Masahiro Hatakeyama

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Information processing apparatus, information processing system, in...
- Patent number 11,946,470
- Issue date Apr 2, 2024
- Ebara Corporation
- Keiji Maishigi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Polishing apparatus of substrate
- Patent number 11,607,769
- Issue date Mar 21, 2023
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method for polishing substrate including functional chip
- Patent number 11,597,051
- Issue date Mar 7, 2023
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 11,583,973
- Issue date Feb 21, 2023
- Ebara Corporation
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 10,688,620
- Issue date Jun 23, 2020
- Ebara Corporation
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Inspection device
- Patent number 10,157,722
- Issue date Dec 18, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 10,002,740
- Issue date Jun 19, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen observation method and device using secondary emission ele...
- Patent number 9,966,227
- Issue date May 8, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface processing apparatus
- Patent number 9,852,878
- Issue date Dec 26, 2017
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 9,728,374
- Issue date Aug 8, 2017
- Ebara Corporation
- Takehide Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 9,601,302
- Issue date Mar 21, 2017
- Ebara Corporation
- Shoji Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 9,406,480
- Issue date Aug 2, 2016
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus
- Patent number 9,368,322
- Issue date Jun 14, 2016
- Ebara Corporation
- Takehide Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 9,368,314
- Issue date Jun 14, 2016
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and sample observation method using the same
- Patent number 9,194,826
- Issue date Nov 24, 2015
- Ebara Corporation
- Toru Kaga
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus
- Patent number 9,134,261
- Issue date Sep 15, 2015
- Ebara Corporation
- Shoji Yoshikawa
- G01 - MEASURING TESTING
Information Patent Grant
Electro-optical inspection apparatus and method with dust or partic...
- Patent number 9,105,444
- Issue date Aug 11, 2015
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and apparatus of a glass substrate for imprint
- Patent number 9,074,994
- Issue date Jul 7, 2015
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus
- Patent number 8,946,629
- Issue date Feb 3, 2015
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,946,631
- Issue date Feb 3, 2015
- Ebara Corporation
- Nobuharu Noji
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Specimen observation method and device using secondary emission ele...
- Patent number 8,937,283
- Issue date Jan 20, 2015
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample observing device and sample observing method
- Patent number 8,884,225
- Issue date Nov 11, 2014
- Ebara Corporation
- Tsutomu Karimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting sample surface
- Patent number 8,859,984
- Issue date Oct 14, 2014
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 8,822,919
- Issue date Sep 2, 2014
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,803,103
- Issue date Aug 12, 2014
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector and inspecting apparatus
- Patent number 8,796,621
- Issue date Aug 5, 2014
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,742,341
- Issue date Jun 3, 2014
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus
- Patent number 8,742,344
- Issue date Jun 3, 2014
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Sample surface inspection apparatus and method
- Patent number 8,674,317
- Issue date Mar 18, 2014
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Electro-optical inspection apparatus and method with dust or partic...
- Patent number 8,624,182
- Issue date Jan 7, 2014
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20240278380
- Publication date Aug 22, 2024
- EBARA CORPORATION
- Shinro OTA
- B24 - GRINDING POLISHING
Information Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING SYSTEM, IN...
- Publication number 20240077079
- Publication date Mar 7, 2024
- EBARA CORPORATION
- Keiji Maishigi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP
- Publication number 20230173636
- Publication date Jun 8, 2023
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20230158632
- Publication date May 25, 2023
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20220234164
- Publication date Jul 28, 2022
- EBARA CORPORATION
- Tsuneo TORIKOSHI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP
- Publication number 20200391341
- Publication date Dec 17, 2020
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20200269381
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS OF SUBSTRATE
- Publication number 20200130131
- Publication date Apr 30, 2020
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING SYSTEM, IN...
- Publication number 20200109712
- Publication date Apr 9, 2020
- EBARA CORPORATION
- Keiji Maishigi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20180093360
- Publication date Apr 5, 2018
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
INSPECTION DEVICE
- Publication number 20180040452
- Publication date Feb 8, 2018
- EBARA CORPORATION
- Masahiro HATAKEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS
- Publication number 20160322192
- Publication date Nov 3, 2016
- EBARA CORPORATION
- Takehide HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20160307726
- Publication date Oct 20, 2016
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
SURFACE PROCESSING APPARATUS
- Publication number 20150371813
- Publication date Dec 24, 2015
- EBARA CORPORATION
- Masahiro HATAKEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS
- Publication number 20150340193
- Publication date Nov 26, 2015
- EBARA CORPORATION
- Shoji YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS
- Publication number 20150287570
- Publication date Oct 8, 2015
- EBARA CORPORATION
- Takehide HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20150122993
- Publication date May 7, 2015
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20150097116
- Publication date Apr 9, 2015
- EBARA CORPORATION
- Masahiro HATAKEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMEN OBSERVATION METHOD AND DEVICE USING SECONDARY EMISSION ELE...
- Publication number 20150060666
- Publication date Mar 5, 2015
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION METHOD AND DEFECT IN...
- Publication number 20150041645
- Publication date Feb 12, 2015
- Kabushiki Kaisha Toshiba
- Susumu IIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD
- Publication number 20140367570
- Publication date Dec 18, 2014
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20140319345
- Publication date Oct 30, 2014
- EBARA CORPORATION
- Masahiro HATAKEYAMA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140319346
- Publication date Oct 30, 2014
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20140158885
- Publication date Jun 12, 2014
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...
- Publication number 20140091215
- Publication date Apr 3, 2014
- EBARA CORPORATION
- Kenji WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS
- Publication number 20140077078
- Publication date Mar 20, 2014
- Masahiro HATAKEYAMA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140034831
- Publication date Feb 6, 2014
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE
- Publication number 20140014848
- Publication date Jan 16, 2014
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE
- Publication number 20130313429
- Publication date Nov 28, 2013
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
DETECTOR AND INSPECTING APPARATUS
- Publication number 20130228684
- Publication date Sep 5, 2013
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS

Masahiro Hatakeyama

Person

Patents Grantslast 30 patents

Information processing apparatus, information processing system, in...

Polishing apparatus of substrate

Method for polishing substrate including functional chip

Polishing apparatus

Polishing apparatus

Inspection device

Inspection device

Specimen observation method and device using secondary emission ele...

Surface processing apparatus

Inspection apparatus

Inspection apparatus

Testing apparatus using charged particles and device manufacturing...

Inspection apparatus

Inspection system by charged particle beam and method of manufactur...

Electron beam apparatus and sample observation method using the same

Inspection apparatus

Electro-optical inspection apparatus and method with dust or partic...

Inspection method and apparatus of a glass substrate for imprint

Inspection apparatus

Testing apparatus using charged particles and device manufacturing...

Specimen observation method and device using secondary emission ele...

Sample observing device and sample observing method

Method and apparatus for inspecting sample surface

Apparatus for inspection with electron beam, method for operating s...

Inspection system by charged particle beam and method of manufactur...

Detector and inspecting apparatus

Testing apparatus using charged particles and device manufacturing...

Inspection apparatus

Sample surface inspection apparatus and method

Electro-optical inspection apparatus and method with dust or partic...

Patents Applicationslast 30 patents

POLISHING METHOD AND POLISHING APPARATUS

INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING SYSTEM, IN...

METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP

POLISHING APPARATUS

SUBSTRATE PROCESSING SYSTEM

METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP

POLISHING APPARATUS

POLISHING APPARATUS OF SUBSTRATE

INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING SYSTEM, IN...

POLISHING APPARATUS AND POLISHING METHOD

INSPECTION DEVICE

INSPECTION APPARATUS

INSPECTION DEVICE

SURFACE PROCESSING APPARATUS

INSPECTION APPARATUS

INSPECTION APPARATUS

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

INSPECTION APPARATUS

SPECIMEN OBSERVATION METHOD AND DEVICE USING SECONDARY EMISSION ELE...

IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION METHOD AND DEFECT IN...

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

INSPECTION APPARATUS

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...

INSPECTION APPARATUS

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

INSPECTION DEVICE

METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE

DETECTOR AND INSPECTING APPARATUS