Mario D. Silvetti

Person

Morgan Hill, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Purge ring for pedestal assembly
- Patent number 11,976,363
- Issue date May 7, 2024
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Paired dynamic parallel plate capacitively coupled plasmas
- Patent number 11,923,172
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for improving chemical utilization rate in de...
- Patent number 11,713,508
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma induced modification of silicon carbide surface
- Patent number 11,692,267
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Francis Kanyiri Mungai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution assembly for improved pump-purge and precursor del...
- Patent number 11,584,992
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Kenneth Brian Doering
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor wafer chucks for bowed wafers
- Patent number 11,581,213
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Abhishek Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for improving chemical utilization rate in de...
- Patent number 11,396,703
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Paired dynamic parallel plate capacitively coupled plasmas
- Patent number 11,282,676
- Issue date Mar 22, 2022
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inner retaining ring and outer retaining ring for carrier head
- Patent number 11,173,579
- Issue date Nov 16, 2021
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Gas distribution assembly for improved pump-purge and precursor del...
- Patent number 11,174,553
- Issue date Nov 16, 2021
- Applied Materials, Inc.
- Kenneth Brian Doering
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Geometrically selective deposition of dielectric films utilizing lo...
- Patent number 11,081,318
- Issue date Aug 3, 2021
- Applied Materials, Inc.
- Kenichi Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing system with chuck assembly maintenance module
- Patent number 9,812,344
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Jason Rye
- B08 - CLEANING
Information Patent Grant
Disk-brush cleaner module with fluid jet
- Patent number 9,646,859
- Issue date May 9, 2017
- Applied Materials, Inc.
- Hui Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic end effector apparatus, systems and methods
- Patent number 8,599,531
- Issue date Dec 3, 2013
- Applied Materials, Inc.
- Satish Sundar
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus and method for a multi-level load lock chamber, transfer...
- Patent number 7,997,851
- Issue date Aug 16, 2011
- Applied Materials, Inc.
- Robert B. Moore
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Multi-level load lock chamber, transfer chamber, and robot suitable...
- Patent number 7,695,232
- Issue date Apr 13, 2010
- Applied Materials, Inc.
- Robert B. Moore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for reducing entrapment of foreign matter along a moveabl...
- Patent number 7,582,167
- Issue date Sep 1, 2009
- Applied Materials, Inc.
- Andrzej Kaszuba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of retaining a substrate during a substrate transferring pro...
- Patent number 7,374,393
- Issue date May 20, 2008
- Applied Materials, Inc.
- Mike Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate gripper for a substrate handling robot
- Patent number 7,374,391
- Issue date May 20, 2008
- Applied Materials, Inc.
- Michael Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photolithography scheme using a silicon containing resist
- Patent number 7,332,262
- Issue date Feb 19, 2008
- Applied Materials, Inc.
- Ian Latchford
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for reducing entrapment of foreign matter along a moveabl...
- Patent number 7,279,049
- Issue date Oct 9, 2007
- Applied Materials, Inc.
- Andrzej Kaszuba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for monitoring the position of a semiconductor...
- Patent number 7,107,125
- Issue date Sep 12, 2006
- Applied Materials, Inc.
- Pyongwon Yim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitrogen-free dielectric anti-reflective coating and hardmask
- Patent number 7,105,460
- Issue date Sep 12, 2006
- Applied Materials
- Bok Hoen Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Universal mid-frequency matching network
- Patent number 7,094,313
- Issue date Aug 22, 2006
- Applied Materials, Inc.
- Eller Y. Juco
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate heater assembly
- Patent number 7,024,105
- Issue date Apr 4, 2006
- Applied Materials Inc.
- Mark A. Fodor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photolithography scheme using a silicon containing resist
- Patent number 6,967,072
- Issue date Nov 22, 2005
- Applied Materials, Inc.
- Ian Latchford
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitrogen-free dielectric anti-reflective coating and hardmask
- Patent number 6,927,178
- Issue date Aug 9, 2005
- Applied Materials, Inc.
- Bok Hoen Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of reducing plasma-induced damage for advanced plasma CVD d...
- Patent number 6,911,403
- Issue date Jun 28, 2005
- Applied Materials, Inc.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduction of plasma edge effect on plasma enhanced CVD processes
- Patent number 6,553,932
- Issue date Apr 29, 2003
- Applied Materials, Inc.
- Kuo-Shih Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for reducing particle contamination on wafer b...
- Patent number 6,413,321
- Issue date Jul 2, 2002
- Applied Materials, Inc.
- Bok Hoen Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING SUSCEPTOR POCKET EDGE FOR PROCESS IMPRO...
- Publication number 20240141492
