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Mark H. Wilcoxson
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Oakland, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Mask shrink layer for high aspect ratio dielectric etch
Patent number
10,431,458
Issue date
Oct 1, 2019
Lam Research Corporation
Eric A. Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Technique to deposit metal-containing sidewall passivation for high...
Patent number
10,170,323
Issue date
Jan 1, 2019
Lam Research Corporation
Eric A. Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching features in dielectric layers
Patent number
9,673,058
Issue date
Jun 6, 2017
Lam Research Corporation
Scott Briggs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Technique to deposit metal-containing sidewall passivation for high...
Patent number
9,620,377
Issue date
Apr 11, 2017
Lab Research Corporation
Eric A. Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask shrink layer for high aspect ratio dielectric etch
Patent number
9,543,148
Issue date
Jan 10, 2017
Lam Research Corporation
Eric A. Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of dielectric film treatment
Patent number
9,236,279
Issue date
Jan 12, 2016
Lam Research Corporation
Seokmin Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of particle contaminant removal
Patent number
9,159,593
Issue date
Oct 13, 2015
Lam Research Corporation
Mark Naoshi Kawaguchi
B08 - CLEANING
Information
Patent Grant
Method for substrate cleaning including movement of substrate below...
Patent number
8,900,374
Issue date
Dec 2, 2014
Lam Research Corporation
Cheng-Yu (Sean) Lin
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method of particle contaminant removal
Patent number
8,828,145
Issue date
Sep 9, 2014
Lam Research Corporation
Yizhak Sabba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-stage substrate cleaning method and apparatus
Patent number
8,757,177
Issue date
Jun 24, 2014
Lam Research Corporation
Arnold Kholodenko
B08 - CLEANING
Information
Patent Grant
Carrier for reducing entrance and/or exit marks left by a substrate...
Patent number
8,534,303
Issue date
Sep 17, 2013
Lam Research Corporation
Robert O'Donnell
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and apparatus for pattern collapse free wet processing of se...
Patent number
8,440,573
Issue date
May 14, 2013
Lam Research Corporation
Katrina Mikhaylichenko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-stage substrate cleaning method and apparatus
Patent number
8,317,934
Issue date
Nov 27, 2012
Lam Research Corporation
Arnold Kholodenko
B08 - CLEANING
Information
Patent Grant
Method of damaged low-k dielectric film layer removal
Patent number
8,277,675
Issue date
Oct 2, 2012
Lam Research Corporation
Seokmin Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for isolated bevel edge clean and method for using the same
Patent number
8,127,395
Issue date
Mar 6, 2012
Lam Research Corporation
Hyungsuk Alexander Yoon
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Carrier for reducing entrance and/or exit marks left by a substrate...
Patent number
8,105,441
Issue date
Jan 31, 2012
Lam Research Corporation
Robert O'Donnell
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method of preventing premature drying
Patent number
8,021,512
Issue date
Sep 20, 2011
Lam Research Corporation
Seokmin Yun
B08 - CLEANING
Information
Patent Grant
Carrier for reducing entrance and/or exit marks left by a substrate...
Patent number
7,946,303
Issue date
May 24, 2011
Lam Research Corporation
Robert O'Donnell
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Methods for atomic layer deposition (ALD) using a proximity meniscus
Patent number
7,939,139
Issue date
May 10, 2011
Lam Research Corporation
Mike Ravkin
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Apparatus and system for cleaning substrate
Patent number
7,849,554
Issue date
Dec 14, 2010
Lam Research Corporation
Cheng-Yu (Sean) Lin
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Apparatus for cleaning edge of substrate and method for using the same
Patent number
7,758,404
Issue date
Jul 20, 2010
Lam Research Corporation
Jason A. Ryder
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for atomic layer deposition (ALD) in a proximi...
Patent number
7,632,376
Issue date
Dec 15, 2009
Lam Research Corporation
Mike Ravkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Post etch wafer surface cleaning with liquid meniscus
Patent number
7,597,765
Issue date
Oct 6, 2009
Lam Research Corporation
Ji Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced wafer cleaning method
Patent number
7,568,488
Issue date
Aug 4, 2009
Lam Research Corporation
Seokmin Yun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma in-situ treatment of chemically amplified resist
Patent number
7,347,915
Issue date
Mar 25, 2008
Lam Research Corporation
Douglas L. Keil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced wafer cleaning method
Patent number
7,329,321
Issue date
Feb 12, 2008
Lam Research Corporation
Seokmin Yun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for plasma stripping using periodic modulation of gas chemis...
Patent number
7,294,580
Issue date
Nov 13, 2007
Lam Research Corporation
Seokmin Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
User interface for quantifying wafer non-uniformities and graphical...
Patent number
7,239,737
Issue date
Jul 3, 2007
Lam Research Corporation
Jorge Luque
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma in-situ treatment of chemically amplified resist
Patent number
7,022,611
Issue date
Apr 4, 2006
Lam Research Corporation
Douglas L. Keil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing a semiconductor device
Patent number
6,873,112
Issue date
Mar 29, 2005
Lam Research Corporation
Mark H. Wilcoxson
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ELECTROSTATIC CHUCK WITH FLEXIBLE WAFER TEMPERATURE CONTROL
Publication number
20180286642
Publication date
Oct 4, 2018
LAM RESEARCH CORPORATION
Alexander MATYUSHKIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TECHNIQUE TO DEPOSIT METAL-CONTAINING SIDEWALL PASSIVATION FOR HIGH...
