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Mark D. Kenney
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Safety Harbor, FL, US
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Patents Grants
last 30 patents
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Patent Grant
Perimeter seal for backside cooling of substrates
Patent number
6,771,482
Issue date
Aug 3, 2004
Unaxis USA Inc.
Mark D. Kenney
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Rotating magnet array and sputter source
Patent number
6,258,217
Issue date
Jul 10, 2001
Plasma-Therm, Inc.
Edmond A. Richards
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Perimeter seal for backside cooling of substrates
Publication number
20030021077
Publication date
Jan 30, 2003
Mark D. Kenney
H01 - BASIC ELECTRIC ELEMENTS