- Publication date May 2, 2024
- Applied Materials, Inc.
- Prasanth Narayanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF PREVENTING METAL CONTAMINATION BY CERAMIC HEATER
- Publication number 20230313378
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Yongjing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BASE PLATE FOR HEATER PEDESTAL
- Publication number 20230207345
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Muhannad Mustafa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHODS FOR FINE PLANAR NON-UNIFORMITY IMPROVEMENT
- Publication number 20230146837
- Publication date May 11, 2023
- Applied Materials, Inc.
- Muhannad Mustafa
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
PURGE RING FOR PEDESTAL ASSEMBLY
- Publication number 20230059232
- Publication date Feb 23, 2023
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER PEDESTAL WITH IMPROVED UNIFORMITY
- Publication number 20220367236
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Methods for Improving Chemical Utilization Rate in De...
- Publication number 20220316061
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA INDUCED MODIFICATION OF SILICON CARBIDE SURFACE
- Publication number 20220205095
- Publication date Jun 30, 2022
- Applied Materials, Inc.
- Francis Kanyiri Mungai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Methods for Improving Chemical Utilization Rate in De...
- Publication number 20220195600
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PAIRED DYNAMIC PARALLEL PLATE CAPACITIVELY COUPLED PLASMAS
- Publication number 20220165540
- Publication date May 26, 2022
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR WAFER CHUCKS FOR BOWED WAFERS
- Publication number 20220093443
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Abhishek Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR GAS PHASE PARTICLE REDUCTION
- Publication number 20220064785
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Muhannad MUSTAFA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION ASSEMBLY FOR IMPROVED PUMP-PURGE AND PRECURSOR DEL...
- Publication number 20220049354
- Publication date Feb 17, 2022
- Applied Materials, Inc.
- Kenneth Brian Doering
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PBN Heaters For ALD Temperature Uniformity
- Publication number 20210092800
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Kenneth Brian Doering
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Pumps For Single And Multi-Process Chamber Flow Stream Sharing
- Publication number 20200256228
- Publication date Aug 13, 2020
- Applied Materials, Inc.
- Michael Rice
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Application
Paired Dynamic Parallel Plate Capacitively Coupled Plasmas
- Publication number 20190385819
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Distribution Assembly For Improved Pump-Purge And Precursor Del...
- Publication number 20190382896
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Kenneth Brian Doering
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Geometrically Selective Deposition Of Dielectric Films Utilizing Lo...
- Publication number 20190189400
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- Kenichi Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD
- Publication number 20180304441
- Publication date Oct 25, 2018
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
STAND ALONE ANNEAL SYSTEM FOR SEMICONDUCTOR WAFERS
- Publication number 20160240405
- Publication date Aug 18, 2016
- Applied Materials, Inc.
- Vincent Steffan Francischetti
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
WAFER PROCESSING SYSTEM WITH CHUCK ASSEMBLY MAINTENANCE MODULE
- Publication number 20160225656
- Publication date Aug 4, 2016
- Applied Materials, Inc.
- Jason Rye
- B08 - CLEANING
Information Patent Application
SUBSTRATE EDGE TUNING WITH RETAINING RING
- Publication number 20120034848
- Publication date Feb 9, 2012
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
DISK-BRUSH CLEANER MODULE WITH FLUID JET
- Publication number 20110265816
- Publication date Nov 3, 2011
- Applied Materials, Inc.
- Hui Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, APPARATUS AND METHODS FOR MOVING SUBSTRATES
- Publication number 20100178137
- Publication date Jul 15, 2010
- Applied Materials, Inc.
- Prudhvi R. Chintalapati
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC END EFFECTOR APPARATUS, SYSTEMS AND METHODS
- Publication number 20100178139
- Publication date Jul 15, 2010
- Applied Materials, Inc.
- Satish Sundar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT
- Publication number 20100145513
- Publication date Jun 10, 2010
- Applied Materials, Inc.
- Pyongwon Yim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LEVEL LOAD LOCK CHAMBER, TRANSFER CHAMBER, AND ROBOT SUITABL...
- Publication number 20090092466
- Publication date Apr 9, 2009
- APPLIED MATERIALS, INC.
- Robert B. Moore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH PRODUCTIVITY PLASMA PROCESSING CHAMBER
- Publication number 20090068356
- Publication date Mar 12, 2009
- APPLIED MATERIALS, INC.
- MARIO David SILVETTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR REDUCING ENTRAPMENT OF FOREIGN MATTER ALONG A MOVEABL...
- Publication number 20080017115
- Publication date Jan 24, 2008
- Andrzej Kaszuba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LEVEL LOAD LOCK CHAMBER, TRANSFER CHAMBER, AND ROBOT SUITABLE...
- Publication number 20070292244
- Publication date Dec 20, 2007
- ROBERT B. MOORE
- H01 - BASIC ELECTRIC ELEMENTS

Mario D. Silvetti

Person

Patents Grantslast 30 patents

Purge ring for pedestal assembly

Paired dynamic parallel plate capacitively coupled plasmas

Apparatus and methods for improving chemical utilization rate in de...

