5, 2005
Advanced Micro Devices
Marina V. Plat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Antireflective bi-layer hardmask including a densified amorphous ca...
Patent number
6,900,002
Issue date
May 31, 2005
Advanced Micro Devices, Inc.
Marina V. Plat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning for elliptical Vss contact on flash memory
Patent number
6,900,124
Issue date
May 31, 2005
Advanced Micro Devices, Inc.
Hung-eil Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
E-beam flood exposure of spin-on material to eliminate voids in vias
Patent number
6,869,888
Issue date
Mar 22, 2005
Advanced Micro Devices, Inc.
Marina V. Plat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making a memory cell with polished insulator layer
Patent number
6,867,097
Issue date
Mar 15, 2005
Advanced Micro Devices, Inc.
Mark T. Ramsbey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
CVD organic polymer film for advanced gate patterning
Patent number
6,864,556
Issue date
Mar 8, 2005
Advanced Micro Devices, Inc.
Lu You
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for semiconductor gate line dimension reduction
Patent number
6,849,530
Issue date
Feb 1, 2005
Advanced Micro Devices
Douglas J. Bonser
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced transistor gate using E-beam radiation
Patent number
6,828,259
Issue date
Dec 7, 2004
Advanced Micro Devices, Inc.
Philip A. Fisher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Application of the CVD bilayer ARC as a hard mask for definition of...
Patent number
6,818,141
Issue date
Nov 16, 2004
Advanced Micro Devices, Inc.
Marina V. Plat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two mask photoresist exposure pattern for dense and isolated regions
Patent number
6,803,178
Issue date
Oct 12, 2004
Advanced Micro Devices, Inc.
Ramkumar Subramanian
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for defect reduction and enhanced control over critical dime...
Patent number
6,797,552
Issue date
Sep 28, 2004
Advanced Micro Devices, Inc.
Mark S. Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modified film stack and patterning strategy for stress compensation...
Patent number
6,773,998
Issue date
Aug 10, 2004
Advanced Micro Devices, Inc.
Philip A. Fisher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing gate line deformation and reducing gate line wi...
Patent number
6,764,947
Issue date
Jul 20, 2004
Advanced Micro Devices, Inc.
Darin Chan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing pattern deformation and photoresist poisoning i...
Patent number
6,764,949
Issue date
Jul 20, 2004
Advanced Micro Devices, Inc.
Douglas J. Bonser
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of enhancing gate patterning properties with reflective hard...
Patent number
6,753,266
Issue date
Jun 22, 2004
Advanced Micro Devices, Inc.
Todd P. Lukanc
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual damascene process utilizing a bi-layer imaging layer
Patent number
6,737,222
Issue date
May 18, 2004
Advanced Micro Devices, Inc.
Ramkumar Subramanian
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MULTILAYER LOW REFLECTIVITY HARD MASK AND PROCESS THEREFOR
Publication number
20120045888
Publication date
Feb 23, 2012
Kouros Ghandehari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTILAYER LOW REFLECTIVITY HARD MASK AND PROCESS THEREFOR
Publication number
20100009536
Publication date
Jan 14, 2010
Advanced Micro Devices, Inc.
Kouros Ghandehari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATION APPROACH TO FORM THE CORE FLOATING GATE FOR FLASH MEMOR...
Publication number
20080254607
Publication date
Oct 16, 2008
Advanced Micro Devices, Inc.
Marina V. Plat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Contact etch resistant spacers
Publication number
20050121738
Publication date
Jun 9, 2005
Calvin T. Gabriel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for semiconductor gate line dimension reduction
Publication number
20050020019
Publication date
Jan 27, 2005
Advanced Micro Devices, Inc.
Douglas J. Bonser
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCED TRANSISTOR GATE USING E-BEAM RADIATION
Publication number
20040209411
Publication date
Oct 21, 2004
Advanced Micro Devices, Inc.
Philip A. Fisher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for semiconductor gate line dimension reduction
Publication number
20040043590
Publication date
Mar 4, 2004
Advanced Micro Devices, Inc.
Douglas J. Bonser
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for reducing pattern deformation and photoresist poisoning i...
Publication number
20040023475
Publication date
Feb 5, 2004
Advanced Micro Devices, Inc.
Douglas J. Bonser
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus to prevent pattern collapse of photoresist lay...
Publication number
20030003402
Publication date
Jan 2, 2003
Advanced Micro Devices, Inc.
Marina Plat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dual damascene using removable via studs
Publication number
20020164544
Publication date
Nov 7, 2002
Advanced Micro Devices, Inc.
Todd P. Luckanc
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for reducing ARC layer removal during removal of...
Publication number
20020076931
Publication date
Jun 20, 2002
Marina V. Plat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dual damascene process utilizing a bi-layer imaging layer
Publication number
20020061470
Publication date
May 23, 2002
Advanced Micro Devices, Inc.
Ramkumar Subramanian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRA-THIN RESIST COATING QUALITYBY BY INCREASING SURFACE ROUGHNESS...
Publication number
20020004300
Publication date
Jan 10, 2002
MARINA V. PLAT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
USE OF SILICON OXYNITRIDE ARC FOR METAL LAYERS
Publication number
20010046791
Publication date
Nov 29, 2001
RAMKUMAR SUBRAMANIAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etch bias distribution across semiconductor wafer
Publication number
20010031506
Publication date
Oct 18, 2001
Marina V. Plat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for reducing ARC layer removal bamd providing a c...
Publication number
20010010976
Publication date
Aug 2, 2001
Advanced Micro Devices, Inc.
Marina V. Plat
H01 - BASIC ELECTRIC ELEMENTS