Publication number
20170170026
Publication date
Jun 15, 2017
LAM RESEARCH CORPORATION
Eric A. Hudson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MASK SHRINK LAYER FOR HIGH ASPECT RATIO DIELECTRIC ETCH
Publication number
20170076945
Publication date
Mar 16, 2017
LAM RESEARCH CORPORATION
Eric A. Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUE TO DEPOSIT METAL-CONTAINING SIDEWALL PASSIVATION FOR HIGH...
Publication number
20160163558
Publication date
Jun 9, 2016
LAM RESEARCH CORPORATION
Eric A. Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Low-K Dielectric Film Repair
Publication number
20140170780
Publication date
Jun 19, 2014
LAM RESEARCH CORPORATION
Seokmin Yun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DIELECTRIC FILM TREATMENT
Publication number
20140048108
Publication date
Feb 20, 2014
LAM RESEARCH CORPORATION
Seokmin Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-STAGE SUBSTRATE CLEANING METHOD AND APPARATUS
Publication number
20130068261
Publication date
Mar 21, 2013
Arnold Kholodenko
B08 - CLEANING
Information
Patent Application
Methods for Using Proximity Head With Configurable Delivery
Publication number
20120199164
Publication date
Aug 9, 2012
Mark H. Wilcoxson
B08 - CLEANING
Information
Patent Application
Method of Post Etch Polymer Residue Removal
Publication number
20120115332
Publication date
May 10, 2012
LAM RESEARCH CORPORATION
Seokmin Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Carrier for Reducing Entrance and/or Exit Marks Left by a Substrate...
Publication number
20120079698
Publication date
Apr 5, 2012
LAM RESEARCH CORPORATION
Robert O'Donnell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Carrier for Reducing Entrance and/or Exit Marks Left by a Substrate...
Publication number
20110197928
Publication date
Aug 18, 2011
LAM RESEARCH CORPORATION
Robert O'Donnell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PATTERN COLLAPSE FREE WET PROCESSING OF SE...
Publication number
20110183522
Publication date
Jul 28, 2011
LAM RESEARCH CORPORATION
Katrina Mikhaylichenko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD OF PREVENTING PATTERN COLLAPSE USING LOW SURFACE...
Publication number
20110139183
Publication date
Jun 16, 2011
Katrina Mikhaylichenko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and System for Cleaning Substrate
Publication number
20110048467
Publication date
Mar 3, 2011
LAM RESEARCH CORPORATION
Cheng-Yu (Sean) Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PARTICLE CONTAMINANT REMOVAL
Publication number
20100313917
Publication date
Dec 16, 2010
Lam Research Corp.
Mark Naoshi Kawaguchi
B08 - CLEANING
Information
Patent Application
Multi-Stage Substrate Cleaning Method and Apparatus
Publication number
20100288311
Publication date
Nov 18, 2010
LAM RESEARCH CORPORATION
Arnold Kholodenko
B08 - CLEANING
Information
Patent Application
APPARATUS AND SYSTEM FOR CLEANING SUBSTRATE
Publication number
20100269285
Publication date
Oct 28, 2010
Lam Research Corporation
Cheng-Yu (Sean) Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR USING A VISCOELASTIC CLEANING MATERIAL TO...
Publication number
20100258142
Publication date
Oct 14, 2010
Mark Naoshi Kawaguchi
B08 - CLEANING
Information
Patent Application
Method of Particle Contaminant Removal
Publication number
20100229890
Publication date
Sep 16, 2010
Lam Research Corp.
Yizhak T. Sabba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR ATOMIC LAYER DEPOSITION (ALD) USING A PROXIMITY MENISCUS
Publication number
20100071730
Publication date
Mar 25, 2010
Mike Ravkin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method of low-k dielectric film repair
Publication number
20100015731
Publication date
Jan 21, 2010
LAM RESEARCH CORPORATION
Seokmin Yun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of preventing premature drying
Publication number
20090246372
Publication date
Oct 1, 2009
LAM RESEARCH CORPORATION
Seokmin Yun
B08 - CLEANING
Information
Patent Application
METHOD OF DIELECTRIC FILM TREATMENT
Publication number
20090229638
Publication date
Sep 17, 2009
LAM RESEARCH CORPORATION
Seokmin Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of post etch polymer residue removal
Publication number
20090211596
Publication date
Aug 27, 2009
LAM RESEARCH CORPORATION
Seokmin Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of damaged low-k dielectric film layer removal
Publication number
20090173718
Publication date
Jul 9, 2009
LAM RESEARCH CORPORATION
Seokmin Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for isolated bevel edge clean and method for using the same
Publication number
20090113656
Publication date
May 7, 2009
LAM RESEARCH CORPORATION
Hyungsuk Alexander Yoon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCED WAFER CLEANING METHOD
Publication number
20080169008
Publication date
Jul 17, 2008
Seokmin Yun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROXIMITY HEAD WITH CONFIGURABLE DELIVERY
Publication number
20080149147
Publication date
Jun 26, 2008
LAM RESEARCH
Mark H. Wilcoxson
B08 - CLEANING
Information
Patent Application
CARRIER FOR REDUCING ENTRANCE AND/OR EXIT MARKS LEFT BY A SUBSTRATE...
Publication number
20080081775
Publication date
Apr 3, 2008
Robert O'Donnell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Post etch wafer surface cleaning with liquid meniscus
Publication number
20070240737
Publication date
Oct 18, 2007
LAM RESEARCH CORPORATION
Ji Zhu
H01 - BASIC ELECTRIC ELEMENTS