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Masahito Mori

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  • Hadano, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20230282491
    • Publication date Sep 7, 2023
    • HITACHI HIGH-TECH CORPORATION
    • Naoyuki KOFUJI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20220392772
    • Publication date Dec 8, 2022
    • Hitachi High-Tech Corporation
    • Chaomei Liu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20220157576
    • Publication date May 19, 2022
    • Hitachi High-Tech Corporation
    • Taku Iwase
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210249233
    • Publication date Aug 12, 2021
    • Hitachi High-Tech Corporation
    • Hiroyuki Kajifusa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210111002
    • Publication date Apr 15, 2021
    • Hitachi High-Technologies Corporation
    • Yuki KONDO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20200234924
    • Publication date Jul 23, 2020
    • Hitachi High-Technologies Corporation
    • Kenetsu YOKOGAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20200227270
    • Publication date Jul 16, 2020
    • Hitachi High-Technologies Corporation
    • Taku IWASE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA ASHING APPARATUS
    • Publication number 20200043744
    • Publication date Feb 6, 2020
    • Hitachi High-Technologies Corporation
    • Toru ITO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190214235
    • Publication date Jul 11, 2019
    • Hitachi High-Technologies Corporation
    • Kenetsu YOKOGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190189396
    • Publication date Jun 20, 2019
    • Hitachi High-Technologies Corporation
    • Taku IWASE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20180122651
    • Publication date May 3, 2018
    • Hitachi High-Technologies Corporation
    • Ryo ISHIMARU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20180082825
    • Publication date Mar 22, 2018
    • Hitachi High-Technologies Corporation
    • Hayato WATANABE
    • B08 - CLEANING
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20180068862
    • Publication date Mar 8, 2018
    • Hitachi High-Technologies Corporation
    • Satoshi TERAKURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD USING SAME
    • Publication number 20180047595
    • Publication date Feb 15, 2018
    • Hitachi High-Technologies Corporation
    • Naoyuki KOFUJI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20180040459
    • Publication date Feb 8, 2018
    • Hitachi High-Technologies Corporation
    • Taku IWASE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20170338086
    • Publication date Nov 23, 2017
    • Hitachi High-Technologies Corporation
    • Takao Arase
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20160203958
    • Publication date Jul 14, 2016
    • Hitachi High-Technologies Corporation
    • Takao Arase
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DRY ETCHING APPARATUS AND METHOD
    • Publication number 20160141183
    • Publication date May 19, 2016
    • Hitachi High-Technologies Corporation
    • Masahito MORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR CONTROLLING PLASMA PROCESSING APPARATUS
    • Publication number 20150357210
    • Publication date Dec 10, 2015
    • Hitachi High-Technologies Corporation
    • Masahito Mori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20150348763
    • Publication date Dec 3, 2015
    • Hitachi High-Technologies Corporation
    • Masahito MORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20150243486
    • Publication date Aug 27, 2015
    • Hitachi High-Technologies Corporation
    • Kenetsu Yokogawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DRY ETCHING METHOD
    • Publication number 20150221518
    • Publication date Aug 6, 2015
    • Hitachi High-Technologies Corporation
    • Satoshi Terakura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR CONTROLLING PLASMA PROCESSING APPARATUS
    • Publication number 20140225503
    • Publication date Aug 14, 2014
    • Hitachi High-Technologies Corporation
    • Masahito Mori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20140116621
    • Publication date May 1, 2014
    • Hitachi High-Technologies Corporation
    • Masahito Mori
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20140102640
    • Publication date Apr 17, 2014
    • Hitachi High-Technologies Corporation
    • Ken'etsu YOKOGAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DRY ETCHING APPARATUS AND METHOD
    • Publication number 20130228550
    • Publication date Sep 5, 2013
    • Hitachi High-Technologies Corporation
    • Masahito MORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20110297533
    • Publication date Dec 8, 2011
    • Hitachi High-Technologies Corporation
    • Masahito Mori
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20110253672
    • Publication date Oct 20, 2011
    • Hitachi High-Technologies Corporation
    • Masami Kamibayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma Processing Apparatus and Plasma Processing Method
    • Publication number 20100258529
    • Publication date Oct 14, 2010
    • Masahito MORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing method and plasma processing apparatus
    • Publication number 20080190893
    • Publication date Aug 14, 2008
    • Hitachi High-Technologies Corporation
    • Masahito Mori
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...