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Masashi Ohno
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Nagoya City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for reducing particles from an electrostatic chuck and an eq...
Patent number
6,975,497
Issue date
Dec 13, 2005
NGK Insulators, Ltd.
Mie Nagao
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Method for reducing particles from an electrostatic chuck and an eq...
Patent number
6,549,392
Issue date
Apr 15, 2003
NGK Insulators, Ltd.
Masashi Ohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate for use in wafer attracting apparatus and manufacturing m...
Patent number
6,491,571
Issue date
Dec 10, 2002
NGK Insulators, Ltd.
Masashi Ohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Equipment for holding a semiconductor wafer, a method for manufactu...
Patent number
6,292,346
Issue date
Sep 18, 2001
NGK Insulators, Ltd.
Masashi Ohno
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Method for reducing particles from an electrostatic chuck and an eq...
Patent number
6,252,758
Issue date
Jun 26, 2001
NGK Insulators, Ltd.
Mie Nagao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate for use in wafer attracting apparatus and manufacturing m...
Patent number
6,166,432
Issue date
Dec 26, 2000
NGK Insulators, Ltd.
Masashi Ohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck
Patent number
6,134,096
Issue date
Oct 17, 2000
NGK Insulators, Ltd.
Naohito Yamada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electrostatic chuck
Patent number
5,946,183
Issue date
Aug 31, 1999
NGK Insulators, Ltd.
Naohito Yamada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
ELECTRODE AND ELECTRODE STRUCTURAL BODY
Publication number
20160208397
Publication date
Jul 21, 2016
NGK Insulators, Ltd.
Masashi OHNO
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Manufacturing method of capacitor
Publication number
20020112330
Publication date
Aug 22, 2002
NGK Insulators, Ltd.
Masashi Ohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for reducing particles from an electrostatic chuck and an eq...
Publication number
20010002871
Publication date
Jun 7, 2001
NGK Insulators, Ltd.
Mie Nagao
H01 - BASIC ELECTRIC ELEMENTS