Plasma induced modification of silicon carbide surface

Gas distribution assembly for improved pump-purge and precursor del...

Susceptor wafer chucks for bowed wafers

Apparatus and methods for improving chemical utilization rate in de...

Paired dynamic parallel plate capacitively coupled plasmas

Inner retaining ring and outer retaining ring for carrier head

Gas distribution assembly for improved pump-purge and precursor del...

Geometrically selective deposition of dielectric films utilizing lo...

Wafer processing system with chuck assembly maintenance module

Disk-brush cleaner module with fluid jet

Electrostatic end effector apparatus, systems and methods

Apparatus and method for a multi-level load lock chamber, transfer...

Multi-level load lock chamber, transfer chamber, and robot suitable...

Apparatus for reducing entrapment of foreign matter along a moveabl...

Method of retaining a substrate during a substrate transferring pro...

Substrate gripper for a substrate handling robot

Photolithography scheme using a silicon containing resist

Apparatus for reducing entrapment of foreign matter along a moveabl...

Method and apparatus for monitoring the position of a semiconductor...

Nitrogen-free dielectric anti-reflective coating and hardmask

Universal mid-frequency matching network

Substrate heater assembly

Photolithography scheme using a silicon containing resist

Nitrogen-free dielectric anti-reflective coating and hardmask

Methods of reducing plasma-induced damage for advanced plasma CVD d...

Reduction of plasma edge effect on plasma enhanced CVD processes

Method and apparatus for reducing particle contamination on wafer b...

Patents Applicationslast 30 patents

SEMICONDUCTOR MANUFACTURING SUSCEPTOR POCKET EDGE FOR PROCESS IMPRO...

METHODS OF PREVENTING METAL CONTAMINATION BY CERAMIC HEATER

BASE PLATE FOR HEATER PEDESTAL

APPARATUS AND METHODS FOR FINE PLANAR NON-UNIFORMITY IMPROVEMENT

PURGE RING FOR PEDESTAL ASSEMBLY

HEATER PEDESTAL WITH IMPROVED UNIFORMITY

Apparatus and Methods for Improving Chemical Utilization Rate in De...

PLASMA INDUCED MODIFICATION OF SILICON CARBIDE SURFACE

Apparatus and Methods for Improving Chemical Utilization Rate in De...

PAIRED DYNAMIC PARALLEL PLATE CAPACITIVELY COUPLED PLASMAS

SUSCEPTOR WAFER CHUCKS FOR BOWED WAFERS

APPARATUS AND METHODS FOR GAS PHASE PARTICLE REDUCTION

GAS DISTRIBUTION ASSEMBLY FOR IMPROVED PUMP-PURGE AND PRECURSOR DEL...

PBN Heaters For ALD Temperature Uniformity

Vacuum Pumps For Single And Multi-Process Chamber Flow Stream Sharing

Paired Dynamic Parallel Plate Capacitively Coupled Plasmas

Gas Distribution Assembly For Improved Pump-Purge And Precursor Del...

Geometrically Selective Deposition Of Dielectric Films Utilizing Lo...

INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD

STAND ALONE ANNEAL SYSTEM FOR SEMICONDUCTOR WAFERS

WAFER PROCESSING SYSTEM WITH CHUCK ASSEMBLY MAINTENANCE MODULE

SUBSTRATE EDGE TUNING WITH RETAINING RING

DISK-BRUSH CLEANER MODULE WITH FLUID JET

SYSTEMS, APPARATUS AND METHODS FOR MOVING SUBSTRATES

ELECTROSTATIC END EFFECTOR APPARATUS, SYSTEMS AND METHODS

METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT

MULTI-LEVEL LOAD LOCK CHAMBER, TRANSFER CHAMBER, AND ROBOT SUITABL...

HIGH PRODUCTIVITY PLASMA PROCESSING CHAMBER

APPARATUS FOR REDUCING ENTRAPMENT OF FOREIGN MATTER ALONG A MOVEABL...

MULTI-LEVEL LOAD LOCK CHAMBER, TRANSFER CHAMBER, AND ROBOT SUITABLE...