Markus Brotsack

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination system for microlithography
- Patent number 8,792,082
- Issue date Jul 29, 2014
- Carl Zeiss SMT GmbH
- Markus Brotsack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic exposure method as well as a projection exposure...
- Patent number 8,767,181
- Issue date Jul 1, 2014
- Carl Zeiss SMT GmbH
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for microlithography
- Patent number 7,884,922
- Issue date Feb 8, 2011
- Carl Zeiss SMT AG
- Markus Brotsack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic exposure method as well as a projection exposure...
- Patent number 7,847,921
- Issue date Dec 7, 2010
- Carl Zeiss SMT AG
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for a microlithography projection exposure inst...
- Patent number 7,714,983
- Issue date May 11, 2010
- Carl Zeiss SMT AG
- Jess Koehler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical beam transformation system and illumination system comprisi...
- Patent number 7,511,886
- Issue date Mar 31, 2009
- Carl Zeiss SMT AG
- Joerg Schultz
- G02 - OPTICS
Information Patent Grant
Projection objective for immersion lithography
- Patent number 7,460,206
- Issue date Dec 2, 2008
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic exposure method as well as a projection exposure...
- Patent number 7,408,616
- Issue date Aug 5, 2008
- Carl Zeiss SMT AG
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for microlithography
- Patent number 7,283,209
- Issue date Oct 16, 2007
- Carl Zeiss SMT AG
- Markus Brotsack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20110096316
- Publication date Apr 28, 2011
- Carl Zeiss SMT AG
- Markus Brotsack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC EXPOSURE METHOD AS WELL AS A PROJECTION EXPOSURE...
- Publication number 20110069296
- Publication date Mar 24, 2011
- Carl Zeiss SMT AG
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE INST...
- Publication number 20100195077
- Publication date Aug 5, 2010
- Carl Zeiss SMT AG
- Jess Koehler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC EXPOSURE METHOD AS WELL AS A PROJECTION EXPOSURE...
- Publication number 20090040496
- Publication date Feb 12, 2009
- Carl Zeiss
- Toralf GRUNER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
- Publication number 20080297745
- Publication date Dec 4, 2008
- Carl Zeiss SMT AG
- Karl-Stefan WEISSENRIEDER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
- Publication number 20080291419
- Publication date Nov 27, 2008
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination System, In Particular For A Projection Exposure Machin...
- Publication number 20080273186
- Publication date Nov 6, 2008
- Markus Brotsack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20080013066
- Publication date Jan 17, 2008
- Carl Zeiss SMT AG
- Markus Brotsack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Microlithographic Projection Exposure Apparatus
- Publication number 20070285644
- Publication date Dec 13, 2007
- Carl Zeiss SMT AG
- Markus Brotsack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination system for a microlithography projection exposure inst...
- Publication number 20070165202
- Publication date Jul 19, 2007
- Carl Zeiss SMT AG
- Jess Koehler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical beam transformation system and illumination system comprisi...
- Publication number 20060146384
- Publication date Jul 6, 2006
- Carl Zeiss SMT AG
- Joerg Schultz
- G02 - OPTICS
Information Patent Application
Illumination system for a microlithography projection exposure appa...
- Publication number 20060126049
- Publication date Jun 15, 2006
- Carl Zeiss SMT AG
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination system for microlithography
- Publication number 20060050261
- Publication date Mar 9, 2006
- Carl Zeiss SMT AG
- Markus Brotsack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection objective for immersion lithography
- Publication number 20050225737
- Publication date Oct 13, 2005
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Microlithographic exposure method as well as a projection exposure...
- Publication number 20050146704
- Publication date Jul 7, 2005
- Carl Zeiss SMT AG
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Markus Brotsack

Person

Patents Grantslast 30 patents

Illumination system for microlithography

Microlithographic exposure method as well as a projection exposure...

Illumination system for microlithography

Microlithographic exposure method as well as a projection exposure...

Illumination system for a microlithography projection exposure inst...

Optical beam transformation system and illumination system comprisi...

Projection objective for immersion lithography

Microlithographic exposure method as well as a projection exposure...

Illumination system for microlithography

Patents Applicationslast 30 patents

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

MICROLITHOGRAPHIC EXPOSURE METHOD AS WELL AS A PROJECTION EXPOSURE...

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE INST...

MICROLITHOGRAPHIC EXPOSURE METHOD AS WELL AS A PROJECTION EXPOSURE...

PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY

PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY

Illumination System, In Particular For A Projection Exposure Machin...

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

Microlithographic Projection Exposure Apparatus

Illumination system for a microlithography projection exposure inst...

Optical beam transformation system and illumination system comprisi...

Illumination system for a microlithography projection exposure appa...

Illumination system for microlithography

Projection objective for immersion lithography

Microlithographic exposure method as well as a projection exposure...