Masaei Suwada

Person

Nagaoka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for teaching a transportation position and alignment jig
- Patent number 11,247,330
- Issue date Feb 15, 2022
- ASM IP Holding B.V.
- Hideki Yoshida
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate transporting system, storage medium and substrate transpo...
- Patent number 10,403,514
- Issue date Sep 3, 2019
- ASM IP Holding B.V.
- Takashi Hagino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for positioning wafers in multiple wafer transport
- Patent number 9,793,148
- Issue date Oct 17, 2017
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for pre-baking substrate upstream of process c...
- Patent number 9,349,620
- Issue date May 24, 2016
- ASM IP Holdings B.V.
- Keisuke Kamata
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Cluster type semiconductor processing apparatus
- Patent number 8,758,514
- Issue date Jun 24, 2014
- ASM Japan K.K.
- Masahiro Takizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Position sensor system for substrate transfer robot
- Patent number 8,041,450
- Issue date Oct 18, 2011
- ASM Japan K.K.
- Masahiro Takizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus with wafer alignment device
- Patent number 7,963,736
- Issue date Jun 21, 2011
- ASM Japan K.K.
- Masahiro Takizawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor substrate transfer apparatus and semiconductor substr...
- Patent number 7,618,226
- Issue date Nov 17, 2009
- ASM Japan K.K.
- Masahiro Takizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus comprising chamber partitioned i...
- Patent number 7,021,881
- Issue date Apr 4, 2006
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing equipment and maintenance method
- Patent number 6,945,746
- Issue date Sep 20, 2005
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus comprising chamber partitioned i...
- Patent number 6,899,507
- Issue date May 31, 2005
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-line system for semiconductor-manufacturing apparatus
- Patent number 6,662,817
- Issue date Dec 16, 2003
- ASM Japan K.K.
- Takayuki Yamagishi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor processing module and apparatus
- Patent number 6,630,053
- Issue date Oct 7, 2003
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer mechanism
- Patent number 6,305,898
- Issue date Oct 23, 2001
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOAD LOCK ARRANGEMENTS, ASSOCIATED TEMPERATURE CONTROL ASSEMBLIES,...
- Publication number 20240213058
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Masaei Suwada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACE MODULE HAVING FAN FILTER UNIT
- Publication number 20230332791
- Publication date Oct 19, 2023
- ASM IP HOLDING, B.V.
- Masashi Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEM WITH LAMP HEATER, CHAMBER PURGE METHOD
- Publication number 20230022174
- Publication date Jan 26, 2023
- ASM IP HOLDING, B.V.
- Wataru Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR TEACHING A TRANSPORTATION POSITION AND ALIGNMENT JIG
- Publication number 20200122320
- Publication date Apr 23, 2020
- ASM IP HOLDING B.V.
- Hideki YOSHIDA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Apparatus and Method for Pre-Baking Substrate Upstream of Process C...
- Publication number 20160013084
- Publication date Jan 14, 2016
- ASM IP HOLDING B.V.
- Keisuke Kamata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Positioning Wafers in Multiple Wafer Transport
- Publication number 20120325148
- Publication date Dec 27, 2012
- ASM JAPAN K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS WITH WAFER ALIGNMENT DEVICE
- Publication number 20090252580
- Publication date Oct 8, 2009
- ASM JAPAN K.K.
- Masahiro Takizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITION SENSOR SYSTEM FOR SUBSTRATE TRANSFER ROBOT
- Publication number 20090093906
- Publication date Apr 9, 2009
- ASM JAPAN K.K.
- MASAHIRO TAKIZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TYPE SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20080210165
- Publication date Sep 4, 2008
- ASM JAPAN K.K.
- Masahiro TAKIZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor substrate transfer apparatus and semiconductor substr...
- Publication number 20070142962
- Publication date Jun 21, 2007
- ASM JAPAN K.K.
- Masahiro Takizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing apparatus comprising chamber partitioned i...
- Publication number 20050118001
- Publication date Jun 2, 2005
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor manufacturing equipment and maintenance method
- Publication number 20030168948
- Publication date Sep 11, 2003
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing apparatus comprising chamber partitioned i...
- Publication number 20030152445
- Publication date Aug 14, 2003
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas-line system for semiconductor-manufacturing apparatus
- Publication number 20020038669
- Publication date Apr 4, 2002
- Takayuki Yamagishi
- G05 - CONTROLLING REGULATING
Information Patent Application
Semiconductor processing module and apparatus
- Publication number 20020036065
- Publication date Mar 28, 2002
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS

Masaei Suwada

Person

Patents Grantslast 30 patents

Method for teaching a transportation position and alignment jig

Substrate transporting system, storage medium and substrate transpo...

Method for positioning wafers in multiple wafer transport

Apparatus and method for pre-baking substrate upstream of process c...

Cluster type semiconductor processing apparatus

Position sensor system for substrate transfer robot

Wafer processing apparatus with wafer alignment device

Semiconductor substrate transfer apparatus and semiconductor substr...

Semiconductor processing apparatus comprising chamber partitioned i...

Semiconductor manufacturing equipment and maintenance method

Semiconductor processing apparatus comprising chamber partitioned i...

Gas-line system for semiconductor-manufacturing apparatus

Semiconductor processing module and apparatus

Wafer transfer mechanism

Patents Applicationslast 30 patents

LOAD LOCK ARRANGEMENTS, ASSOCIATED TEMPERATURE CONTROL ASSEMBLIES,...

INTERFACE MODULE HAVING FAN FILTER UNIT

SUBSTRATE TRANSFER SYSTEM WITH LAMP HEATER, CHAMBER PURGE METHOD

METHOD FOR TEACHING A TRANSPORTATION POSITION AND ALIGNMENT JIG

Apparatus and Method for Pre-Baking Substrate Upstream of Process C...

Method for Positioning Wafers in Multiple Wafer Transport

WAFER PROCESSING APPARATUS WITH WAFER ALIGNMENT DEVICE

POSITION SENSOR SYSTEM FOR SUBSTRATE TRANSFER ROBOT

CLUSTER TYPE SEMICONDUCTOR PROCESSING APPARATUS

Semiconductor substrate transfer apparatus and semiconductor substr...

Semiconductor processing apparatus comprising chamber partitioned i...

Semiconductor manufacturing equipment and maintenance method

Semiconductor processing apparatus comprising chamber partitioned i...

Gas-line system for semiconductor-manufacturing apparatus

Semiconductor processing module and apparatus