Masami Nakano

Person

Annaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for inducing damage for gettering to single crystal silicon...
- Patent number 5,759,087
- Issue date Jun 2, 1998
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- B24 - GRINDING POLISHING
Information Patent Grant
Method for cleaning semiconductor silicon wafer
- Patent number 5,665,168
- Issue date Sep 9, 1997
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning silicon wafers in cleaning baths with controlled...
- Patent number 5,662,743
- Issue date Sep 2, 1997
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning semiconductor wafers
- Patent number 5,626,681
- Issue date May 6, 1997
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- B08 - CLEANING
Information Patent Grant
Brush cleaning apparatus and cleaning system for disk-shaped object...
- Patent number 5,581,837
- Issue date Dec 10, 1996
- Shin-Etsu Handotai Co., Ltd.
- Isao Uchiyama
- B08 - CLEANING
Information Patent Grant
Method of making semiconductor wafers
- Patent number 5,494,862
- Issue date Feb 27, 1996
- Shin-Etsu Handotai Co., Ltd.
- Tadahiro Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for production of wafer
- Patent number 5,447,890
- Issue date Sep 5, 1995
- Shin-Etsu Handotai Co., Ltd.
- Tadahiro Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting bonded wafers
- Patent number 5,007,071
- Issue date Apr 9, 1991
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- G01 - MEASURING TESTING

Masami Nakano

Person

Patents Grantslast 30 patents

Method for inducing damage for gettering to single crystal silicon...

Method for cleaning semiconductor silicon wafer

Method of cleaning silicon wafers in cleaning baths with controlled...

Method of cleaning semiconductor wafers

Brush cleaning apparatus and cleaning system for disk-shaped object...

Method of making semiconductor wafers

Method for production of wafer

Method of inspecting bonded wafers