MARKO TUOMINEN

Person

HELSINKI, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer etching processes
- Patent number 12,094,686
- Issue date Sep 17, 2024
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
- Patent number 11,975,357
- Issue date May 7, 2024
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of silicon oxide on dielectric surfaces relati...
- Patent number 11,898,240
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Andrea Illiberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced deposition processes for controlled formation of ox...
- Patent number 11,776,807
- Issue date Oct 3, 2023
- ASM IP Holding, B.V.
- Lingyun Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,739,428
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,739,427
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 11,654,454
- Issue date May 23, 2023
- ASM IP Holding B.V.
- Viljami J. Pore
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods for forming a layer comprising a condensing and a curing step
- Patent number 11,643,726
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Marko Tuominen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of silicon oxide on metal surfaces
- Patent number 11,643,720
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Andrea Illiberi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Atomic layer etching processes
- Patent number 11,640,899
- Issue date May 2, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual selective deposition
- Patent number 11,525,184
- Issue date Dec 13, 2022
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced deposition processes for controlled formation of me...
- Patent number 11,501,965
- Issue date Nov 15, 2022
- ASM IP Holding B.V.
- Lingyun Jia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 11,446,699
- Issue date Sep 20, 2022
- ASM IP Holding B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 11,389,824
- Issue date Jul 19, 2022
- ASM IP Holding B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,230,770
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,230,769
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
- Patent number 11,213,853
- Issue date Jan 4, 2022
- ASM IP Holding B.V.
- Suvi P. Haukka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Atomic layer etching processes
- Patent number 11,183,367
- Issue date Nov 23, 2021
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced deposition processes for controlled formation of ox...
- Patent number 11,158,500
- Issue date Oct 26, 2021
- ASM IP Holding B.V.
- Lingyun Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective passivation and selective deposition
- Patent number 11,094,535
- Issue date Aug 17, 2021
- ASM IP Holding B.V.
- Eva E. Tois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective formation of metallic films on metallic surfaces
- Patent number 11,056,385
- Issue date Jul 6, 2021
- ASM International N.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual selective deposition
- Patent number 11,047,040
- Issue date Jun 29, 2021
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 10,814,349
- Issue date Oct 27, 2020
- ASM IP Holding B.V.
- Viljami J. Pore
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 10,695,794
- Issue date Jun 30, 2020
- ASM IP Holding B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 10,662,534
- Issue date May 26, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching processes
- Patent number 10,665,425
- Issue date May 26, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 10,662,533
- Issue date May 26, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
- Patent number 10,456,808
- Issue date Oct 29, 2019
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual selective deposition
- Patent number 10,443,123
- Issue date Oct 15, 2019
- ASM IP Holding B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 10,343,186
- Issue date Jul 9, 2019
- ASM IP Holding B.V.
- Viljami J. Pore
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE ETCHING METHOD AND ETCHING ASSEMBLY
- Publication number 20240312790
- Publication date Sep 19, 2024
- ASM IP HOLDING B.V.
- Eva Tois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION OF METAL OXIDE
- Publication number 20240282572
- Publication date Aug 22, 2024
- ASM IP HOLDING B.V.
- Viraj Madhiwala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD V...
- Publication number 20240234129
- Publication date Jul 11, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SELECTIVELY FORMING A PASSIVATION LAYER ON A DIELECTRIC...
- Publication number 20240222135
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Daniele Chiappe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SELECTIVELY FORMING A DIELECTRIC LAYER ON A METALLIC SU...
- Publication number 20240222111
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Viraj Madhiwala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE ETCHING METHODS AND ETCHING ASSEMBLIES
- Publication number 20240213033
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- YongGyu Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING AN ORGANIC POLYMER COMPRISING POLYIMIDE
- Publication number 20240177992
- Publication date May 30, 2024
- ASM IP HOLDING B.V.
- Andrea Illiberi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION OF MATERIAL COMPRISING SILICON AND NITROGEN
- Publication number 20240162036
- Publication date May 16, 2024
- ASM IP HOLDING B.V.
- Viraj Madhiwala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING TRANSITION METALS
- Publication number 20240096633
- Publication date Mar 21, 2024
- ASM IP HOLDING B.V.
- Elina Färm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION OF SILICON OXIDE ON METAL SURFACES
- Publication number 20240076775
- Publication date Mar 7, 2024
- ASM IP HOLDING B.V.
- Andrea Illiberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20240026548
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FORMING DIPOLE LAYERS IN STACKED GATE-ALL-A...
- Publication number 20230386934
- Publication date Nov 30, 2023
- ASM IP HOLDING, B.V.
- Shaoren Deng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20230374671
- Publication date Nov 23, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ATOMIC LAYER ETCHING PROCESSES
- Publication number 20230253182
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE DEPOSITION OF ORGANIC FILMS
- Publication number 20230249217
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20230243036
- Publication date Aug 3, 2023
- ASM IP HOLDING B.V.
- Marko Tuominen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED STRUCTURE ON A SUBSTRATE
- Publication number 20230227965
- Publication date Jul 20, 2023
- ASM IP HOLDING, B.V.
- Shaoren Deng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR HARD MASK DEPOSITION
- Publication number 20230178371
- Publication date Jun 8, 2023
- ASM IP HOLDING, B.V.
- Shaoren Deng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE THERMAL DEPOSITION METHOD
- Publication number 20230140812
- Publication date May 4, 2023
- ASM IP HOLDING, B.V.
- Daniele Chiappe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF MATERIAL COMPRISING SILICON AND OXYGEN USIN...
- Publication number 20230140367
- Publication date May 4, 2023
- ASM IP HOLDING, B.V.
- Viraj Madhiwala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION USING THERMAL AND PLASMA-ENHANCED PROCESS
- Publication number 20230139917
- Publication date May 4, 2023
- ASM IP HOLDING, B.V.
- Eva Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF ORGANIC MATERIAL
- Publication number 20230098114
- Publication date Mar 30, 2023
- ASM IP HOLDING, B.V.
- Eva Tois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR PHASE DEPOSITION OF ORGANIC FILMS
- Publication number 20220388031
- Publication date Dec 8, 2022
- ASM IP HOLDING B.V.
- Viljami J. Pore
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
VAPOR PHASE DEPOSITION OF ORGANIC FILMS
- Publication number 20220323991
- Publication date Oct 13, 2022
- ASM IP HOLDING B.V.
- Viljami J. Pore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20220235460
- Publication date Jul 28, 2022
- ASM IP HOLDING B.V.
- Marko Tuominen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF METALS, METAL OXIDES, AND DIELECTRICS
- Publication number 20220193720
- Publication date Jun 23, 2022
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TOPOSELECTIVE VAPOR DEPOSITION USING AN INHIBITOR
- Publication number 20220181163
- Publication date Jun 9, 2022
- ASM IP HOLDING B.V.
- Andrea Illiberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220119961
- Publication date Apr 21, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220119962
- Publication date Apr 21, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON OXIDE DEPOSITION METHOD
- Publication number 20220084817
- Publication date Mar 17, 2022
- ASM IP HOLDING B.V.
- Varun Sharma
- H01 - BASIC ELECTRIC ELEMENTS

