-
VACUUM PROCESSING APPARATUS
-
Publication number 20240297058
-
Publication date Sep 5, 2024
-
Hitachi High-Tech Corporation
-
Chen Pin HSU
-
H01 - BASIC ELECTRIC ELEMENTS
-
PLASMA PROCESSING APPARATUS
-
Publication number 20220157576
-
Publication date May 19, 2022
-
Hitachi High-Tech Corporation
-
Taku Iwase
-
H01 - BASIC ELECTRIC ELEMENTS
-
PLASMA PROCESSING APPARATUS
-
Publication number 20200234924
-
Publication date Jul 23, 2020
-
Hitachi High-Technologies Corporation
-
Kenetsu YOKOGAWA
-
H01 - BASIC ELECTRIC ELEMENTS
-
PLASMA PROCESSING APPARATUS
-
Publication number 20190214235
-
Publication date Jul 11, 2019
-
Hitachi High-Technologies Corporation
-
Kenetsu YOKOGAWA
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
PLASMA PROCESSING APPARATUS
-
Publication number 20190189396
-
Publication date Jun 20, 2019
-
Hitachi High-Technologies Corporation
-
Taku IWASE
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
VACUUM PROCESSING APPARATUS
-
Publication number 20160379857
-
Publication date Dec 29, 2016
-
Hitachi High-Technologies Corporation
-
Yoshifumi OGAWA
-
H01 - BASIC ELECTRIC ELEMENTS
-
PLASMA PROCESSING APPARATUS
-
Publication number 20150243486
-
Publication date Aug 27, 2015
-
Hitachi High-Technologies Corporation
-
Kenetsu Yokogawa
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
-
VACUUM PROCESSING SYSTEM
-
Publication number 20120067521
-
Publication date Mar 22, 2012
-
Hitachi High-Technologies Corporation
-
Takahiro SHIMOMURA
-
H01 - BASIC ELECTRIC ELEMENTS
-
VACUUM PROCESSING APPARATUS
-
Publication number 20120067522
-
Publication date Mar 22, 2012
-
Hitachi High-Technologies Corporation
-
Takahiro SHIMOMURA
-
H01 - BASIC ELECTRIC ELEMENTS
-
Plasma processing apparatus
-
Publication number 20100186672
-
Publication date Jul 29, 2010
-
Koji Okuda
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Vacuum processing apparatus
-
Publication number 20100163185
-
Publication date Jul 1, 2010
-
Michiaki Kobayashi
-
H01 - BASIC ELECTRIC ELEMENTS
-
VACUUM PROCESSING APPARATUS
-
Publication number 20090324367
-
Publication date Dec 31, 2009
-
Masakazu Isozaki
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
-
Vacuum processing system
-
Publication number 20070044916
-
Publication date Mar 1, 2007
-
Masakazu Isozaki
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-