MARKO TUOMINEN

Person

Patents Grantslast 30 patents

Atomic layer etching processes

Selective deposition of metals, metal oxides, and dielectrics

Selective deposition of silicon oxide on dielectric surfaces relati...

Plasma enhanced deposition processes for controlled formation of ox...

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Vapor phase deposition of organic films

Methods for forming a layer comprising a condensing and a curing step

Selective deposition of silicon oxide on metal surfaces

Atomic layer etching processes

Dual selective deposition

Plasma enhanced deposition processes for controlled formation of me...

Vapor phase deposition of organic films

Vapor phase deposition of organic films

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Selective deposition of metals, metal oxides, and dielectrics

Atomic layer etching processes

Plasma enhanced deposition processes for controlled formation of ox...

Selective passivation and selective deposition

Selective formation of metallic films on metallic surfaces

Dual selective deposition

Vapor phase deposition of organic films

Vapor phase deposition of organic films

Thermal atomic layer etching processes

Atomic layer etching processes

Thermal atomic layer etching processes

Selective deposition of metals, metal oxides, and dielectrics

Dual selective deposition

Vapor phase deposition of organic films

Patents Applicationslast 30 patents

SELECTIVE ETCHING METHOD AND ETCHING ASSEMBLY

SELECTIVE DEPOSITION OF METAL OXIDE

METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD V...

METHODS FOR SELECTIVELY FORMING A PASSIVATION LAYER ON A DIELECTRIC...

METHODS FOR SELECTIVELY FORMING A DIELECTRIC LAYER ON A METALLIC SU...

SELECTIVE ETCHING METHODS AND ETCHING ASSEMBLIES

METHOD OF FORMING AN ORGANIC POLYMER COMPRISING POLYIMIDE

SELECTIVE DEPOSITION OF MATERIAL COMPRISING SILICON AND NITROGEN

METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING TRANSITION METALS

SELECTIVE DEPOSITION OF SILICON OXIDE ON METAL SURFACES

THERMAL ATOMIC LAYER ETCHING PROCESSES

METHODS AND SYSTEMS FOR FORMING DIPOLE LAYERS IN STACKED GATE-ALL-A...

THERMAL ATOMIC LAYER ETCHING PROCESSES

ATOMIC LAYER ETCHING PROCESSES

VAPOR PHASE DEPOSITION OF ORGANIC FILMS

METHODS AND SYSTEMS FOR DEPOSITING A LAYER

METHOD AND APPARATUS FOR FORMING A PATTERNED STRUCTURE ON A SUBSTRATE

METHOD AND APPARATUS FOR HARD MASK DEPOSITION

SELECTIVE THERMAL DEPOSITION METHOD

SELECTIVE DEPOSITION OF MATERIAL COMPRISING SILICON AND OXYGEN USIN...

SELECTIVE DEPOSITION USING THERMAL AND PLASMA-ENHANCED PROCESS

SELECTIVE DEPOSITION OF ORGANIC MATERIAL

VAPOR PHASE DEPOSITION OF ORGANIC FILMS

VAPOR PHASE DEPOSITION OF ORGANIC FILMS

METHODS AND SYSTEMS FOR DEPOSITING A LAYER

SELECTIVE DEPOSITION OF METALS, METAL OXIDES, AND DIELECTRICS

TOPOSELECTIVE VAPOR DEPOSITION USING AN INHIBITOR

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

SILICON OXIDE DEPOSITION METHOD